Methods for manufacturing patterned ceramic green-sheets and multilayered ceramic packages

Abstract

Cast-on-resist (COR) methods of manufacturing patterned ceramic layers that can be used in forming a multilayered ceramic device are provided according to preferred exemplary embodiments of the present invention. The COR methods are comprised of processing steps that are conducted on a transporting system and include: depositing a resist on a substrate ( 102 ) and selectively exposing the resist to a radiation source ( 104 ) such that a first portion of the resist having a positive image of the pattern is soluble in a solvent and a second portion of the resist having a negative image of the pattern is insoluble in the solvent, immersing the resist in the solvent to remove the first portion to form a casting substrate having the negative image of the pattern ( 106 ), applying ceramic slurry on the casting substrate ( 204 ), curing the ceramic slurry on the casting substrate ( 206 ), and removing the ceramic slurry from the casting substrate after the curing such that a patterned ceramic layer is formed for use in a multilayered ceramic device ( 208 ).

1 . A method of forming a ceramic layer with a pattern for use in a multilayered ceramic device, comprising: 
 depositing a layer of sensitive material on a substrate;    selectively exposing said layer of sensitive material to a radiation source such that a first portion of said layer of sensitive material having a positive image of the pattern is soluble in a solvent and a second portion of said layer of sensitive material having a negative image of the pattern is insoluble in said solvent;    immersing said layer of sensitive material in said solvent to remove said first portion of said layer of sensitive material to form a casting substrate having said negative image of the pattern provided by said second portion of said layer of sensitive material;    connecting said casting substrate to a transporting apparatus;    applying ceramic slurry on said casting substrate with an application apparatus as said transporting apparatus transports said casting substrate;    curing said ceramic slurry on said casting substrate with a curing apparatus as said transporting apparatus transports said casting substrate; and    separating said ceramic slurry from said casting substrate after said curing with a separation apparatus such that the ceramic layer with the pattern is formed for use in a multilayered ceramic device.    
     
     
         2 . The method of  claim 1 , wherein 
 said transporting apparatus is comprised of a tape casting substrate connected to a tape casting apparatus that is configured to transport said tape casting substrate and said casting substrate connected to said tape casting substrate; and    said substrate and said tape casting substrate are selected from the group consisting of MYLAR≦, polyethylene, polypropylene and tape-casting paper.    
     
     
         3 . The method of  claim 1 , wherein said application apparatus is a curtain coating machine.  
     
     
         4 . The method of  claim 1 , wherein said application apparatus is comprised of a doctor blade.  
     
     
         5 . The method of  claim 1 , wherein said selectively exposing said layer of sensitive material to a radiation source comprises: 
 placing a mask between said radiation source and said resist, said mask having an opaque region and a transparent region; and    activating said radiation source such that said second portion below said transparent region is exposed to said radiation source.    
     
     
         6 . The method of  claim 1 , further comprising applying a release layer on at least part of said casting substrate.  
     
     
         7 . The method of  claim 1 , wherein said ceramic slurry is a composite having ceramic particles and inorganic particles.  
     
     
         8 . The method of  claim 1 , wherein said curing said ceramic slurry on said casting substrate includes utilization of a curable binder.  
     
     
         9 . The method of  claim 8 , wherein said curable binder is an acrylate monomer.  
     
     
         10 . The method of  claim 1 , wherein the separating apparatus is a vacuum table.  
     
     
         11 . The method of  claim 1 , further comprising leveling the top surface of said cured ceramic slurry on said casting substrate with a plastic deformation method.  
     
     
         12 . The method of  claim 1 , wherein said pattern is a partially recessed pattern.  
     
     
         13 . The method of  claim 1 , wherein said pattern extends through the thickness of the ceramic layer.  
     
     
         14 . The method of  claim 1 , wherein said pattern forms at least part of a micro feature selected from the group consisting of a channel, a via and a cavity.  
     
     
         15 . A method of forming a ceramic layer with a pattern for use in a multilayered ceramic device, comprising: 
 connecting a line substrate to a tape casting apparatus that is configured to transport said line substrate;    depositing a layer of sensitive material on said line substrate;    selectively exposing said layer of sensitive material on said line substrate to a radiation source such that a first portion of said layer of sensitive material having a positive image of the pattern is soluble in a solvent and a second portion of said layer of sensitive material having a negative image of the pattern is insoluble in said solvent as said transporting apparatus transports said line substrate;    immersing said layer of sensitive material on said line substrate in said solvent to remove said first portion of said layer of sensitive material to form a casting substrate within said line substrate having said negative image of the pattern provided by said second portion of said layer of sensitive material as said transporting apparatus transports said line substrate;    applying ceramic slurry on said casting substrate by an application apparatus as said transporting apparatus transports said line substrate;    curing said ceramic slurry on said casting substrate with a curing apparatus as said transporting apparatus transports said line substrate; and    removing said ceramic slurry from said casting substrate after said curing such that the ceramic layer with the pattern is formed for use in a multilayered ceramic device.    
     
     
         16 . The method of  claim 15 , wherein said application apparatus is a curtain coating machine.  
     
     
         17 . The method of  claim 15 , wherein said application apparatus is comprised of a doctor blade.  
     
     
         18 . The method of  claim 15 , wherein said line substrate is stainless steel and further comprising of applying a release layer to the stainless steel before depositing said layer of sensitive material on said line substrate.  
     
     
         19 . The method of  claim 15 , further comprising applying a release layer on at least part of said casting substrate.  
     
     
         20 . The method of  claim 15 , wherein said curing said ceramic slurry on said casting substrate includes utilization of a curable binder.  
     
     
         21 . The method of  claim 20 , wherein said curable binder is an acrylate monomer.  
     
     
         22 . The method of  claim 15 , wherein said separation apparatus is a vacuum table.  
     
     
         23 . The method of  claim 15 , further comprising leveling the top surface of said cured ceramic slurry on said casting substrate with a plastic deformation method.  
     
     
         24 . The method of  claim 15 , wherein said pattern is a partially recessed pattern.  
     
     
         25 . The method of  claim 15 , wherein said pattern extends through the thickness of the ceramic layer.  
     
     
         26 . The method of  claim 15 , wherein said pattern forms at least part of a micro feature selected from the group consisting of a channel, a via and a cavity.  
     
     
         27 . A method for making a multilayered ceramic device, comprising: 
 forming a first ceramic layer;    forming a second ceramic layer having a pattern, said forming said second ceramic layer having said pattern comprising: 
 depositing a layer of sensitive material on a substrate;  
 selectively exposing said layer of sensitive material to a radiation source such that a first portion of said layer of sensitive material having a positive image of the pattern is soluble in a solvent and a second portion of said layer of sensitive material having a negative image of the pattern is insoluble in said solvent;  
 immersing said layer of sensitive material in said solvent to remove said first portion of said layer of sensitive material to form a casting substrate having said negative image of the pattern provided by said second portion of said layer of sensitive material;  
 connecting said casting substrate to a transporting apparatus;  
 applying ceramic slurry which is a composite having ceramic particles and inorganic particles on said casting substrate with an application apparatus as said transporting apparatus transports said casting substrate;  
 curing said ceramic slurry on said casting substrate with a curing apparatus as said transporting apparatus transports said casting substrate; and  
 separating said ceramic slurry from said casting substrate after said curing to produce said second ceramic layer;  
 affixing said first ceramic layer to said second ceramic layer; and  
 sintering said first ceramic layer and said second ceramic layer.  
   
     
     
         28 . The method of  claim 27 , wherein 
 said transporting apparatus is comprised of a tape casting substrate connected to a tape casting apparatus that is configured to transport said tape casting substrate and said casting substrate connected to said tape casting substrate; and    said substrate and said tape casting substrate are selected from the group consisting of MYLAR≦, polyethylene, polypropylene and tape-casting paper.    
     
     
         29 . The method of  claim 27 , wherein said application apparatus is a curtain coating machine.  
     
     
         30 . The method of  claim 27 , wherein said application apparatus is comprised of a doctor blade.  
     
     
         31 . The method of  claim 27 , further comprising applying a release layer on at least part of said casting substrate.  
     
     
         32 . The method of  claim 27 , wherein said curing said ceramic slurry on said casting substrate includes utilization of a curable binder.  
     
     
         33 . The method of  claim 27 , wherein the separating apparatus is a vacuum table.  
     
     
         34 . The method of  claim 27 , further comprising leveling the top surface of said cured ceramic slurry on said casting substrate with a plastic deformation method.  
     
     
         35 . The method of  claim 27 , wherein said multilayered ceramic device has at least one micro feature selected from the group consisting of a channel, a via and a cavity.  
     
     
         36 . The method of  claim 27 , wherein said multilayered ceramic device has at least one component selected from the group consisting of a heater, a thermoelectric element, a heterogeneous catalyst, a capacitive sensor, a resistive sensor, an inductive sensor, a optical sensor, a temperature sensor, a pH sensor, an electroosmotic pump, an electrohydrodynamic pump, a piezoelectric member, and an electromagnet.  
     
     
         37 . The method of  claim 27 , wherein said multilayered ceramic device is a multilayered microfluidic device.  
     
     
         38 . A method for making a multilayered ceramic device, comprising: 
 forming a first ceramic layer;    forming a second ceramic layer having a pattern, said forming said second ceramic layer having said pattern comprising: 
 connecting a line substrate to a tape casting apparatus that is configured to transport said line substrate;  
 depositing a layer of sensitive material on said line substrate;  
 selectively exposing said layer of sensitive material on said line substrate to a radiation source such that a first portion of said layer of sensitive material having a positive image of the pattern is soluble in a solvent and a second portion of said layer of sensitive material having a negative image of the pattern is insoluble in said solvent as said transporting apparatus transports said line substrate;  
 immersing said layer of sensitive material on said line substrate in said solvent to remove said first portion of said layer of sensitive material to form a casting substrate within said line substrate having said negative image of the pattern provided by said second portion of said layer of sensitive material as said transporting apparatus transports said line substrate;  
 applying ceramic slurry which is a composite having ceramic particles and inorganic particles on said casting substrate by an application apparatus as said transporting apparatus transports said line substrate;  
 curing said ceramic slurry on said casting substrate with a curing apparatus as said transporting apparatus transports said line substrate; and  
 removing said ceramic slurry from said casting substrate after said curing to produce said second ceramic layer;  
 affixing said first ceramic layer to said second ceramic layer; and  
 sintering said first ceramic layer and said second ceramic layer.  
   
     
     
         39 . The method of  claim 38 , wherein said application apparatus is a curtain coating machine.  
     
     
         40 . The method of  claim 38 , further comprising applying a release layer on at least part of said casting substrate.  
     
     
         41 . The method of  claim 38 , wherein said curing said ceramic slurry on said casting substrate includes utilization of a curable binder.  
     
     
         42 . The method of  claim 38 , further comprising leveling the top surface of said cured ceramic slurry on said casting substrate with a plastic deformation method.  
     
     
         43 . The method of  claim 38 , wherein said multilayered ceramic device has at least one micro feature selected from the group consisting of a channel, a via and a cavity.  
     
     
         44 . The method of  claim 38 , wherein said multilayered ceramic device has at least one component selected from the group consisting of a heater, a thermoelectric element, a heterogeneous catalyst, a capacitive sensor, a resistive sensor, an inductive sensor, a optical sensor, a temperature sensor, a pH sensor, an electroosmotic pump, an electrohydrodynamic pump, a piezoelectric member, and an electromagnet.  
     
     
         45 . The method of  claim 38 , wherein said multilayered ceramic device is a multilayered microfluidic device.