Actuatable loadport system

Abstract

A system adapted to exchange wafer carriers between an overhead transport mechanism and a platform is provided. The system employs a wafer carrier having at least one handle extending therefrom, an overhead transfer mechanism, a transporter coupled to the overhead transfer mechanism and adapted to move therealong and having a wafer carrier coupling mechanism adapted to couple to the at least one wafer carrier handle, a platform positioned below the overhead transfer mechanism such that wafer carriers traveling along the overhead transfer mechanism travel over the platform, and an actuator coupled to the platform and adapted so as to elevate the platform to an elevation wherein the loading platform may contact the bottom of a wafer carrier coupled to the overhead transfer mechanism.

The invention claimed is:  
     
         1 . A system adapted to exchange wafer carriers between an overhead transport mechanism and a platform comprising: 
 a wafer carrier having at least one handle extending therefrom;    an overhead transfer mechanism;    a transporter coupled to the overhead transfer mechanism and adapted to move therealong and having a wafer carrier coupling mechanism adapted to couple to the at least one wafer carrier handle so as to support the wafer carrier;    a platform positioned below the overhead transfer mechanism such that wafer carriers traveling along the overhead transfer mechanism travel over the platform; and    an actuator coupled to the platform and adapted so as to elevate the platform to an elevation wherein the platform contacts the bottom of a wafer carrier supported by the transporter and causes the wafer carrier and the transporter to decouple.    
     
     
         2 . The system of  claim 1  wherein the wafer carrier coupling mechanism of the transporter has no moving parts.  
     
     
         3 . The system of  claim 2  wherein the wafer carrier comprises a pair of handles, and the transporter further comprises a pair of wafer carrier coupling mechanisms, each having an end effector coupled thereto, the end effectors being adapted to couple to the wafer carrier's pair of handles.  
     
     
         4 . The system of  claim 3  wherein each wafer carrier handle comprises a groove along a lower surface thereof, and the end effectors each comprise an extended piece adapted to fit within the groove.  
     
     
         5 . The system of  claim 3  wherein each end effector comprises a groove along an upper surface thereof and the wafer carrier handle comprises an extended piece adapted to fit within the groove.  
     
     
         6 . The system of  claim 4  wherein the actuator is further adapted so as to contact and elevate a wafer carrier supported by the transporter until the wafer carrier handles are above the transporter end effectors.  
     
     
         7 . The system of  claim 5  wherein the actuator is further adapted so as to contact and elevate a wafer carrier supported by the transporter until the wafer carrier handles are above the transporter end effectors.  
     
     
         8 . The system of  claim 6  wherein the actuator is further adapted to lower to SEMI standard E15 height.  
     
     
         9 . The system of  claim 7  wherein the actuator is further adapted to lower to SEMI standard E15 height.  
     
     
         10 . The system of  claim 8  further comprising at least one storage shelf positioned below the platform, and a robot adapted to transfer wafer carriers between the platform and the at least one storage shelf.  
     
     
         11 . The system of  claim 9  further comprising at least one storage shelf positioned below the platform, and a robot adapted to transfer wafer carriers between the platform and the at least one storage shelf.  
     
     
         12 . The system of  claim 1  wherein the actuator is  5  further adapted to lower to SEMI standard E15 height.  
     
     
         13 . The system of  claim 1  further comprising at least one storage shelf positioned below the platform, and a robot adapted to transfer wafer carriers between the platform and the at least one storage shelf.  
     
     
         14 . The system of  claim 1  further comprising a mechanism for moving the platform to and from the position below the overhead transfer mechanism, and a second position that is not below the overhead transfer mechanism.  
     
     
         15 . The system of  claim 14  further comprising at least one storage shelf positioned below the second position, and a robot adapted to transfer wafer carriers between the platform's second position and the at least one storage shelf.  
     
     
         16 . A wafer carrier comprising at least a first handle comprising a groove along a lower surface thereof.  
     
     
         17 . The wafer carrier of  claim 16  further comprising a second handle comprising a groove along a lower surface thereof, the first and second handles extending from opposite sides of the wafer carrier.  
     
     
         18 . The wafer carrier of  claim 16  wherein the groove has a V-shape.  
     
     
         19 . The wafer carrier of  claim 17  wherein the groove has a V-shape.  
     
     
         20 . A method of transferring wafer carriers between an overhead transport mechanism and a platform comprising: 
 elevating the platform so as to contact a wafer carrier supported by the overhead transport mechanism, and so as to release the wafer carrier from the overhead transport mechanism; and    lowering the platform to an overhead loadport height.    
     
     
         21 . A method of transferring wafer carriers between an overhead transport mechanism and a platform comprising: 
 elevating the platform so as to contact a wafer carrier supported by the overhead transport mechanism, and so as to release the wafer carrier from the overhead transport mechanism; and    lowering the platform to an E15 loadport height.    
     
     
         22 . The method of  claim 21  wherein elevating the platform so as to release the wafer carrier from the overhead transport mechanism comprises lifting the wafer carrier such that handles thereof are above an end effector of a transporter that couples the wafer carrier to the overhead transport mechanism.  
     
     
         23 . The method of  claim 22  wherein elevating the platform so as to release the wafer carrier from the overhead transport mechanism comprises lifting the wafer carrier such that handles thereof are above an end effector of a transporter that couples the wafer carrier to the overhead transport mechanism.