Plasma generating apparatus

Abstract

The present plasma generating apparatus includes a vacuum container an anode and a cathode formed by a plurality of electrodes, a power supply for applying a high voltage to anode and cathode, and switching elements for switching the electrodes in anode and cathode to which the high voltage is applied. The combinations of the electrodes are switched by switching elements so as to form a sheet plasma at any desired angle relative to the directional electromagnetic waves.

What is claimed is:  
     
         1 . A plasma generating apparatus, comprising: 
 a chamber;    an anode provided within said chamber and including a plurality of first electrodes;    a cathode provided within said chamber and including a plurality of second electrodes;    a power supply for applying a voltage to the first and second electrodes to form a sheet plasma that reflects directional electromagnetic waves; and    first and second switching means for switching groups of said first and second electrodes to which the voltage from said power supply is applied so as to change an angle or a shape of said sheet plasma.    
     
     
         2 . The plasma generating apparatus according to  claim 1 , wherein said first and second electrodes are respectively arranged in a matrix.  
     
     
         3 . A plasma generating apparatus, comprising: 
 a chamber;    an anode and a cathode provided within said chamber;    a power supply for applying a voltage to said anode and said cathode to form a sheet plasma between said anode and said cathode that reflects directional electromagnetic waves; and    driving means for driving at least one of said anode and said cathode so as to change an angle of said sheet plasma.    
     
     
         4 . The plasma generating apparatus according to  claim 3 , wherein said driving means includes a rotation mechanism for rotating at least one of said anode and said cathode.  
     
     
         5 . The plasma generating apparatus according to  claim 3 , wherein said driving means includes a tilting mechanism for tilting at least one of said anode and said cathode.  
     
     
         6 . A plasma generating apparatus, comprising: 
 a chamber;    an anode and a cathode provided within said chamber;    a power supply for applying a voltage to said anode and said cathode to form a sheet plasma between said anode and said cathode that reflects directional electromagnetic waves;    a first magnet provided on said anode;    a second magnet provided on said cathode; and    magnet driving means for driving at least one of said first magnet and said second magnet so as to change an angle of said sheet plasma.    
     
     
         7 . The plasma generating apparatus according to  claim 6 , wherein said magnet driving means includes a rotation mechanism for rotating at least one of said first magnet and said second magnet.  
     
     
         8 . The plasma generating apparatus according to  claim 1 , characterized in that said voltage is a pulse voltage, a high-frequency voltage, or a direct current voltage.  
     
     
         9 . The plasma generating apparatus according to  claim 1 , wherein at least one of said cathode and said anode has a flat-plate shape.  
     
     
         10 . The plasma generating apparatus according to  claim 1 , wherein at least one of opposing surfaces of said cathode and said anode is a curved surface.