Liquid crystal display having transparent conductive film on interlayer insulating film formed by coating

Abstract

A liquid crystal display is fabricated which has bus wires disposed in a grid shape, switching elements coupled to the bus wires, and pixel electrodes which are disposed on an interlayer insulating film formed by coating and which are coupled with the switching elements. In fabricating the liquid crystal display, when a transparent conductive film is formed on the interlayer insulating film which is formed by coating, the temperature of the substrate is controlled to become 100° C.-170° C. In other way, when the transparent conductive film is formed on the interlayer insulating film in a non-heated condition, an oxygen flow rate ratio is set to 1% or lower, and annealing is performed after forming the film. Thereby, when etching the ITO film on the interlayer insulating film, etching residue is not produced. Further, contact resistance between the ITO film and the lower layer metal can be uniformly decreased, and display defects can be obviated.

What is claimed is:  
     
         1 . A method of manufacturing a liquid crystal display which has bus wires disposed on a substrate in a grid shape, switching elements coupled to the bus wires, and pixel electrodes formed of a transparent conductive film disposed on an interlayer insulating film formed by coating, the pixel electrodes being coupled with the switching elements via contact through holes formed through the interlayer insulating film, said method comprising: 
 controlling the temperature of the substrate to 100-170° C., when the transparent conductive film is formed on the interlayer insulating film.    
     
     
         2 . A method of manufacturing a liquid crystal display as set forth in  claim 1 , wherein the substrate is previously heated in a heating chamber and then transferred to a chamber for forming the transparent conductive film.  
     
     
         3 . A method of manufacturing a liquid crystal display as set forth in  claim 1 , wherein the substrate is previously heated and sputter etched in a heating chamber and then transferred to a chamber for forming the transparent conductive film.  
     
     
         4 . A method of manufacturing a liquid crystal display as set forth in  claim 1 , wherein heating of the substrate, sputter etching after the heating, and forming the transparent conductive film thereafter are performed in the same vacuum condition.  
     
     
         5 . A method of manufacturing a liquid crystal display as set forth in  claim 1 , wherein the interlayer insulating film formed by coating is an organic insulating film.  
     
     
         6 . A method of manufacturing a liquid crystal display as set forth in  claim 1 , wherein the liquid crystal display has a metal film coupled with the transparent conductive film, the transparent conductive film is made of ITO, and the metal film coupled with the transparent conductive film is made of chromium or an alloy containing chromium as the main constituent.  
     
     
         7 . A method of manufacturing a liquid crystal display which has bus wires disposed on a substrate in a grid shape, switching elements coupled to the bus wires, and pixel electrodes formed of a transparent conductive film disposed on an interlayer insulating film formed by coating, the pixel electrodes being coupled with the switching elements via contact through holes formed through the interlayer insulating film, said method comprising: 
 forming the transparent conductive film on the interlayer insulating film in a non-heated condition and in a condition in which an oxygen flow rate ratio is 1% or smaller; and    annealing after forming the transparent conductive film.    
     
     
         8 . A method of manufacturing a liquid crystal display as set forth in  claim 7 , wherein the annealing is performed at a temperature of 200-240° C.  
     
     
         9 . A method of manufacturing a liquid crystal display as set forth in  claim 7 , wherein the interlayer insulating film formed by coating is an organic insulating film.  
     
     
         10 . A method of manufacturing a liquid crystal display as set forth in  claim 7 , wherein the liquid crystal display has a metal film coupled with the transparent conductive film, the transparent conductive film is made of ITO, and the metal film coupled with the transparent conductive film is made of chromium or an alloy containing chromium as the main constituent.  
     
     
         11 . A method of manufacturing a liquid crystal display which has bus wires disposed on a substrate in a grid shape, switching elements coupled to the bus wires, and pixel electrodes formed of a transparent conductive film disposed on an interlayer insulating film formed by coating, the pixel electrodes being coupled with the switching elements via contact through holes formed through a passivation film and the interlayer insulating film, said method comprising: 
 when forming the contact through holes formed through the passivation film and the interlayer insulating film, forming openings of the passivation film by plasma etching.    
     
     
         12 . A method of manufacturing a liquid crystal display as set forth in  claim 11 , wherein the interlayer insulating film formed by coating is an organic insulating film.  
     
     
         13 . A method of manufacturing a liquid crystal display as set forth in  claim 11 , wherein the liquid crystal display has a metal film coupled with the transparent conductive film, the transparent conductive film is made of ITO, and the metal film coupled with the transparent conductive film is made of chromium or an alloy containing chromium as the main constituent.  
     
     
         14 . A liquid crystal display comprising: 
 a transparent substrate;    a plurality of parallel scanning lines disposed on the transparent substrate;    a plurality of parallel signal lines which cross the plurality of parallel scanning lines;    switching elements coupled to the scanning lines and the signal lines; and    pixel electrodes formed from a transparent conductive film disposed on an interlayer insulating film formed by coating, the pixel electrodes being coupled with the switching elements via contact through holes formed through the interlayer insulating film;    wherein the transparent conductive film formed on the interlayer insulating film has portions contacting a lower layer metal film and the interlayer insulating film has crystallinity at the portions contacting the lower layer metal film.    
     
     
         15 . A liquid crystal display as set forth in  claim 14 , wherein the interlayer insulating film formed by coating is an organic insulating film.  
     
     
         16 . A liquid crystal display as set forth in  claim 14 , wherein the transparent conductive film is made of ITO, and the lower layer metal film contacting the transparent conductive film is made of chromium or an alloy containing chromium as the main constituent.  
     
     
         17 . A liquid crystal display comprising: 
 a transparent substrate;    a plurality of parallel scanning lines disposed on the transparent substrate;    a plurality of parallel signal lines which cross the plurality of parallel scanning lines;    switching elements coupled to the scanning lines and the signal lines;    pixel electrodes formed from a transparent conductive film disposed on an interlayer insulating film formed by coating, the pixel electrodes being coupled with the switching elements via contact through holes formed through the interlayer insulating film; and    signal line terminals each of which is coupled to one end of the respective signal lines and comprises a stacked portion of the transparent conductive film and a lower layer metal film and which are disposed on opposite sides of the substrate alternately or every plurality of terminals;    wherein contact resistance between the transparent conductive film and the lower layer metal film differs between the signal line terminals on opposite sides of the substrate by a value of 1500 Ω or smaller.    
     
     
         18 . A liquid crystal display as set forth in  claim 17 , wherein the interlayer insulating film formed by coating is an organic insulating film.  
     
     
         19 . A liquid crystal display as set forth in  claim 17 , wherein the transparent conductive film is made of ITO, and the lower layer metal film coupled with the transparent conductive film is made of chromium or an alloy containing chromium as the main constituent.