Semiconductor device and manufacturing method thereof
Abstract
A semiconductor device is arranged such that a semiconductor chip having electrodes is flip chip mounted on printed substrate pads on a printed wiring substrate by a bump formed on each electrode. The semiconductor chip and the printed wiring substrate are fixed with a thermo-setting resin. A penetration hole is formed within an area where the printed substrate pad contacts each gold bump, and the gold bump has a joint section also on a side face of the penetration hole of the printed substrate pad. With this structure, the semiconductor device has a secure electrical connection between the bump and the metal pattern.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A flip chip mounted semiconductor device comprising:
a semiconductor chip having a bump; a substrate having a wiring pattern joined to said bump; and said wiring pattern having a stepped section formed within an area joined to said bump, wherein said bump also joins a side face of said stepped section of said wiring pattern.
2 . The semiconductor device of claim 1 , wherein:
said side face of said stepped section is formed virtually parallel to a facing direction of said semiconductor chip and said substrate.
3 . The semiconductor device of claim 1 , further comprising:
a resin for use in fixing said semiconductor chip and said substrate.
4 . The semiconductor device of claim 1 , wherein:
said wiring pattern has an inner surface formed by a hole within said area joined to said bump; and said stepped section is formed by said inner surface.
5 . The semiconductor device of claim 4 , wherein:
said wiring pattern joined to said bump has a tip in a semicircular shape, and has an inner surface formed by a hole in its center.
6 . The semiconductor device of claim 1 , wherein:
said wiring pattern has an outer surface formed virtually parallel to a facing direction of said semiconductor chip and said substrate, in a periphery of said area joined to said bump; and said stepped section is formed by said outer surface.
7 . The semiconductor device of claim 6 , wherein:
said wiring pattern has a tip protruding from said area joined to said bump; and said wiring pattern is formed so as to penetrate through said bump.
8 . The semiconductor device of claim 6 , wherein:
said area of said wiring pattern, joined to said bump is formed in a polygon shape.
9 . The semiconductor device of claim 1 , wherein:
said area of said wiring pattern, joined to said bump is divided into a plurality of pieces; and each of said plurality of pieces has said stepped section.
10 . The semiconductor device of claim 1 , wherein:
said substrate further includes a land for a through hole; said wiring pattern joined to said bump is formed by the land for said through hole; and the side face of said stepped section is an inner surface of said through hole.
11 . The semiconductor device of claim 1 , wherein:
said substrate further includes a land for a via hole; said wiring pattern joined to said bump is formed by the land for said via hole; and the side face of said stepped section is an inner surface of said via hole.
12 . A flip chip mounted semiconductor device comprising:
a semiconductor chip having a bump; and a substrate having a wiring pattern joined to said bump, wherein when said substrate is seen from a side of said semiconductor chip, a contact area between said bump and said wiring pattern is smaller than an area of said bump in a direction of said substrate.
13 . The semiconductor device of claim 12 further comprising:
a resin for use in fixing said semiconductor chip and said substrate.
14 . The semiconductor device of claim 12 , wherein:
said wiring pattern joined to said bump has a tip in a semicircular shape, and has an inner surface formed by a hole in its center.
15 . The semiconductor device of claim 12 , wherein:
said wiring pattern has a tip protruding from said area joined to said bump; and said wiring pattern is formed so as to penetrate through said bump.
16 . The semiconductor device of claim 12 , wherein:
said area of said wiring pattern, joined to said bump is formed in a polygon shape.
17 . The semiconductor device of claim 12 , wherein:
said area joined to said bump of said wiring pattern is divided into a plurality of pieces.
18 . The semiconductor device of claim 12 , wherein:
said substrate further includes a land for a through hole; and said wiring pattern joined to said bump is formed by the land for said through hole.
19 . The semiconductor device of claim 12 , wherein:
said substrate further includes a land for a via hole; and said wiring pattern joined to said bump is formed by the land for said via hole.
20 . A method for manufacturing a semiconductor device comprising the step of conducting flip chip mounting by pressing a semiconductor chip having a bump onto a wiring pattern formed on a substrate,
said method for manufacturing a semiconductor device further comprising the steps of:
i) forming a stepped section on said wiring pattern; and
ii) joining said bump of said semiconductor chip also to a side face of the stepped section of said wiring pattern.
21 . The method for manufacturing a semiconductor device of claim 20 , further comprising the step of:
iii) fixing said semiconductor chip and said substrate with a resin.
22 . The method for manufacturing the semiconductor device of claim 20 , wherein said step ii) includes the steps of:
forming said bump on said semiconductor chip using a softer material than that of said wiring pattern; and depressing said bump of said semiconductor chip onto a portion having a stepped section of said wiring pattern.
23 . The method for manufacturing the semiconductor device of claim 21 , wherein:
in said step iii), an anisotropic conductive film is used as said resin; and said step iii) includes the step of depressing said semiconductor chip onto the substrate with heat applied, via said anisotropic conductive film.
24 . The method for manufacturing the semiconductor device of claim 21 , wherein:
said step ii) includes the step of joining said bump of said semiconductor chip and said wiring pattern formed on said substrate using ultrasonic vibrations; and said step iii) is carried out after said step ii), whereby a spacing formed between said semiconductor chip and said substrate is sealed with said resin.
25 . A semiconductor device, wherein:
a semiconductor chip having electrodes is flip chip mounted on metal patterns formed on a substrate, by bumps, and said semiconductor chip and said substrate are fixed with a resin; each metal pattern has a stepped section formed within an area joined to a corresponding bump; and said bump also joints a side face of said metal pattern.
26 . A semiconductor device, wherein:
a semiconductor chip having electrodes is flip chip mounted on metal patterns formed on a substrate, by bumps, and said semiconductor chip and said substrate are fixed with a resin, and wherein when said substrate is seen from a side of said semiconductor chip, a contact area between said bump and said metal pattern is smaller than an area of said bump in a direction of said substrate.
27 . A method for manufacturing a semiconductor device comprising the steps of:
conducting flip chip mounting by pressing a semiconductor chip having a bump on each electrode, onto a metal pattern formed on a substrate; and fixing said semiconductor chip and said substrate with a resin, the method for manufacturing a semiconductor device further comprising the steps of:
forming a stepped section on said metal pattern within an area joined to each bump; and
joining said bump also to a side face of the stepped section of said metal pattern.
28 . The method for manufacturing a semiconductor device of claim 27 , wherein:
a resin in the form of an anisotropic conductive film is used as said resin for fixing said semiconductor chip and said substrate; and said semiconductor chip having said bump on each electrode is pressed onto said substrate with heat applied, via said resin in the form of an anisotropic conductive film.
29 . The method for manufacturing the semiconductor device of claim 27 , comprising the steps of:
i) joining said bump on said semiconductor chip and said metal pattern formed on said substrate using ultrasonic vibrations; and ii) sealing a spacing formed between said semiconductor chip and said substrate with said resin after carrying out said step i).
30 . A flip chip mounted semiconductor device comprising:
a semiconductor chip having a bump; and a substrate having a wiring pattern joined to said bump, wherein said bump covers at least a part of a side face of said wiring pattern.Join the waitlist — get patent alerts
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