Co-flow diffusion flame burner device used for fabricating an optical waveguide

Abstract

The present invention provides a co-flow diffusion flame bunier for use in fabricating an optical waveguide, which includes a source material gas injection tube, through which a fuel gas, a source material to be mixed with the fuel gas, and a dilution gas to control the temperature of the flame generated by the combustion of the fuel gas are injected; a shield gas injection tube, disposed coaxially with the source material gas injection tube at the exterior of the source material gas injection tube and through which a shield gas is injected to prevent the particles produced by the combustion reaction of the fuel gas and an oxidation gas from sticking to the end of the source material gas injection tube; and, an oxidation gas injection tube, disposed coaxially with the shield gas injection tube at the exterior of the shield gas injection tube and through which an oxidation gas is injected to react with the fuel gas.

What is claimed is:  
     
         1 . A co-flow diffusion flame burner device for use in fabricating an optical waveguide comprising: 
 a source material gas injection tube, through which a fuel gas, a source material to be mixed with the fuel gas, and a dilution gas to control the temperature of a flame generated by the combustion of the fuel gas are injected;    a shield gas injection tube, disposed coaxially with the source material gas injection tube at the exterior of the source material gas injection tube and through which a shield gas is injected to prevent the particles produced by the combustion reaction of the fuel gas and an oxidation gas from sticking to the end of the source material gas injection tube; and,    an oxidation gas injection tube, disposed coaxially with the shield gas injection tube at the exterior of the shield gas injection tube and through which an oxidation gas is injected to react with the fuel gas.    
     
     
         2 . The device according to  claim 1 , wherein the dilution gas comprises an inert gas.  
     
     
         3 . The device according to  claim 1 , wherein the shield gas comprises an inert gas.  
     
     
         4 . The device according to  claim 1 , wherein the source material is selected from the group consisting of SiCl 4 , GeCl 4 , POCl 3 , and BCl 3 .  
     
     
         5 . The device according to  claim 1 , wherein the dilution gas is selected from the group consisting of He, Ar, and N 2 .  
     
     
         6 . A co-flow diffusion flame burner device for use in fabricating an optical waveguide comprising: 
 a first source material gas injection tube through which a fuel gas, a source material to be mixed with the fuel gas, and a dilution gas to control the temperature of a flame generated by the combustion of the fuel gas are injected;    a first shield gas injection tube, disposed coaxially with the first source material gas injection tube at the exterior of the first source material gas injection tube and through which a shield gas is injected to prevent the particles produced by the combustion of the fuel gas from sticking to the end of the first source material gas injection tube;    a first oxidation gas injection tube, disposed coaxially with the first shield gas injection tube at the exterior of the first shield gas injection tube and through which an oxidation gas is injected to react with the fuel gas;    a second shield gas injection tube, disposed coaxially with the first oxidation gas injection tube at the exterior of the first oxidation gas injection tube and through which a shield gas is injected to prevent the particles produced by the combustion reaction of the oxidation gas and the fuel gas from sticking to the end of the second shield gas injection tube;    a second source material gas injection tube, disposed coaxially with the second shield gas injection tube at the exterior of the second shield gas injection tube and through which a fuel gas, a source material to be mixed with the fuel gas and a dilution gas to control the temperature of a flame generated by the combustion of the fuel gas are injected;    a third shield gas injection tube, disposed coaxially with the second source material gas injection tube at the exterior of the second source material gas injection tube and through which a shield gas is injected to prevent particles produced by the combustion reaction of the fuel gas and the oxidation gas from sticking to the end of the second source material gas injection tube; and,    a second oxidation gas injection tube, disposed coaxially with the third shield gas injection tube at the exterior of the third shield gas injection tube and through which an oxidation gas is injected to react with the fuel gas.    
     
     
         7 . The device according to  claim 6 , wherein the dilution gas comprises an inert gas.  
     
     
         8 . The device according to  claim 6 , wherein the shield gas comprises an inert gas.  
     
     
         9 . The device according to  claim 6 , wherein the source material is selected from the group consisting Of SiCl 4 , GeCl 4 , POCl 3 , and BCl 3 .  
     
     
         10 . The device according to  claim 6 , wherein the dilution gas is selected from the group consisting of He, Ar, and N 2 .  
     
     
         11 . A process for fabricating an optical waveguide using a co-flow diffusion flame burner, the method comprising the steps of: 
 introducing a fuel gas with a source material or a dilution gas into one end of the diffusion flame burner;    introducing an oxidation gas into the one end of the diffusion flame burner;    generating a flame at the one end of the diffusion flame burner where the fuel gas and the oxidation gas impinge; and,    simultaneously introducing an inert gas to the one end of the diffusion flame burner to prevent the particles produced by the combustion of the fuel gas from sticking to the one end of the diffusion flame burner.    
     
     
         12 . The process according to  claim 11 , further comprising the step of bubbling the source material with the fuel gas or the dilution gas.  
     
     
         13 . The process according to  claim 11 , wherein the source material is selected from the group consisting of SiCl 4 , GeCl 4 , POCl 3 , and BCl 3 .  
     
     
         14 . The process according to  claim 11 , wherein the dilution gas is selected from the group consisting of He, Ar, and N 2 .