Substrate-processing apparatus

Abstract

A substrate-processing apparatus comprising a processing chamber in which a substrate is processed, an air-supplying device for supplying air having controlled temperature and humidity into the processing chamber, an air passage having an inlet port and an outlet port connected to the processing chamber, for guiding the air from the inlet port to the outlet port, a cooling/dehumidifying section arranged in the air passage and having a thermoelectric cooling device, for cooling and dehumidifying the air introduced from the inlet port, a heating section arranged in the air passage, for heating the air that has been cooled and dehumidified by the cooling/dehumidifying section, a humidifying section provided in the air passage, for humidifying the air heated by the heating section and guiding the air to the outlet port, a temperature-humidity sensor provided at a position in the air passage, and a control device for controlling the cooling/dehumidifying section, the heating section and the humidifying section, in accordance with temperature and humidity detected at the position in the air passage, thereby to adjust the temperature and humidity of the air to be supplied from the outlet port.

1 . A substrate-processing apparatus comprising: 
 a processing chamber in which a substrate is processed;    an air-supplying device for supplying air having controlled temperature and humidity into the processing chamber;    an air passage having an inlet port and an outlet port connected to the processing chamber, for guiding the air from the inlet port to the outlet port;    a cooling/dehumidifying section arranged in the air passage and having a thermoelectric cooling device, for cooling and dehumidifying the air introduced from the inlet port;    a heating section arranged in the air passage, for heating the air that has been cooled and dehumidified by the cooling/dehumidifying section;    a humidifying section provided in the air passage, for humidifying the air heated by the heating section and guiding the air to the outlet port;    a temperature-humidity sensor provided at a position in the air passage; and    a control device for controlling the cooling/dehumidifying section, the heating section and the humidifying section, in accordance with temperature and humidity detected at the position in the air passage, thereby to adjust the temperature and humidity of the air to be supplied from the outlet port.    
     
     
         2 . A substrate-processing apparatus according to  claim 1 , wherein the control device controls the cooling/dehumidifying section in accordance with an operation output of the heating section or humidifying section.  
     
     
         3 . A substrate-processing apparatus according to  claim 2 , wherein the control device controls the cooling/dehumidifying section in accordance with the operation output of the heating section or humidifying section, such that the operation output of the heating section or humidifying section remains to surpass a predetermined threshold value.  
     
     
         4 . A substrate-processing apparatus according to  claim 1 , wherein the temperature-humidity sensor is provided in the inlet port of the air passage, and in the outlet port the air acquires the temperature and humidity adjusted by the control device.  
     
     
         5 . A substrate-processing apparatus according to  claim 1 , further comprising a temperature-humidity sensor for detecting temperature and humidity at a peripheral part of the substrate, and the control device determines the temperature and humidity to be adjusted by the control device, from the temperature and humidity detected by the temperature-humidity sensor at the peripheral part of the substrate.  
     
     
         6 . A substrate-processing apparatus according to  claim 1 , wherein the temperature-humidity sensor is provided between the cooling/dehumidifying section and the heating section, and the control device controls the cooling/dehumidifying section in accordance with outputs of the heating section and humidifying section, thereby to impart a predetermined temperature to the air that has passed through the cooling/dehumidifying section.