Organotitanium precursors and manufacturing method thereof

Abstract

Disclosed are an organotitanium precursor and a method for manufacturing the same. The organotitanium precursor of the present invention has a structure in which titanium ion having a valence of +4, glycol having a valence of −2, β-ketoester having a valence of −1 are reacted in a molar ratio of 1:1:2, and thereby coordination sites of the titanium are saturated. According to the invention, volatility of the precursor is enhanced. Also, since the precursor is separated in the form of a white powder, it is easy to deal the precursor. Further, the precursor of the invention allows a superior deposition rate even at a temperature of 470° C. or less, so that it is possible to economically manufacture titanium dioxide thin film which is applicable to BST or PZT system.

What is claimed is:  
     
         1 . An organotitanium precursor has the following structural formula:  
       
         
           
           
               
               
           
         
         wherein R 1  and R 2  are selected from a group consisting of n- or branched-chain alkyl group each having 1-8 carbon atoms, cycloalkyl group, phenyl group, and benzyl group, and R 3  is n- or branched-chain alkylene group composed of 2-13 carbon atoms.  
       
     
     
         2 . A method for manufacturing an organotitanium precursor, the method comprising: 
 a first step of preparing a titanium tetraalkoxide expressed by Ti(OR) 4  or a material containing the titanium tetraalkoxide;    a second step of adding a glycol expressed by a formula 2 to the titanium tetraalkoxide or the material, and reacting the glycol with the titanium tetraalkoxide or the material to form a reaction intermediate;    a third step of adding a 0-ketoester expressed by a formula 3 to the reaction intermediate, and reacting the β-ketoester with the reaction intermediate to form a reaction product; and    a fourth step of removing a unnecessary by-product from the reaction product, and adding a solvent containing an alcohol component to the unnecessary by-product-removed reaction product, and thereby obtaining white solid,    Formula 2:                        wherein R is an alkyl group in which the number of n- or branched-chain carbon atoms is 1-4, R 1  and R 2  are selected from a group consisting of n- or branched-chain alkyl group each having 1-8 carbon atoms, cycloalkyl group, phenyl group, and benzyl group, and R 3  is n- or branched -chain alkylene group composed of 2-13 carbon atoms.      
     
     
         3 . The method of  claim 2 , wherein the material containing the titanium tetraalkoxide is a solution which is formed by adding an aliphatic hydrocarbon or aromatic hydrocarbon series solvent to the titanium tetraalkoxide, and said the fourth step further comprises a step of removing the solvent.  
     
     
         4 . The method of  claim 2  or  3 , wherein the organotitanium precursor contains titanium, the glycol, and the β-ketoester having a molar ratio of 1:1:2.  
     
     
         5 . A method for manufacturing an organtitanium precursor, the method comprising: 
 a first step of preparing a titanium tetraalkoxide expressed by Ti(OR) 4  or a material containing the titanium tetraalkoxide;    a second step of adding a β-ketoester expressed by a formula 4 to the titanium alkoxide or the material, and reacting the β-ketoester with the titanium alkoxide or the material to form a reaction intermediate;    a third step of adding a glycol expressed by a formula 5 to the reaction intermediate, and reacting the glycol with the reaction intermediate to form a reaction product; and    a fourth step of removing a unnecessary by-product from the reaction product, and adding a solvent containing an alcohol component to the unnecessary by-product-removed reaction product, and thereby obtaining white solid,                          Formula 5:    HO-R 3 -OH    wherein R is an alkyl group in which the number of n- or branched-chain carbon atoms is 1-4, R 1  and R 2  are selected from a group consisting of n- or branched-chain alkyl group each having 1-8 carbon atoms, cycloalkyl group, phenyl group, and benzyl group, and R 3  is n- or branched-chain alkylene group composed of 2-13 carbon atoms.    
     
     
         6 . The method of  claim 5 , wherein the material containing the titanium tetraalkoxide is a solution which is formed by adding an aliphatic hydrocarbon or aromatic hydrocarbon series solvent to the titanium tetraalkoxide, and said the fourth step further comprises a step of removing the solvent.  
     
     
         7 . The method of  claim 5  or  6 , wherein the organotitanium precursor contains titanium, the glycol, and the β-ketoester having a molar ratio of 1:1:2.  
     
     
         8 . A method for manufacturing an organotitanium precursor, the method comprising: 
 a first step of preparing a titanium tetraalkoxide expressed by Ti(OR) 4  or a material containing the titanium tetraalkoxide;    a second step of adding a glycol expressed by a formula 6 and a β-ketoester expressed by a formula 7 to the titanium alkoxide or the material, and reacting the β-ketoester and the glycol with the titanium alkoxide or the material to form a reaction product; and    a third step of removing a unnecessary by-product from the reaction product of the second step, and adding a solvent containing an alcohol component to the unnecessary by-product-removed second reaction product, and thereby obtaining white solid,    Formula 6:    HO-R 3 -OH                        wherein R is an alkyl group in which the number of n- or branched-chain carbon atoms is 1-4, R 1  and R 2  are selected from a group consisting of n- or branched-chain alkyl group each having 1-8 carbon atoms, cycloalkyl group, phenyl group, and benzyl group, and R 3  is n- or branched-chain alkylene group composed of 2-13 carbon atoms.      
     
     
         9 . The method of  claim 8 , wherein the material containing the titanium tetraalkoxide is a solution which is formed by adding an aliphatic hydrocarbon or aromatic hydrocarbon series solvent to the titanium tetraalkoxide, and said the third step further comprises a step of removing the solvent.  
     
     
         10 . The method of  claim 8  or  9 , wherein the organotitanium precursor contains titanium, the glycol, and the β-ketoester having a molar ratio of 1:1:2.