US2002056548A1PendingUtilityA1

Heat exchanger

38
Assignee: FUJIKOSHI MACHINERY CORPPriority: Dec 21, 2000Filed: Dec 5, 2001Published: May 16, 2002
Est. expiryDec 21, 2020(expired)· nominal 20-yr term from priority
Inventors:Yoshio NakamuraYoshio Otsuka
B24B 57/02F28D 7/106F28F 21/04Y10S165/905Y10T29/5176Y10T29/49361Y10T29/4935
38
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Claims

Abstract

The heat exchanger of the present invention is capable of easily adjusting temperature of a machining liquid, e.g., slurry, etching liquid. The heat exchanger of the present invention, which adjusts temperature of the machining liquid, comprises a ceramic heat exchanging tube, which is made by baking silicon carbide (SiC).

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A heat exchanger for adjusting temperature of a machining liquid, comprising: 
 a ceramic heat exchanging tube, which is made by baking silicon carbide (SiC).    
     
     
         2 . The heat exchanger according to  claim 1 , 
 further comprising inlets and outlets of the machining liquid and a lilquid for adjusting temperature,    wherein said inlets and outlets make the both liquids flow as countercurrents.    
     
     
         3 . The heat exchanger according to  claim 1 , 
 wherein said ceramic heat exchanging tube includes no boron (B).    
     
     
         4 . The heat exchanger according to  claim 3 , 
 further comprising inlets and outlets of the machining liquid and a liquid for adjusting temperature,    wherein said inlets and outlets make the both liquids flow as countercurrents.

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