Apparatus with air-conditioning system, and device manufacturing method using the same

Abstract

An apparatus including a chamber having an inner space and an air conditioner for controlling an air supplied into the inner space, wherein the air conditioner includes (i) a refrigerator using a refrigerant, (ii) a first heat exchanger for exchanging a heat between the refrigerant and a coolant, and (iii) a second heat exchanger for exchanging a heat between an air supplied or to be supplied into the chamber and the coolant, wherein the refrigerant is circulated between the refrigerator and the first heat exchanger, and wherein the coolant is circulated between the first and second heat exchangers.

What is claimed is:  
     
         1 . An apparatus, comprising: 
 a chamber having an inner space; and    an air conditioner for controlling an air supplied or to be supplied into the inner space of said chamber, said air conditioner including (i) a refrigerator using a refrigerant, (ii) a first heat exchanger for exchanging a heat between the refrigerant and a coolant, and (iii) a second heat exchanger for exchanging a heat between an air supplied or to be supplied into said chamber and the coolant;    wherein the refrigerant is circulated between said refrigerator and said first heat exchanger, and wherein said coolant is circulated between said first and second heat exchangers.    
     
     
         2 . An apparatus according to  claim 1 , wherein said air conditioner further includes an air blower.  
     
     
         3 . An apparatus according to  claim 1 , wherein said air conditioner further includes a heater.  
     
     
         4 . An apparatus according to  claim 1 , wherein said first heat exchanger comprises an evaporator.  
     
     
         5 . An apparatus according to  claim 1 , wherein said refrigerator comprises a compressor and a condenser.  
     
     
         6 . An apparatus according to  claim 1 , further comprising a reservoir and a pump provided between said first and second heat exchangers.  
     
     
         7 . An apparatus according to  claim 1 , wherein at least a portion of said air conditioner is disposed in juxtaposition of said chamber.  
     
     
         8 . An apparatus according to  claim 7 , wherein said second heat exchanger is disposed adjacent said chamber, and wherein said refrigerator and sand first heat exchanger are disposed separately from said chamber.  
     
     
         9 . An apparatus according to  claim 1 , wherein the coolant contains one of a water, an anti-freeze, and a fluoride inert liquid.  
     
     
         10 . An apparatus according to  claim 1 , further comprising a semiconductor manufacturing equipment.  
     
     
         11 . An apparatus according to  claim 1 , further comprising one of an inspection equipment and a measuring equipment, disposed inside said chamber.  
     
     
         12 . A device manufacturing method, comprising the steps of: 
 providing a chamber for accommodating therein a manufacturing equipment;    executing an air-conditioning process to an inside of the chamber; and    executing a device manufacturing process by use of the manufacturing equipment disposed in the chamber;    wherein said air-conditioning process includes (i) providing a refrigerator to be used with a refrigerant, (ii) circulating the refrigerant between the refrigerator and a first heat exchanger, (iii) circulating a coolant between the first heat exchanger and a second heat exchanger, (iv) exchanging a heat between the refrigerant and the coolant, at the first heat exchanger, and (v) exchanging a heat between an air supplied or to be supplied into the chamber and the coolant, at the second heat exchanger.    
     
     
         13 . A method according to  claim 12 , wherein the air conditioning process further includes heating the air supplied into the chamber.  
     
     
         14 . A method according to  claim 12 , wherein at least a portion of an air conditioning system for executing the air-conditioning process is disposed in juxtaposition of the chamber.  
     
     
         15 . A method according to  claim 14 , wherein the first heat exchanger is disposed adjacent to the chamber, and wherein the refrigerator and the second heat exchanger are disposed separately from the chamber.  
     
     
         16 . A method according to  claim 12 , wherein the coolant contains one of a water, an anti-freeze, and a fluoride inert liquid.  
     
     
         17 . A method according to  claim 12 , wherein the manufacturing equipment comprises a semiconductor manufacturing equipment.