US2002179156A1PendingUtilityA1

Gas containment system

36
Priority: May 9, 2001Filed: May 3, 2002Published: Dec 5, 2002
Est. expiryMay 9, 2021(expired)· nominal 20-yr term from priority
Inventors:James W. Smith
F17C 2260/036F17C 2270/0518F17C 2205/0338F17C 13/12F17C 7/04F17C 2250/043F17C 2205/0335F17C 2260/042F17C 2223/0123Y10T137/86083
36
PatentIndex Score
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References
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Claims

Abstract

A gas containment system comprising a source of high pressure gas and means to regulate the supply of the gas to processing apparatus, wherein in the event of failure of the regulatory means, means are provided to direct gas escaping from the regulatory means in to a chamber at sub-atmospheric pressure.

Claims

exact text as granted — not AI-modified
1 . A gas containment system comprising a source of high pressure gas and means to regulate the supply of the gas to processing apparatus, wherein in the event of failure of the regulatory means, means are provided to direct gas escaping from the regulatory means in to a chamber at sub-atmospheric pressure.  
     
     
         2 . A system as claimed in  claim 1  in which the regulatory means includes or comprises a gas pressure regulator.  
     
     
         3 . A system according to  claim 2  in which the gas directing means is connected to the reference pressure side of the gas pressure regulator.  
     
     
         4 . A system according to  claim 3  in which gas directing means from more than one gas containment system is connected to one chamber at sub-atmospheric pressure.  
     
     
         5 . A system according to  claim 4  in which a non-return valve is present between the regulatory means and the chamber.  
     
     
         6 . A system according to  claim 5  in which the chamber is evacuated to sub-atmospheric pressure by means of a vacuum pump.  
     
     
         7 . A system according to  claim 6  in which a pressure monitor associated with the chamber is provided to detect a failure in the regulatory means.  
     
     
         8 . A system according to  claim 7  in which gas in the chamber is directed to an abatement device.  
     
     
         9 . A system according to  claim 1  in which gas directing means from more than one gas containment system is connected to one chamber at sub-atmospheric pressure.  
     
     
         10 . A system according to  claim 9  in which a non-return valve is present between the regulatory means and the chamber.  
     
     
         11 . A system according to  claim 10  in which the chamber is evacuated to sub-atmospheric pressure by means of a vacuum pump.  
     
     
         12 . A system according to  claim 11  in which a pressure monitor associated with the chamber is provided to detect a failure in the regulatory means.  
     
     
         13 . A system according to  claim 12  in which gas in the chamber is directed to an abatement device.  
     
     
         14 . A system according to  claim 1  in which a non-return valve is present between the regulatory means and the chamber.  
     
     
         15 . A system according to  claim 14  in which a pressure monitor associated with the chamber is provided to detect a failure in the regulatory means.  
     
     
         16 . A system according to  claim 15  in which gas in the chamber is directed to an abatement device.  
     
     
         17 . A system according to  claim 1  in which the chamber is evacuated to sub-atmospheric pressure by means of a vacuum pump.  
     
     
         18 . A system according to  claim 17  in which a pressure monitor associated with the chamber is provided to detect a failure in the regulatory means.  
     
     
         19 . A system according to  claim 18  in which gas in the chamber is directed to an abatement device.  
     
     
         20 . A system according to  claim 1  in which a pressure monitor associated with the chamber is provided to detect a failure in the regulatory means.  
     
     
         21 . A system according to  claim 20  in which gas in the chamber is directed to an abatement device.  
     
     
         22 . A system according to  claim 1  in which gas in the chamber is directed to an abatement device.  
     
     
         23 . A system according to  claim 2  in which gas directing means from more than one gas containment system is connected to one chamber at sub-atmospheric pressure.  
     
     
         24 . A system according to  claim 2  in which a non-return valve is present between the regulatory means and the chamber.  
     
     
         25 . A system according to  claim 2  in which a pressure monitor associated with the chamber is provided to detect a failure in the regulatory means.  
     
     
         26 . A system according to  claim 2  in which gas in the chamber is directed to an abatement device.

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