Receiving chuck for optical components for the purpose of precision-grinding and/or polishing

Abstract

A chuck for optical components for fine grinding and/or polishing, has a plurality of supporting elements ( 9 ) of elastic material for the components and an arrangement for feeding or discharging air relative to the rear side of each supporting element. The chuck has a basic body ( 1 ) with a spindle shank ( 2 ) having a central bore ( 3 ) and a cover part ( 6 ) for accommodating the supporting elements. The basic body ( 1 ) is designed in a pot shape ( 5 ) with an encircling rim ( 4 ), and the cover part ( 6 ), provided with a flat base area, is put onto the rim ( 4 ) in an airtight manner. The cover top side ( 15 ) has cylindrical recesses ( 8 ) which lie symmetrically to the axis ( 17 ) of the spindle shank ( 2 ) and are designed for the insertion of the elastic supporting elements ( 9 ). Each of the recesses ( 8 ) is fluidly connected to the common pot space ( 5 ) of the basic body ( 1 ) via at least one bore ( 13 ). The elastic supporting element is designed as a hat-shaped diaphragm part ( 9 ), with an outwardly pointing hat brim ( 10 ) which rests on the base of the recess ( 8 ) and is held in a groove ( 11 ) of the recess ( 8 ) in an airtight manner via an O-ring ( 12 ). The elastic supporting element can also be inserted into a cylindrical holder ( 19 ) which is supported in the recess via a rotary bearing ( 21 ).

What is claimed is:  
     
         1 . A chuck for optical components for fine grinding and/or polishing, comprising: 
 a plurality of supporting elements of elastic material for the components and an arrangement for feeding or discharging gas relative to a rear side of a supporting element, the chuck comprising a basic body with a spindle shank having a central bore and a cover part for accommodating the supporting elements, wherein    a) the basic body has a pot shaped space and an encircling rim,    b) the cover part includes a flat base area which is jointed to the rim in a gas-tight manner, and    c) a cover part top side has cylindrical recesses which lie symmetrically to an axis of the spindle shank and elastic supporting elements inserted in the cylindrical recesses, each of the recesses being fluidly connected to the common pot shaped space of the basic body via at least one bore.    
     
     
         2 . A chuck for optical components for fine grinding and/or polishing, comprising: 
 a plurality of supporting elements of elastic material for the components and an arrangement for feeding or discharging gas relative to a rear side of a supporting element, the chuck comprising a basic body with a spindle shank having a central bore and a cover part for accommodating the supporting elements, wherein    a) the basic body has a pot shaped space and an encircling rim,    b) the cover part includes a flat base area which is jointed to the rim in a gas-tight manner, and    c) a cover part top side has cylindrical recesses which lie symmetrically to an axis of the spindle shank and elastic supporting elements inserted in the cylindrical recesses, each of the recesses being fluidly connected to the common pot shaped space of the basic body via at least one bore, and wherein an elastic supporting element is inserted into a cylindrical holder which is supported in at least one of said recesses via a rotary bearing.    
     
     
         3 . A chuck as claimed in  claim 2 , wherein an elastic supporting element has a hat-shaped diaphragm part, and an outwardly pointing brim which rests on a base of the cylindrical holder and is held in a groove of the cylindrical holder in a gas-tight manner via an O-ring.  
     
     
         4 . A chuck as claimed in  claim 2 , wherein the cylindrical holder has a drive spindle leading into the pot shaped space.  
     
     
         5 . A chuck as claimed in  claim 4 , wherein the drive spindle is coupled to a drive of the spindle shank via a gear assembly.  
     
     
         6 . A chuck as set forth in  claim 1 , wherein an elastic supporting element has a hat-shaped diaphragm part, and an outwardly pointing brim which rests on a base of a cylindrical recess and is held in a groove of the recess in a gas-tight manner via an O-ring.  
     
     
         7 . A chuck as claimed in  claim 1 , wherein an elastic supporting element has a hat-shaped diaphragm part, and an outwardly pointing brim which rests on a base of a cylindrical recess and is held in a groove of the cylindrical recess in a gas-tight manner via an O-ring.  
     
     
         8 . A chuck as claimed in  claim 3 , wherein the cylindrical holder has a drive spindle leading into the pot shaped space.