US2002081395A1PendingUtilityA1

Corrosion resistant coating

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Assignee: APPLIED MATERIALS INCPriority: Oct 31, 1998Filed: Feb 21, 2002Published: Jun 27, 2002
Est. expiryOct 31, 2018(expired)· nominal 20-yr term from priority
Inventors:Won Bae BangChen-An ChenShankar VenkataramanAjay Bhatnagar
C23C 14/0694H01J 37/32559H01J 37/32477C23C 14/5806C23C 16/4404
45
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Claims

Abstract

A corrosion resistant part comprising a protective coating formed upon a component part. The protective coating comprises magnesium fluoride, which is substantially pure and substantially dense. Preferably, the coating is at least about 99% pure and at least about 85% dense. For example, such a coating can be formed upon the component part at a temperature of at least about 250° C. and a pressure of not more than about 1×10 −5 torr. The resulting coating is effective in protecting the surfaces of an aluminum nitride heater against corrosion within a fluorine-containing environment inside a chemical vapor deposition chamber.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         13 . A method of forming a coated part, comprising the step of: 
 coating a component part with magnesium fluoride; wherein said magnesium fluoride coating has a density of at least about 85% and a purity of at least about 99%, and said coating reduces corrosion of said component part upon exposure to a corrosive environment.    
     
     
         14 . The method of claim  13 , wherein said magnesium fluoride coating has a density of between about 85-90%.  
     
     
         15 . The method of claim  13 , wherein said magnesium fluoride coating has a density of about 100%.  
     
     
         16 . The method of claim  13 , wherein said corrosive environment comprises fluorine.  
     
     
         17 . The method of claim  13 , wherein said coating step is performed at a pressure of not more than about 1×10 −5  torr.  
     
     
         18 . The method of claim  13 , wherein said coating step is performed at a temperature of at least about 250° C.  
     
     
         19 . The method of claim  13 , wherein said component part comprises aluminum nitride or aluminum.  
     
     
         20 . The method of claim  13 , wherein said component part has a surface finish of less than about 10 RA.  
     
     
         21 . The method of claim  14 , further comprising the step of annealing said coating at a temperature of at least about 600° C.

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