Electrodeposition tank, electrodeposition apparatus, and electrodeposition method

Abstract

The present invention provides an electrodeposition apparatus for continuously forming a film of an oxide on a substrate by electrodeposition, wherein an electrodeposition tank for retaining an electrodeposition bath is formed of a metal and the inside of the electrodeposition tank is kept electrically floating. This can form a uniform oxide film without irregularities on the substrate.

What is claimed is:  
     
         1 . An electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, the electrodeposition tank being formed of a dielectric material.  
     
     
         2 . The electrodeposition tank according to  claim 1 , wherein the dielectric is reinforced with a metal material.  
     
     
         3 . The electrodeposition tank according to  claim 1 , wherein the dielectric is a fluororesin.  
     
     
         4 . The electrodeposition tank according to  claim 1 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         5 . The electrodeposition tank according to  claim 1 , wherein the substrate is a long substrate.  
     
     
         6 . The electrodeposition tank according to  claim 1 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         7 . An electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, comprising an outside wall formed of a metal material and an inside surface thereof covered with a lining formed of a dielectric material.  
     
     
         8 . The electrodeposition tank according to  claim 7 , wherein the dielectric: is a fluororesin.  
     
     
         9 . The electrodeposition tank according to  claim 7 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         10 . The electrodeposition tank according to  claim 7 , wherein a clearance at a seam of the lining is so set that an electric resistance of the bath from the electrode to the metal part of the outside wall is greater than an electric resistance of the bath from the electrode to the substrate.  
     
     
         11 . The electrodeposition tank according to  claim 7 , wherein the metal part of the outside wall and the substrate are set at an equal potential.  
     
     
         12 . The electrodeposition tank according to  claim 7 , wherein the substrate is a long substrate.  
     
     
         13 . The electrodeposition tank according to claim  7 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         14 . An electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, comprising an outside tank formed of a metal material and an inside tank formed of a dielectric material for housing the electrode inside thereof.  
     
     
         15 . The electrodeposition tank according to  claim 14 , wherein the dielectric inside tank is reinforced with a metal material.  
     
     
         16 . The electrodeposition tank according to  claim 14 , wherein the inside tank is provided with an opening to permit inflow and outflow of the bath solution inside thereof and the bath solution outside thereof.  
     
     
         17 . The electrodeposition tank according to  claim 16 , wherein the size of the opening is so set that an electric resistance of the bath from the electrode in the inside tank to the metal outside tank is greater than an electric resistance of the bath from the electrode to the substrate.  
     
     
         18 . The electrodeposition tank according to claim  14 , wherein the inside tank is provided with a bath exchanging means for effecting exchange of the bath solution inside thereof and the bath solution outside thereof.  
     
     
         19 . The electrodeposition tank according to  claim 18 , wherein the bath exchanging means comprises a bath outlet system for guiding the inside bath solution out of the inside tank, a bath inlet system for guiding the outside bath solution into the inside tank, and a pump for circulating the bath solution from the outlet system to the inlet system.  
     
     
         20 . The electrodeposition tank according to  claim 18 , wherein an electric resistance of the bath from the electrode through the bath exchanging means to the substrate is greater than an electric resistance of the bath from the electrode to the substrate in the inside tank.  
     
     
         21 . The electrodeposition tank according to  claim 14 , wherein the dielectric is a fluororesin.  
     
     
         22 . The electrodeposition tank according to  claim 14 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         23 . The electrodeposition tank according to  claim 14 , wherein the metal outside tank and the substrate are set at an equal potential.  
     
     
         24 . The electrodeposition tank according to  claim 14 , wherein the substrate is a long substrate.  
     
     
         25 . The electrodeposition tank according to  claim 14 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         26 . An electrodeposition apparatus comprising an electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, a washing means for washing the substrate after passage through the electrodeposition tank, and a drying means for forcedly drying the substrate after passage through the washing means, wherein the electrodeposition tank is formed of a dielectric material.  
     
     
         27 . The electrodeposition apparatus according to  claim 26 , wherein the dielectric electrodeposition tank is reinforced with a metal material.  
     
     
         28 . The electrodeposition apparatus according to  claim 26 , wherein the dielectric is a fluororesin.  
     
     
         29 . The electrodeposition apparatus according to  claim 26 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         30 . The electrodeposition apparatus according to  claim 26 , wherein the substrate is a long substrate.  
     
     
         31 . The electrodeposition apparatus according to  claim 26 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         32 . An electrodeposition apparatus comprising an electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, a washing means for washing the substrate after passage through the electrodeposition tank, and a drying means for forcedly drying the substrate after passage through the washing means, wherein the electrodeposition tank is formed of a metal material and an inside surface thereof is covered with a lining formed of a dielectric material.  
     
     
         33 . The electrodeposition apparatus according to  claim 32 , wherein the dielectric is a fluororesin.  
     
     
         34 . The electrodeposition apparatus according to  claim 32 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         35 . The electrodeposition apparatus according to  claim 32 , wherein a clearance at a seam of the lining is so set that an electric resistance of the bath from the electrode to the metal part of the electrodeposition tank is greater than an electric resistance of the bath from the electrode to the substrate.  
     
     
         36 . The electrodeposition apparatus according to  claim 32 , wherein the metal part of the electrodeposition tank and the substrate are set at an equal potential.  
     
     
         37 . The electrodeposition apparatus according to  claim 32 , wherein the substrate is a long substrate.  
     
     
         38 . The electrodeposition apparatus according to  claim 32 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         39 . An electrodeposition apparatus comprising an electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, a washing means for washing the substrate, after passage through the electrodeposition tank, and a drying means for forcedly drying the substrate after passage through the washing means, wherein the electrodeposition tank comprises an outside tank formed of a metal material and an inside tank formed of a dielectric material for housing the electrode inside thereof.  
     
     
         40 . The electrodeposition apparatus according to  claim 39 , wherein the dielectric inside tank is reinforced with a metal material.  
     
     
         41 . The electrodeposition apparatus according to  claim 39 , wherein the inside tank is provided an opening to permit inflow and outflow of the bath solution inside thereof and the bath solution outside thereof.  
     
     
         42 . The electrodeposition apparatus according to  claim 41 , wherein the size of the opening is so set that an electric resistance of the bath from the electrode in the inside tank to the metal outside tank is greater than an electric resistance of the bath from the electrode to the substrate.  
     
     
         43 . The electrodeposition apparatus according to  claim 39 , wherein the inside tank comprises a bath exchanging means for effecting exchange of the bath solution inside thereof and the bath solution outside thereof.  
     
     
         44 . The electrodeposition apparatus according to  claim 43 , wherein the bath exchanging means comprises a bath outlet system for guiding the inside bath solution out of the inside tank, a bath inlet system for guiding the outside bath solution into the inside tank, and a pump for circulating the bath solution from the outlet system to the inlet system.  
     
     
         45 . The electrodeposition apparatus according to  claim 43 , wherein an electric resistance of the bath from the electrode through the bath exchanging means to the substrate is greater than an electric resistance of the bath from the electrode to the substrate in the inside tank.  
     
     
         46 . The electrodeposition apparatus according to  claim 39 , wherein the dielectric is a fluororesin.  
     
     
         47 . The electrodeposition apparatus according to  claim 39 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         48 . The electrodeposition apparatus according to  claim 39 , wherein the metal outside tank and the substrate are set at an equal potential.  
     
     
         49 . The electrodeposition apparatus according to  claim 39 , wherein the substrate is a long substrate.  
     
     
         50 . The electrodeposition apparatus according to  claim 39 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         51 . An electrodeposition method comprising forming a film of an oxide on a substrate by the use of the electrodeposition apparatus as set forth in  claim 26 .  
     
     
         52 . An electrodeposition method comprising forming a film of an oxide on a substrate by the use of the electrodeposition apparatus as set forth in  claim 32 .  
     
     
         53 . An electrodeposition method comprising forming a film of an oxide on a substrate by the use of the electrodeposition apparatus as set forth in  claim 39 .  
     
     
         54 . An electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, wherein all or part of a piping system connected to the tank and a piping system disposed in the tank is formed of a dielectric.  
     
     
         55 . The electrodeposition tank according to  claim 54 , wherein the piping system disposed in the tank is electrically insulated from the tank.  
     
     
         56 . The electrodeposition tank according to  claim 54 , wherein the dielectric is a fluororesin.  
     
     
         57 . The electrodeposition tank according to  claim 54 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         58 . The electrodeposition tank according to  claim 54 , wherein the substrate is a long substrate.  
     
     
         59 . The electrodeposition tank according to  claim 54 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         60 . An electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, wherein the inside and outside surfaces of all or part of a piping system connected to the tank and a piping system disposed in the tank are coated with a dielectric.  
     
     
         61 . The electrodeposition tank according to  claim 60 , wherein the piping system disposed in the tank is electrically insulated from the tank.  
     
     
         62 . The electrodeposition tank according to  claim 60 , wherein the coating dielectric is a fluororesin.  
     
     
         63 . The electrodeposition tank according to  claim 60 , wherein the coating dielectric is a fiber-reinforced plastic.  
     
     
         64 . The electrodeposition tank according to  claim 60 , wherein the substrate is a long substrate.  
     
     
         65 . The electrodeposition tank according to  claim 60 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         66 . An electrodeposition apparatus comprising an electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, a washing means for washing the substrate after passage through the electrodeposition tank, and a drying means for forcedly drying the substrate after passage through the washing means, wherein all or part of a piping system connected to the electrodeposition tank and a piping system disposed in the electrodeposition tank is formed of a dielectric.  
     
     
         67 . The electrodeposition apparatus according to  claim 66 , wherein the piping system disposed in the electrodeposition tank is electrically insulated from the electrodeposition tank.  
     
     
         68 . The electrodeposition apparatus according to  claim 66 , wherein the dielectric is a fluororesin.  
     
     
         69 . The electrodeposition apparatus according to  claim 66 , wherein the dielectric is a fiber-reinforced plastic.  
     
     
         70 . The electrodeposition apparatus according to  claim 66 , wherein the substrate is a long substrate.  
     
     
         71 . The electrodeposition apparatus according to  claim 66 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         72 . An electrodeposition apparatus comprising an electrodeposition tank for forming a film of an oxide on a substrate with energizing the substrate and an electrode in an electrodeposition bath, a washing means for washing the substrate after passage through the electrodeposition tank, and a drying means for forcedly drying the substrate after passage through the washing means, wherein the inside and outside surfaces of all or part of a piping system connected to the electrodeposition tank and a piping system disposed in the electrodeposition tank are coated with a dielectric.  
     
     
         73 . The electrodeposition apparatus according to  claim 72 , wherein the piping system disposed in the electrodeposition tank is electrically insulated from the electrodeposition tank.  
     
     
         74 . The electrodeposition apparatus according to  claim 72 , wherein the coating dielectric is a fluororesin.  
     
     
         75 . The electrodeposition apparatus according to  claim 72 , wherein the coating dielectric is a fiber-reinforced plastic.  
     
     
         76 . The electrodeposition apparatus according to  claim 72 , wherein the substrate is a long substrate.  
     
     
         77 . The electrodeposition apparatus according to  claim 72 , which is mounted in a roll-to-roll apparatus for conveying a long substrate as stretched between rolls.  
     
     
         78 . An electrodeposition method comprising forming a film of an oxide on a substrate by use of the electrodeposition apparatus as set forth in  claim 66 .  
     
     
         79 . An electrodeposition method comprising forming a film of an oxide on a substrate by the use of the electrodeposition apparatus as set forth in  claim 72 .  
     
     
         80 . An electrodeposition apparatus for continuously forming a film of an oxide on a substrate by electrodeposition, comprising an electrodeposition tank for retaining an electrodeposition bath, wherein the electrodeposition bath is formed of a metal, and wherein the inside of the electrodeposition tank is kept electrically floating.  
     
     
         81 . The electrodeposition apparatus according to  claim 80 , wherein the inside of the electrodeposition tank is kept electrically floating by interposing a dielectric spacer between the electrodeposition tank and a frame of the electrodeposition tank or between the frame of the electrodeposition tank and a ground surface.  
     
     
         82 . The electrodeposition apparatus according to  claim 80 , wherein the electrodeposition tank is covered with a dielectric lining.  
     
     
         83 . The electrodeposition apparatus according to  claim 80 , wherein the electrodeposition tank comprises an inside tank of a dish shape formed of a dielectric and having an electrode provided inside thereof.  
     
     
         84 . The electrodeposition apparatus according to  claim 80 , wherein the substrate is kept electrically floating.  
     
     
         85 . The electrodeposition apparatus according to  claim 84 , wherein the substrate is kept electrically floating by covering surfaces of all rollers in contact with the substrate or bearing surfaces of rotational shafts thereof with a dielectric or by forming all the rollers in contact with the substrate or the bearings of the rotational shafts thereof of a dielectric.  
     
     
         86 . An electrodeposition method comprising forming a film of an oxide on a substrate by the use of the electrodeposition apparatus as set forth in claim  80 .