Processing apparatus

Abstract

Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133. Each of the load lock chambers is capable of accommodating a single wafer W. The first transfer chamber 122 is provided with a first transfer unit 124 having two substrate holders 124 a , 124 b each capable of holding a single object to be processed, in order to transport the wafer W among a load port site 120, the first load lock chamber 130, the second load lock chamber 132 and a positioning unit 150. The second transfer chamber 133 is provided with a second transfer unit 156 having two substrate holders 156 a , 156 b each capable of holding the single object to be processed, in order to transport the wafer between the first load lock chamber 130, the second load lock chamber 132 and respective vacuum processing chambers 158 to 164. Since the volume of each load lock chamber can be minimized, it is possible to perform the prompt control of atmospheres in the load lock chambers. Additionally, it is possible to perform the delivery of the wafers promptly.

1 . A processing apparatus comprising: 
 a first enclosure defining a first transfer space having an atmosphere of atmospheric pressure;    a load port site, in which a plurality of load ports are aligned adjacently to the first transfer space, each of the load ports being capable of mounting a cassette for accommodating objects to be processed, the cassette having a door;    a plurality of door openers provided at the load ports respectively to open and close the door of the cassette, the door openers each allowing the first transfer space to communicate with an interior of the cassette when the door opener opens the door of the cassette;    a second enclosure defining a second transfer space having an atmosphere of vacuum or negative pressure;    a plurality of vacuum processing chambers arranged around the second transfer space;    a plurality of load lock chambers opposed to the load port site over the first transfer space and also disposed between the first transfer space and the second transfer space, the load lock chambers each capable of accommodating only one object therein;    first gate valves each arranged at each of the load lock chambers to separate the load lock chambers from the first transfer space;    second gate valves each arranged at each of the load lock chambers to separate the load lock chambers from the second transfer space;    third gate valves each arranged at each of the vacuum processing chambers to separate the vacuum processing chambers from the second transfer space;    a positioning unit that adjusts the positions of an object and is arranged adjacent to the first transfer space;    a first transfer unit arranged in the first transfer space to transfer an object among the cassette, the load lock chambers and the positioning unit, the first transfer unit having two holders each capable of holding only one object; and    a second transfer unit arranged in the second transfer space to transfer the objects between the load lock chambers and the vacuum processing chambers, the second transfer unit having two holders each capable of holding only one object.    
     
     
         2 . The processing apparatus according to  claim 1 , wherein the first transfer unit is movable in a direction parallel with an arrangement direction of the load ports and the positioning unit is adjacent to an end of the first transfer space with respect to the arrangement direction of the load ports.  
     
     
         3 . The processing apparatus according to  claim 1 , wherein the positioning unit is arranged between two of the load lock chambers.  
     
     
         4 . The processing apparatus according to  claim 1 , further comprising a cooling unit arranged in the load lock chamber to cool the objects.  
     
     
         5 . The processing apparatus according to  claim 1 , further comprising a heater unit arranged in the load lock chamber to heat the objects.  
     
     
         6 . The processing apparatus according to  claim 1 , wherein clean air is circulated in the first transfer space.