Deposition apparatus and deposition method

Abstract

A deposition apparatus is provided for manufacturing an organic compound layer having a plurality of function regions. The deposition apparatus includes a plurality of evaporation sources within a deposition chamber, for enabling continuous formation of respective function regions comprised of organic compounds and, further, formation of a mixed region at an interface between adjacent ones of the function regions. With the deposition apparatus having such fabrication chamber, it is possible to prevent impurity contamination between the functions regions and further possible to form an organic compound layer with an energy gap relaxed at the interface.

What is claimed is:  
     
         1 . A deposition apparatus comprising: 
 a plurality of deposition chambers; and    a plurality of evaporation sources in said deposition chambers;    wherein each of the plurality of evaporation sources comprises at least one organic compound having a different function, and    wherein the organic compounds having the different functions are continuously deposited by a vacuum evaporation from said plurality of evaporation sources.    
     
     
         2 . A deposition apparatus according to  claim 1 , wherein the deposition apparatus comprises: 
 a first deposition chamber forming a first organic compound layer,    a second deposition chamber forming a second organic compound layer, and    a third deposition chamber forming a third organic compound layer.    
     
     
         3 . A deposition apparatus according to  claim 2 , wherein: 
 said first organic compound layer emits a red light,    said second organic compound layer emits a green light, and    said third organic compound layer emits a blue light.    
     
     
         4 . A deposition apparatus according to  claim 1 , wherein each said evaporation source has an organic compound selected from the group consisting of a hole injectability, hole transportability, luminescent ability, blocking ability, electron transportability, or electron injectability.  
     
     
         5 . A deposition apparatus comprising: 
 a plurality of deposition chambers; and    a plurality of evaporation sources in said deposition chambers;    wherein each of the plurality of evaporating sources comprises at least one organic compound having a different function, and    wherein at least two of the organic compounds having the different functions are simultaneously deposited by a vacuum evaporation from said plurality of evaporation sources.    
     
     
         6 . A deposition apparatus according to  claim 5 , wherein the deposition apparatus comprises: 
 a first deposition chamber forming a first organic compound layer,    a second deposition chamber forming a second organic compound layer, and    a third deposition chamber forming a third organic compound layer.    
     
     
         7 . A deposition apparatus according to  claim 6 , wherein: 
 said first organic compound layer emits a red light,    said second organic compound layer emits a green light, and    said third organic compound layer emits a blue light.    
     
     
         8 . A deposition apparatus according to  claim 5 , wherein each said evaporation source has an organic compound selected from the group consisting of a hole injectability, hole transportability, luminescent ability, blocking ability, electron transportability, or electron injectability.  
     
     
         9 . A deposition apparatus comprising: 
 a load chamber;    an alignment chamber having a function of performing an alignment of a position between a metal mask and a substrate;    a deposition chamber; and    a plurality of evaporation sources in said deposition chamber;    wherein the load chamber, the alignment chamber, and the deposition chamber are connected in series;    wherein each of the plurality of evaporation sources comprises at least one organic compound having a different function; and    wherein the organic compounds having the different functions are continuously deposited by a vacuum evaporation from said plurality of evaporation sources.    
     
     
         10 . A deposition apparatus according to  claim 9 , wherein the deposition apparatus comprises: 
 a first deposition chamber forming a first organic compound layer,    a second deposition chamber forming a second organic compound layer, and    a third deposition chamber forming a third organic compound layer.    
     
     
         11 . A deposition apparatus according to  claim 10 , wherein: 
 said first organic compound layer emits a red light,    said second organic compound layer emits a green light, and    said third organic compound layer emits a blue light.    
     
     
         12 . A deposition apparatus according to  claim 9 , wherein each said evaporation source has an organic compound selected from the group consisting of a hole injectability, hole transportability, luminescent ability, blocking ability, electron transportability, or electron injectability.  
     
     
         13 . A deposition apparatus comprising: 
 a load chamber;    an alignment chamber having a function of performing an alignment of a position between a metal mask and a substrate;    a deposition chamber; and    a plurality of evaporation sources in said deposition chamber;    wherein the load chamber, the alignment chamber, and the deposition chamber are connected in series;    wherein each of the plurality of evaporating sources comprises at least one organic compound having a different function, and wherein at least two of the organic compounds having the different functions are simultaneously deposited by a vacuum evaporation from said plurality of evaporation sources.    
     
     
         14 . A deposition apparatus according to  claim 13 , wherein the deposition apparatus comprises: 
 a first deposition chamber forming a first organic compound layer,    a second deposition chamber forming a second organic compound layer, and    a third deposition chamber forming a third organic compound layer.    
     
     
         15 . A deposition apparatus according to  claim 14 , wherein: 
 said first organic compound layer emits a red light,    said second organic compound layer emits a green light, and    said third organic compound layer emits a blue light.    
     
     
         16 . A deposition apparatus according to  claim 13 , wherein each said evaporation source has an organic compound selected from the group consisting of a hole injectability, hole transportability, luminescent ability, blocking ability, electron transportability, or electron injectability.  
     
     
         17 . A deposition apparatus comprising: 
 a load chamber;    a transport chamber;    an alignment chamber having a function of performing an alignment of a position between a metal mask and a substrate;    a deposition chamber; and    a plurality of evaporation sources in said deposition chamber;    wherein said transfer chamber is connected with said load chamber, said alignment chamber, and said deposition chamber, respectively;    wherein each of the plurality of evaporation sources comprises at least one organic compound having a different function; and    wherein the organic compounds having the different functions are continuously deposited by a vacuum evaporation from said plurality of evaporation sources.    
     
     
         18 . A deposition apparatus according to  claim 17 , wherein the deposition apparatus comprises: 
 a first deposition chamber forming a first organic compound layer,    a second deposition chamber forming a second organic compound layer, and    a third deposition chamber forming a third organic compound layer.    
     
     
         19 . A deposition apparatus according to  claim 18 , wherein: 
 said first organic compound layer emits a red light,    said second organic compound layer emits a green light, and    said third organic compound layer emits a blue light.    
     
     
         20 . A deposition apparatus according to  claim 17 , wherein each said evaporation source has an organic compound selected from the group consisting of a hole injectability, hole transportability, luminescent ability, blocking ability, electron transportability, or electron injectability.  
     
     
         21 . A deposition apparatus comprising: 
 a load chamber;    a transport chamber;    an alignment chamber having a function of performing an alignment of a position between a metal mask and a substrate;    a deposition chamber; and    a plurality of evaporation sources in said deposition chamber;    wherein said transfer chamber is connected with said load chamber, said alignment chamber, and said deposition chamber, respectively;    wherein each of the plurality of evaporation sources comprises at least one organic compound having a different function, and    wherein at least two of the organic compounds having the different functions are continuously deposited by a vacuum evaporation from said plurality of evaporation sources.    
     
     
         22 . A deposition apparatus according to  claim 21 , wherein the deposition apparatus comprises: 
 a first deposition chamber forming a first organic compound layer,    a second deposition chamber forming a second organic compound layer, and    a third deposition chamber forming a third organic compound layer.    
     
     
         23 . A deposition apparatus according to  claim 22 , wherein: 
 said first organic compound layer emits a red light,    said second organic compound layer emits a green light, and    said third organic compound layer emits a blue light.    
     
     
         24 . A deposition apparatus according to  claim 21 , wherein each said evaporation source has an organic compound selected from the group consisting of a hole injectability, hole transportability, luminescent ability, blocking ability, electron transportability, or electron injectability.  
     
     
         25 . A method comprising: 
 forming a first function region comprising a first organic compound from a first evaporation source by performing vacuum evaporation in a deposition chamber;    forming a first mixed region comprising said first organic compound and a second organic compound in said deposition chamber by performing vacuum evaporation simultaneously from said first evaporation source and from a second evaporation source;    forming a second function region comprising said second organic compound in said deposition chamber by performing vacuum evaporation from said second evaporation source but not from said first evaporation source;    forming a second mixed region comprising said second organic compound and a third organic compound in said deposition chamber by performing vacuum evaporation simultaneously from said second evaporation source and from a third evaporation source but not from said first evaporation source; and    forming a third function region comprising said third organic compound in said deposition chamber by performing vacuum evaporation from said third evaporation source but not from said first evaporation source and not from said second evaporation source.    
     
     
         26 . A deposition method according to  claim 25 , wherein: 
 said first function region is formed on an anode, said first organic compound is an organic compound with hole transportability,    said second organic compound is an organic compound which emits light, and    said third organic compound is an organic compound with an electron transportability.    
     
     
         27 . A deposition method according to  claim 25 , wherein said organic compound with a hole transportability comprises aromatic diamine compound.  
     
     
         28 . A deposition method according to  claim 25 , wherein: 
 said organic compound with an electron transportability comprises a metal selected from the group consisting of complex containing quinoline skeleton, metal complex containing benzoquinoline skeleton, oxadiazole derivative, triazole derivative or phenanthroline derivative.    
     
     
         29 . A deposition method according to  claim 25 , wherein: 
 said organic compound which emits light is selected from the group consisting of a metal complex containing quinoline skeleton, metal complex containing benzooxazole skeleton, and metal complex containing benzothiazole skeleton.    
     
     
         30 . A method comprising: 
 forming a first function region comprising a first organic compound from a first evaporation source by performing vacuum evaporation in a deposition chamber;    forming a first mixed region comprising said first organic compound and a second organic compound in said deposition chamber by performing vacuum evaporation simultaneously from said first evaporation source and from a second evaporation source;    forming a second function region comprising said second organic compound in said deposition chamber by performing vacuum evaporation from said second evaporation source but not from said first evaporation source;    forming a second mixed region comprising said second organic compound and a third organic compound in said deposition chamber by performing vacuum evaporation simultaneously from said second evaporation source and a third evaporation source but not from said first evaporation source; and    after forming said second mixed region, forming a second function region comprising said second organic compound in said deposition chamber by performing vacuum evaporation from said second evaporation source but not from said first evaporation source and not from said third evaporation source.    
     
     
         31 . A deposition method according to  claim 30 , wherein: 
 said first function region is formed on an anode,    said first organic compound is an organic compound with hole transportability,    said second organic compound is an organic compound with an electron transportability, and    said third organic compound is an organic compound which emits light.    
     
     
         32 . A deposition method according to  claim 30 , wherein said organic compound with a hole transportability comprises aromatic diamine compound.  
     
     
         33 . A deposition method according to  claim 30 , wherein: 
 said organic compound with an electron transportability comprises a metal selected from the group consisting of complex containing quinoline skeleton, metal complex containing benzoquinoline skeleton, oxadiazole derivative, triazole derivative or phenanthroline derivative.    
     
     
         34 . A deposition method according to  claim 30 , wherein: 
 said organic compound which emits light is selected from the group consisting of a metal complex containing quinoline skeleton, metal complex containing benzooxazole skeleton, and metal complex containing benzothiazole skeleton.    
     
     
         35 . A method comprising: 
 forming a first function region comprising a first organic compound from a first evaporation source by performing vacuum evaporation in a first deposition chamber;    forming a first mixed region comprising said first organic compound and a second organic compound in said first deposition chamber by performing vacuum evaporation simultaneously from said first evaporation source and from a second evaporation source; and    forming a second function region comprising said second organic compound in said first deposition chamber by performing vacuum evaporation from said second evaporation source but not from said first evaporation source;    forming a third function region comprising a third organic compound by performing vacuum evaporation from a third evaporation source in a second deposition chamber;    forming a second mixed region comprising said third organic compound and a fourth organic compound in said second deposition chamber by performing vacuum evaporation simultaneously from said third evaporation source and from a fourth evaporation source; and    forming a fourth function region comprising said fourth organic compound in said second deposition chamber by performing vacuum evaporation from said fourth evaporation source but not from said third evaporation source;    forming a fifth function region comprising a fifth organic compound from a fifth evaporation source by performing vacuum evaporation in a third deposition chamber;    forming a third mixed region comprising said fifth organic compound and a sixth organic compound in said third deposition chamber by performing vacuum evaporation simultaneously from said fifth evaporation source and from said sixth evaporation source; and    forming a sixth function region comprising said sixth organic compound in said third deposition chamber by performing vacuum evaporation from said sixth evaporation source but not from said fifth evaporation source.    
     
     
         36 . A deposition method according to  claim 35 , wherein: 
 one of said first function region and said second function region, one of said third function region and said fourth function region, and one of said fifth function region and said sixth function region comprises organic compound materials which emits light, and    the other one of said first function region and said second function region, the other one of said third function region and said fourth function region, and the other one of said fifth function region and said sixth function region comprises organic compounds selected from the group consisting of a hole injectability, a hole transportability, a blocking ability, an electron transportability, and an electron injectability.    
     
     
         37 . A deposition method according to  claim 36 , wherein said organic compound materials which emits light have a light emission color different from the other of said organic compound materials, respectively.  
     
     
         38 . A deposition method according to  claim 35 . wherein said organic compound with a hole transportability comprises aromatic diamine compound.  
     
     
         39 . A deposition method according to  claim 35 , wherein: 
 said organic compound with an electron transportability comprises a metal selected from the group consisting of complex containing quinoline skeleton, metal complex containing benzoquinoline skeleton, oxadiazole derivative, triazole derivative or phenanthroline derivative.    
     
     
         40 . A deposition method according to  claim 35 , wherein: 
 said organic compound which emits light is selected from the group consisting of a metal complex containing quinoline skeleton, metal complex containing benzooxazole skeleton, and metal complex containing benzothiazole skeleton.    
     
     
         41 . A method of manufacturing an organic compound element comprising steps of: 
 during a first period, forming a first organic layer over a substrate by performing vacuum evaporation from a first evaporation source in a deposition chamber;    during a second period after said first period, forming a mixed region over the first organic layer by performing vacuum evaporation from the first evaporation source and from a second evaporation source in the deposition chamber;    during a third period after said second period, forming a second organic layer over the mixed region by performing vacuum evaporation from the second evaporation source but not from the first evaporation source in the deposition chamber.    
     
     
         42 . A method of manufacturing an organic compound element in a deposition apparatus, 
 a load chamber, an alignment chamber, and a deposition chamber connected in series in the deposition apparatus,    wherein a position between a metal mask and a substrate is controlled in the alignment chamber;    the method comprising steps of: 
 during a first period, forming a first organic layer over said substrate by performing vacuum evaporation from a first evaporation source in the deposition chamber;  
 during a second period after said first period, forming a mixed region over the first organic layer by performing vacuum evaporation from the first evaporation source and from a second evaporation source in the deposition chamber;  
 during a third period after said second period, forming a second organic layer over the mixed region by performing vacuum evaporation from the second evaporation source but not from the first evaporation source in the deposition chamber.  
   
     
     
         43 . A method of manufacturing an organic compound element in a deposition apparatus, 
 each of a load chamber, a transfer chamber, and an alignment chamber connected with a deposition chamber in the deposition apparatus, respectively;    wherein a position between a metal mask and a substrate is controlled in the alignment chamber;    the method comprising steps of: 
 during a first period, forming a first organic layer over the substrate by performing vacuum evaporation from a first evaporation source in the deposition chamber;  
 during a second period after said first period, forming a mixed region over the first organic layer by performing vacuum evaporation from the first evaporation source and from a second evaporation source in the deposition chamber; during a third period after said second period, forming a second organic layer over the mixed region by performing vacuum evaporation from the second evaporation source  
 but not from the first evaporation source in the deposition chamber.