Method for manufacturing a liquid crystal display device

Abstract

A method for manufacturing an LCD including at least two stacked thin layers in which the upper thin film smoothly and completely covers the lower thin film includes the steps of coating a photo-resist on a patterned layer, patterning the photo-resist by exposing and developing the photo-resist with a mask which has lines and spaces in which a distance between the lines is smaller than a resolution of an exposure system used and etching the metal layer using the patterned photo-resist as a mask. The resulting photo-resist pattern has a comb shape.

What is claimed is:  
     
         1 . (Amended) A method of manufacturing a semiconductor device comprising the steps of: 
 providing a substrate;    forming a first metal layer on the substrate;    forming a photo-resist on the first metal layer; and    exposing and developing the photo-resist using an exposure system and only a single mask having lines and spaces, and a width of each line being about {fraction (1/3)} the exposure system's resolution and a width of each space being about {fraction (0.5/3)} the exposure system's resolution, such that the photo-resist has a pattern including a thick portion and a thin portion, the pattern being a comb shape.    
     
     
         2 . (Amended) A method of manufacturing a semiconductor device comprising the steps of: 
 providing a substrate;    forming a layer on the substrate;    forming a photo-resist on the layer; and    performing a single masking step using an exposure system and a mask having lines and spaces, and a width of each line being about {fraction (1/3)} the exposure system's resolution and a width of each space being about {fraction (0.5/3)} the exposure system's resolution, the masking step being used to develop the photo-resist such that the photoresist has a thick portion and a thin portion, the photo-resist being a comb shape.    
     
     
         3 . (Amended) A method of manufacturing a liquid crystal display comprising the steps of: 
 providing a substrate;    forming a layer on the substrate;    forming a photo-resist on the layer; and    exposing and developing the photo-resist using an exposure system and only a single mask having lines and spaces, and a width of each line being about {fraction (1/3)} the exposure system's resolution and a width of each space being about {fraction (0.5/3)} the exposure system's resolution, such that the photo-resist has a pattern including a thick portion and a thin portion, the pattern being a comb shape.    
     
     
         4 . (Amended) A method of manufacturing a liquid crystal display comprising the steps of: 
 providing a substrate;    forming a layer on the substrate;    forming a photo-resist on the layer; and    performing a single masking step using an exposure system and a mask having lines and spaces, and a width of each line being about {fraction (1/3 )} the exposure system's resolution and a width of each space being about {fraction (0.5/3)} the exposure system's resolution, to develop the photo-resist such that the photo-resist has a thick portion and a thin portion, the photo-resist being a comb shape.