Semiconductor device testing apparatus and semiconductor device testing system having a plurality of semiconductor device testing apparatus

Abstract

A semiconductor device testing system is provided which can efficiently utilize a plurality of semiconductor device testing apparatus. There are provided a host computer 2 for controlling a plurality of semiconductor device testing apparatus 1 A, 1 B, and 1 C, and a dedicated classifying machine 3. Storage information memory means 4 for storing storage information of each semiconductor device such as a number assigned to each tested semiconductor device, the test results of each semiconductor device, and the like is provided in the host computer 2. Without sorting the tested devices or with the sorting operation of the tested devices into only two categories in the handler part 11 of each testing apparatus, the tested devices are transferred from the test tray to a general-purpose tray, and during this transfer operation, the storage information of each device is stored in the storage information memory means. When all the tests are completed, the storage information of each device stored in the storage information memory means is transmitted to the dedicated classifying machine by which the tested devices are sorted out.

What is claimed is:  
     
         1 . A semiconductor device testing system comprising a semiconductor device testing apparatus having a tester part and a handler part, storage information memory means, and a dedicated classifying machine, and wherein a plurality of semiconductor devices to be tested are transferred from a general-purpose tray to a test tray to be reloaded thereon in a loader section of said handler part, said test tray is transported into a test section of the handler part where said semiconductor devices loaded on said test tray are brought into electrical contact with a tester head of said tester part disposed in said test section to test operation of the semiconductor devices, after the completion of the test, said test tray with the tested semiconductor devices loaded thereon is transported from the test section to an unloader section of the handler part where the tested semiconductor devices on said test tray are transferred from said test tray onto a general-purpose tray, and the general-purpose tray with the tested semiconductor devices loaded thereon is taken out of said handler part, 
 said semiconductor device testing system being characterized in: 
 that in transferring the tested semiconductor devices on the associated test tray from the test tray onto a general-purpose tray in said unloader section, storage information of respective tested semiconductor devices such as a number assigned to each semiconductor device, the test results of each semiconductor device, the number of a socket used in testing the associated semiconductor device in said test section, and the like is stored in said storage information memory means every time each tested semiconductor device is stored in a semiconductor device storage portion of one general-purpose tray;  
 that said storage information stored in said storage information memory means is transmitted to said dedicated classifying machine; and  
 that the tested semiconductor devices are sorted out using said dedicated classifying machine on the basis of said test results.  
   
     
     
         2 . A semiconductor device testing system comprising a semiconductor device testing apparatus having a tester part and a handler part, storage information memory means, and a dedicated classifying machine, and wherein semiconductor devices to be tested are transported into a test section of said handler part where said semiconductor devices are brought into electrical contact with a tester head of said tester part disposed in said test section to test operation of the semiconductor device, and after the completion of the test, the tested semiconductor devices are transported from the test section to an unloader section of said handler part where the tested semiconductor devices are sorted out on the basis of the test results of the semiconductor devices and stored in semiconductor device storage section, 
 said semiconductor device testing system being characterized in: 
 that in said unloader section, only a sorting operation of the tested semiconductor devices into two categories of conformable or pass articles and unconformable or failure articles is performed;  
 that storage information of respective tested semiconductor devices stored in said semiconductor device storage section such as the test results of each semiconductor device, a number assigned to each semiconductor device, the number of a socket used in testing the associated semiconductor device in said test section, and the like is stored in said storage information memory means;  
 that said storage information stored in said storage information memory means is transmitted to said dedicated classifying machine; and  
 that the tested semiconductor devices are further subclassified using said dedicated classifying machine on the basis of said test results.  
   
     
     
         3 . A semiconductor device testing system comprising a plurality of semiconductor device testing apparatus each having a tester part and a handler part, each semiconductor device testing apparatus being arranged such that semiconductor devices to be tested are transported into a test section of said handler part where said semiconductor devices are brought into electrical contact with a tester head of said tester part disposed in said test section to test operation of the semiconductor device, and after the completion of the test, the tested semiconductor devices are transported from the test section to an unloader section of said handler part where the tested semiconductor devices are sorted out on the basis of the test results of the semiconductor devices and stored in semiconductor device storage section, and wherein said plurality of semiconductor device testing apparatus have different test conditions from one another, and semiconductor devices to be tested are transported to said plurality of semiconductor device testing apparatus in order and sequentially undergo tests under the different test conditions in said plurality of semiconductor apparatus, 
 said semiconductor device testing system being characterized in: 
 that in said unloader section, only a sorting operation of the tested semiconductor devices into two categories of conformable or pass articles and unconformable or failure articles is performed; and  
 that only the tested semiconductor devices which have been determined to be pass articles are transported to the subsequent semiconductor device testing apparatus for testing.  
   
     
     
         4 . The semiconductor device testing system according to  claim 3 , wherein each of said plurality of semiconductor device testing apparatus further includes storage information memory means and a dedicated classifying machine, and storage information of respective tested semiconductor devices stored in said semiconductor device storage section such as the test results of each semiconductor device, a number assigned to each semiconductor device, the number of a socket used in testing the associated semiconductor device in said test section, and the like is stored in said storage information memory means, and upon completion of all the tests said storage information stored in said storage information memory means is transmitted to said dedicated classifying machine, and the tested semiconductor devices are further subclassified using said dedicated classifying machine on the basis of said test results.  
     
     
         5 . A semiconductor device testing apparatus having a tester part and a handler part, and wherein semiconductor devices to be tested are transferred from a general-purpose tray to a test tray to be reloaded thereon in a loader section of said handler part, said test tray is transported into a test section of said handler part to test the semiconductor devices, after the completion of the test, said test tray with the tested semiconductor devices loaded thereon is transported from said test section to an unloader section of said handler part where the tested semiconductor devices on said test tray are transferred from said test tray onto a general-purpose tray, and the test tray which has been emptied of the tested semiconductor devices is transported from said unloader section to said loader section, and the above operation is repeated, 
 said semiconductor device testing apparatus being characterized in: 
 that on the way of the carrying path of the test tray between said unloader section and said loader section is provided a semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not; and  
 that the presence of any semiconductor device having been left on the test tray transported from said unloader section to said loader section can be detected by said semiconductor device detecting sensor.  
   
     
     
         6 . A semiconductor device testing apparatus having a tester part and a handler part, and wherein semiconductor devices to be tested are transferred from a general-purpose tray to a test tray to be reloaded thereon in a loader section of said handler part, said test tray is transported into a test section of said handler part to test the semiconductor devices, after the completion of the test, said test tray with the tested semiconductor devices loaded thereon is transported from said test section to an unloader section of said handler part where the tested semiconductor devices on said test tray are transferred from said test tray onto a general-purpose tray, and the test tray which has been emptied of the tested semiconductor devices is transported from said unloader section to said loader section, and the above operation is repeated, 
 said semiconductor device testing apparatus being characterized in: 
 that on the way of the carrying path of the test tray between said test section and said unloader section is provided a semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not; and  
 that the presence of any empty semiconductor device receiving portion having no semiconductor device therein in the test tray transported from said test section to said unloader section can be detected by said semiconductor device detecting sensor.  
   
     
     
         7 . A semiconductor device testing apparatus having a tester part and a handler part, and wherein semiconductor devices to be tested are transferred from a general-purpose tray to a test tray to be reloaded thereon in a loader section of said handler part, said test tray is transported into a test section of said handler part to test the semiconductor devices, after the completion of the test, said test tray with the tested semiconductor devices loaded thereon is transported from said test section to an unloader section of said handler part where the tested semiconductor devices on said test tray are transferred from said test tray onto a general-purpose tray, and the test tray which has been emptied of the tested semiconductor devices is transported from said unloader section to said loader section, and the above operation is repeated, 
 said semiconductor device testing apparatus being characterized in: 
 that on the way of the carrying path of the test tray between said loader section and said test section is provided a semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not; and  
 that the presence of any emptied semiconductor device receiving portion having no semiconductor device therein in the test tray transported from said loader section to said test section can be detected by said semiconductor device detecting sensor.  
   
     
     
         8 . The semiconductor device testing apparatus according to  claim 5 , wherein on the way of the carrying path of the test tray between said test section and said unloader section is provided a further semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not.  
     
     
         9 . The semiconductor device testing apparatus according to  claim 5 , wherein on the way of the carrying path of the test tray between said loader section and said test section is provided a further semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not.  
     
     
         10 . The semiconductor device testing apparatus according to  claim 5 , wherein on the way of the carrying path of the test tray between said test section and said unloader section is provided a further semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not, and on the way of the carrying path of the test tray between said loader section and said test section is provided a still further semiconductor device detecting sensor for monitoring whether a semiconductor device exists on the test tray or not.  
     
     
         11 . The semiconductor device testing apparatus according to any one of  claims 5  to  10 , wherein the number of said semiconductor device detecting sensor is equal to that of the semiconductor device receiving portions on the test tray which are aligned in a direction perpendicular to the moving direction of the test tray, and each sensor is an optical sensor for detecting transmitted light.  
     
     
         12 . The semiconductor device testing apparatus according to any one of  claims 5  to  10 , wherein the number of said semiconductor device detecting sensor is equal to that of the semiconductor device receiving portions on the test tray which are aligned in a direction perpendicular to the moving direction of the test tray, and further including a reflected light detecting type optical sensor for detecting reflected light, and wherein said reflected light detecting type optical sensor detects a reflective mark or non-reflective mark provided on the frame of the test tray and the presence of a semiconductor device on the test tray is determined by a signal detected by and outputted from said semiconductor device detecting sensor in synchronism with the reflective mark or non-reflective mark detected by said reflected light detecting type optical sensor.  
     
     
         13 . The semiconductor device testing apparatus according to  claim 12 , wherein said reflective or non-reflective mark is provided on one side of the frame of the test tray, said one side of the frame being parallel to the moving direction of the test tray and said reflective or non-reflective mark being provided on the positions of said one side corresponding to the central portions of the respective semiconductor device receiving portions in the test tray which are aligned in the moving direction of the test tray.