Optical component thickness adjustment method, optical component, and position adjustment method for optical component

Abstract

If after manufacture it is found that the thickness of a solid immersion lens is less than a target thickness value, an adjustment portion is adhered thereto by vapor deposition so as to reduce the amount of thickness deficiency. If the solid immersion lens is made of quartz glass, SiO 2 is used as the material which is vapor deposited. If the thickness of the solid immersion lens is greater than the target value, then it is reduced by etching.

What is claimed is:  
     
         1 . A method of adjusting the optical thickness of an optical component made from a material transparent to light to be used, comprising; 
 adding one of layers of a material which is the same as the material of said optical component, and of a material which has an index of refraction close to the index of refraction of said material of said optical component, to a surface of said optical component by at least one of vapor deposition and vapor growth, so that optical thickness is increased.    
     
     
         2 . A method of adjusting the optical thickness of an optical component made from a material transparent to light to be used, comprising; 
 etching a surface of said optical component to reduce said optical thickness.    
     
     
         3 . A method of adjusting the position of an optical component, comprising; 
 adhering a layer of material to said optical component by at least one of vapor deposition, plating, and vapor growth to adjust the position of at least one surface of said optical component.    
     
     
         4 . A method of adjusting the position of an optical component, comprising; 
 etching a surface of said optical component to adjust the position of at least one surface thereof.    
     
     
         5 . An optical component whose optical thickness has been adjusted by the thickness adjustment method of  claim 1 .  
     
     
         6 . An optical component whose optical thickness has been adjusted by the thickness adjustment method of  claim 2 .  
     
     
         7 . An optical component whose optical thickness has been adjusted by the thickness adjustment method of  claim 3 .  
     
     
         8 . An optical component whose optical thickness has been adjusted by the thickness adjustment method of claim  4 .