Control system for a cyclone turbine flowmeter

Abstract

The present invention relates to a cyclone turbine flowmeter for extracting information about a flow rate or measuring the quantity of flow flowing in production facilities. The cyclone turbine flowmeter includes a cyclone turbine formed with flow channels for allowing liquids flowing in from the outside to receive rotary power, a rotor rotated by the liquids passed through the flow channels of the cyclone turbine, a turbine bearing manufactured so as to minimize frictional forces and at the same time, to have durability and resistance to chemicals, and a vibration isolation bearing constructed in such a manner of enclosing the turbine bearing and its turbine axle to prevent vibration.

What is claimed is:  
     
         1 . A cyclone turbine flowmeter having upper and lower caps and a housing, the flowmeter comprising: 
 a cyclone turbine formed with flow channels for allowing liquids flowing in from the outside to receive rotary power;    a rotor rotated by the liquids passed through the flow channels of the cyclone turbine;    a turbine bearing manufactured so as to minimize frictional forces and at the same time, to have durability and resistance to chemicals; and    a vibration isolation bearing constructed in such a manner of enclosing the turbine bearing and its turbine axle to prevent vibration.    
     
     
         2 . The cyclone turbine as defined in  claim 1 , wherein the cyclone turbine is formed on its blades with a plurality of flow channels inclined at a predetermined angle of degree.  
     
     
         3 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the cyclone turbine is formed at the center of its blades with a groove for inserting a rotational axle.  
     
     
         4 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the rotor is formed on its blades with a plurality of grooves inclined in an angle of predetermined degree so that the rotor enables to smoothly rotate by high pressure of fluids passed through the flow channels of the cyclone turbine.  
     
     
         5 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the axle of the rotor has a diameter less than that of the groove for inserting the axle to have the number of rotation less than that of the rotor.  
     
     
         6 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the rotor is fixedly inserted at a part of its body with a predetermined number of magnets.  
     
     
         7 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the rotor is formed on the periphery of its body with a predetermined number of grooves to allow lights to pass therethrough or reflect therefrom.  
     
     
         8 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the upper cap is formed with a visible window for seeing through the state of rotation of the rotor.  
     
     
         9 . The cyclone turbine flowmeter as defined in  claim 8 , wherein the visible window is made of a transparent or semi-transparent material.  
     
     
         10 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the upper cap is formed with a groove for fixedly inserting therein a hall sensor and its electric wires to detect the state of rotation of the rotor.  
     
     
         11 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the upper cap is formed at the center thereof with a groove for inserting therein the axle of the rotor.  
     
     
         12 . The cyclone turbine flowmeter as defined in  claim 7 , wherein the groove is formed on the body of the rotor reduced by the length of the body in which magnets were mounted.  
     
     
         13 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the housing is formed at an inner side of its upper and lower part with grooves for inserting packing members respectively.  
     
     
         14 . The cyclone turbine flowmeter as defined in  claim 1 , wherein the rotor is disposed in the front of the grooves formed on the body of the rotor with a photo device for transmitting or receiving lights.  
     
     
         15 . A control system of a flowmeter, comprising: 
 a sensor for detecting a variation in the intensity of magnetic field generated by magnets fixedly-inserted to a body of a rotor in response to rotation of the rotor;    a signal input unit for converting the detected signal by the sensor to a suitable signal to determine flow rate;    a microprocessor for receiving a signal from the signal input unit and operating a present flow rate;    a signal output unit for converting the flow rate data operated by the microprocessor to a suitable signal; and    an electric power source for supplying electric power to drive the microprocessor and sensor.    
     
     
         16 . The control system of the flowmeter as defined in  claim 15 , wherein the rotor is formed on the its body with a plurality of grooves to pass through or reflect lights when the rotor rotates.  
     
     
         17 . The control system of the flowmeter as defined in  claim 15 , wherein the sensor can bereplaced by a photo device for transmitting or receiving lights through a line.  
     
     
         18 . The control system of the flowmeter as defined in  claim 15 , wherein the microprocessor is in advance stored with a program for controlling an exceeded quantity of flow to an optimum quantity of flow to be supplied when flow rate -goes beyond an optimum flow rate.  
     
     
         19 . The control system of the flowmeter as defined in  claim 17 , wherein the photo device is disposed in the front of the groove formed on the body of the rotor, the photo device detects the intensity of radiation reflected from part formed with grooves and from part not formed with groove, and the detected data is input to the microprocessor.  
     
     
         20 . The control system of the flowmeter as defined in  claim 15 , wherein the signal input unit is an analog to digital converter.  
     
     
         21 . The control system of the flowmeter as defined in  claim 15 , wherein the signal output unit is a digital to analog converter.  
     
     
         22 . A control system of a flowmeter, comprising: 
 a sensor for detecting a variation in the intensity of magnetic field generated by magnets fixed to a body of a rotor in response to rotation of the rotor;    a signal input unit for converting the detected signal to a suitable signal to receive the detected signal by the sensor and determine flow rate;    a microprocessor for receiving a signal from the signal input unit for operating a current flow rate;    a signal output unit for converting the flow rate data operated by the microprocessor to a suitable signal;    an electric power source for supplying electric power to drive the microprocessor and sensor,    a display unit for displaying a present flow rate determined by the microprocessor per unit time;    an integrating unit for integrating flow rate during a predetermined time;    a flow rate determining unit for determining flow rate to be supplied in response to a present flow rate determined by the microprocessor; and    an alarm for informing the exceeded flow rate in case of being over an optimum flow rate to be supplied during the work process.    
     
     
         23 . The control system of the flowmeter as defined in  claim 22 , wherein the rotor is formed on its body with a plurality of grooves to pass through or reflect lights in response to rotation of the rotor.  
     
     
         24 . The control system of the flowmeter as defined in  claim 22 , wherein the sensor can be replaced by a photo device for receiving or transmitting lights through a line.  
     
     
         25 . The control system of the flowmeter as defined in  claim 22 , wherein the microprocessor is stored in advance with a program for controlling an exceeded quantity of flow to an optimum quantity of flow to be supplied when flow rate goes beyond an optimum flow rate.  
     
     
         26 . The control system of the flowmeter as defined in  claim 24 , wherein the photo device is disposed in the front of the groove formed on the body of the rotor, the photo device detects the intensity of radiation reflected from part formed with grooves and from part not formed with groove, and the detected data is input to the microprocessor.  
     
     
         27 . The control system of the flowmeter as defined in  claim 22 , wherein the signal input units an analog to digital converter.  
     
     
         28 . The control system of the flowmeter as defined in  claim 22 , wherein the signal output unit is a digital to analog converter.  
     
     
         29 . The control system of the flowmeter as defined in  claim 22 , wherein the display unit is a plurality of light emitting diodes controlled by the microprocessor.  
     
     
         30 . The control system of the flowmeter as defined in  claim 22 , wherein the alarm is a buzzer being actuated by control of the microprocessor.  
     
     
         31 . The control system of the flowmeter as defined in  claim 22 , wherein the alarm is a plurality of light emitting diodes being actuated by control of the microprocessor.  
     
     
         32 . The control system of the flowmeter as defined in  claim 22 , wherein the microprocessor is mounted therein with a timer.  
     
     
         33 . A semiconductor apparatus manufactured while flow rate such as chemicals being supplies to a semiconductor process line is controlled by a control system of a flowmeter, the control system comprising: 
 a sensor for detecting a variation in the intensity of magnetic field generated by magnets fixed to a body of a rotor in response to rotation of the rotor;    a signal input unit for converting the detected signal to a suitable signal to receive the detected signal by the sensor and determine flow rate;    a microprocessor for receiving a signal from the signal input unit for operating a current flow rate;    a signal output unit for converting the flow rate data operated by the microprocessor to a suitable signal;    an electric power source for supplying electric power to drive the microprocessor and sensor.    a display unit for displaying a present flow rate determined by the microprocessor per unit time;    an integrating unit for integrating flow rate during a predetermined time;    a flow rate determining unit for determining flow rate to be supplied in response to a present flow rate determined by the microprocessor; and    an alarm for informing the exceeded flow rate in case of being over an optimum flow rate to be supplied during the work process.