Etching device

Abstract

An etching device for supplying an etchant to the surface of a workpiece held on a rotating spinner table, which comprises a center portion supply nozzle for supplying the etchant to the rotation center portion of the workpiece held on the spinner table and a peripheral portion supply nozzle for supplying the etchant to an area between the rotation center portion and the periphery of the workpiece.

What is claimed is:  
     
         1 . An etching device comprising a spinner table for holding a workpiece and turning it and an etchant supply means for supplying an etchant to the surface of the workpiece held on the spinner table, wherein 
 the etchant supply means has a center portion supply nozzle for supplying the etchant to the rotation center portion of the workpiece held on the spinner table and a peripheral portion supply nozzle for supplying the etchant to an area between the rotation center portion and the periphery of the workpiece.    
     
     
         2 . The etching device of  claim 1 , wherein the peripheral portion supply nozzle has a plurality of nozzles provided at positions different in distance from the center portion supply nozzle.  
     
     
         3 . The etching device of  claim 1 , wherein the amount of the etchant supplied from the peripheral portion supply nozzle is set larger than the amount of the etchant supplied from the center portion supply nozzle.