Processing apparatus

Abstract

A processing apparatus of the invention includes: a processing vessel in which a vacuum can be created; a stage disposed in the processing vessel for supporting an object to be processed thereon; a clamping member supported above the stage and capable of pressing down a peripheral part of the object to be processed mounted on the stage to fixedly hold the object to be processed on the stage; an elastic member for giving a force to cause the clamping member to press down the peripheral part of the object to be processed mounted on the stage; and an elastic-member cover substantially entirely covering the elastic member.

What is claimed is:  
     
         1 . A processing apparatus comprising: 
 a processing vessel in which a vacuum can be created;    a stage disposed in the processing vessel for supporting an object to be processed thereon;    a clamping member supported above the stage and capable of pressing down a peripheral part of the object to be processed mounted on the stage to fixedly hold the object to be processed on the stage;    an elastic member for giving a force to cause the clamping member to press down the peripheral part of the object to be processed mounted on the stage; and    an elastic-member cover substantially entirely covering the elastic member.    
     
     
         2 . A processing apparatus according to  claim 1 , wherein 
 the elastic-member cover is highly corrosion-resistant.    
     
     
         3 . A processing apparatus according to  claim 1 , wherein 
 the elastic-member cover is made of a material having a low thermal conductivity.    
     
     
         4 . A processing apparatus according to  claim 1 , wherein 
 the clamping member has a rod extending downward from a lower surface thereof,    the elastic member is a coil spring surrounding the rod,    the rod is provided with a spring stopper at a lower end thereof to support a lower end of the coil spring thereon, and    an upper end of the coil spring rests on a clamping-member supporting member through which the rod extend and which can support a lower surface of the clamping member.    
     
     
         5 . A processing apparatus according to  claim 4 , wherein 
 the elastic-member cover is formed integrally with the clamping-member supporting member.    
     
     
         6 . A processing apparatus according to  claim 5 , wherein 
 the elastic-member cover also covers the lower end of the rod and the spring stopper.    
     
     
         7 . A processing apparatus according to  claim 4 , wherein 
 the clamping-member supporting member is formed integrally with lifting pins capable of moving through the stage and of vertically moving the object to be processed on the stage.    
     
     
         8 . A processing apparatus according to  claim 1  further comprising: 
 a process-gas supply means for supplying a process gas into the processing vessel; and  
 a heating means for heating the object to be processed mounted on the stage.