Magnetic carrying device

Abstract

A drive member has a spiral magnetic coupling in its upper surface configured from a N pole spiral and a S pole spiral. A carrier can slidably move in the shaft direction to pass through a point that is a fixed distance from the upper surface of the drive member, and a magnetic coupling is provided at an interval the same as the interval between the N pole spiral and the S pole spiral of the spiral magnetic coupling. The carrier is moved directly by the rotational operation of the drive member. The arranged interval (d) of the drive member along a conveying path is a positive integer multiple of twice the interval (p) between the N pole spiral and S pole spiral of the spiral magnetic coupling. The carrier can be moved smoothly and without interruption, even though a transfer part divides the magnetic carrying path between successive chambers.

1 . A magnetic carrying device for carrying an object to be processed through a plurality of chambers that are separated from each other by an openable linking part, the magnetic carrying device comprising: 
 a carrier having a plurality of carrier magnetic coupling parts at a slide end;    a rotating drive member arranged in each of the plurality of chambers, each rotating drive member having an outer surface with a spiral magnetic coupling part having an N pole spiral part and an S pole spiral part, the N pole spiral part being arranged at a first interval from the S pole spiral part;    a drive device;    a power transmission part arranged to transmit a drive force from the drive device to the rotating drive members;    the carrier magnetic coupling parts being spaced from each other a distance substantially equal to the first interval;    a guide device slidably supporting the carrier along a path at a spaced relationship from the rotating drive members so that the carrier is moved along the guide device by a rotating motion of the rotating drive members;    a control member provided to synchronously control the rotating drive members to provide a continuous operation of the carrier between the chambers;    wherein the rotating drive members are spaced from each other to define a pitch of 2×the first interval×a positive whole number integer.    
     
     
         2 . The magnetic carrying device of  claim 1 , wherein the rotating drive members are exterior to the chambers.  
     
     
         3 . The magnetic carrying device of  claim 1 , wherein the pitch of the rotating drive members has an acceptable tolerance of ±1.5 mm.  
     
     
         4 . The magnetic carrying device of  claim 1 , wherein each of the rotating drive members is divided into a first section and a second section and the power transmission part is disposed between the first section and the second section.  
     
     
         5 . The magnetic carrying device of  claim 1 , wherein a matching of the rotating drive members may have a total disparity of ±30°.  
     
     
         6 . The magnetic carrying device of  claim 1 , wherein a matching of the rotating drive members may have a total disparity of ±18.2°.  
     
     
         7 . The magnetic carrying device of  claim 1 , wherein the drive device is a pulse motor.  
     
     
         8 . The magnetic carrying device of  claim 7 , wherein the control member controls an operation of the pulse motor by pulse number control.