High performance stage assembly

Abstract

A stage assembly ( 10 ) for moving and positioning one or more objects ( 24 ) for an exposure apparatus ( 28 ) is provided herein. The stage assembly ( 10 ) includes a fine stage ( 14 ) and a coarse stage ( 18 ). The fine stage ( 14 ) includes a holder ( 15 ) that retains the object ( 24 ). The stage assembly ( 10 ) also includes a fine Y mover ( 32 ) and a fine X mover ( 34 ) that precisely move the fine stage ( 14 ) relative to the coarse stage ( 18 ). Uniquely, the fine movers ( 32 ), ( 34 ) are positioned on only one side of the holder ( 15 ). With this design, the resulting stage assembly ( 10 ) has a relatively low mass and a relatively high servo bandwidth. Further, with this design, the stage assembly ( 10 ) is readily accessible for service and a measurement system ( 16 ) can be easily positioned near the fine stage ( 14 ). The stage assembly ( 10 ) can also include an anti-gravity mechanism ( 40 ) that minimizes distortion of a stage base ( 12 ) that supports the fine stage ( 14 ) as the fine stage ( 14 ) moves above the stage base ( 12 ). Additionally, the stage assembly ( 10 ) can include a reaction assembly ( 20 ) that reduces the amount of reaction forces transferred from the coarse stage ( 18 ).

What is claimed is:  
     
         1 . A stage apparatus for positioning an object, the stage apparatus comprising: 
 a first stage including a first frame and a first supporting member that supports the first frame, the first frame holding the object and positioning the object; and    a second stage including a second frame and a second supporting member that supports the second frame, the second frame being connected with the first frame in a non-contact manner and positioning the first frame, and the second supporting member is provided independently from the first supporting member of the first stage.    
     
     
         2 . The stage apparatus of    claim 1   , wherein the first stage is a fine stage that positions the object with a first precision, and the second stage is a coarse stage that positions the first frame of the first stage with a second precision that is lower than the first precision.  
     
     
         3 . The stage apparatus of    claim 1   , wherein the first stage positions the object within a first movable region and the second stage positions the first frame of the first stage within a second movable region that is larger than the first movable region.  
     
     
         4 . The stage apparatus of    claim 1   , further comprising a vibration damper device disposed between the first supporting member and the second supporting member.  
     
     
         5 . The stage apparatus of    claim 4   , wherein the vibration damper device prevents a vibration, which is generated by a movement of the second stage, from propagating to the first support member.  
     
     
         6 . The stage apparatus of    claim 4   , wherein the vibration damper device is a reaction assembly that reduces a reaction force generated by the movement of the second stage.  
     
     
         7 . The stage apparatus of    claim 1   , further comprising a measurement system that measures a position of the first frame of the first stage, wherein the measurement system is connected to the first supporting member.  
     
     
         8 . The stage apparatus of    claim 1   , further comprising a first mover that causes a relative movement between the first frame of the first stage and the second stage, wherein the first mover connect the first stage and the second stage in a non-contract manner.  
     
     
         9 . The stage apparatus of    claim 8   , wherein the first mover generates driving force by utilizing a magnetic field.  
     
     
         10 . The stage apparatus of    claim 9   , wherein the first mover has at least one electromagnet that generates the driving force.  
     
     
         11 . The stage apparatus of    claim 8   , further comprising a second mover that causes a relative movement between the second frame and the second supporting member along the direction substantially parallel to the direction of driving force of the first mover, and 
 wherein (i) a first portion of the first mover is connected to the first frame, (ii) a second portion of the first mover is connected to the second frame, (iii) a first portion of the second mover is connected to the second frame, and (iv) a second portion of the second mover is connected to the second supporting member.    
     
     
         12 . The stage apparatus of    claim 11   , wherein the second mover connects the second frame and the second supporting member in a non-contact manner.  
     
     
         13 . The stage apparatus of    claim 12   , wherein the second supporting member supports the second frame in a non-contact manner.  
     
     
         14 . The stage apparatus of    claim 1   , wherein the first supporting member supports the first frame in a non-contact manner.  
     
     
         15 . The stage apparatus of    claim 14   , wherein the first stage further comprises a fluid bearing disposed between the first frame and the first supporting member.  
     
     
         16 . An exposure apparatus for positioning an object, the exposure apparatus comprising: 
 an illumination source; and    a stage apparatus, the stage apparatus comprising:    a first stage including a first frame and a first supporting member that supports the first frame, the first frame holding the object and positioning the object;    a second stage including a second frame and a second supporting member that supports the second frame, the second frame being connected with the first frame of the first stage in a non-contact manner and positioning the first frame, and the second supporting member is provided independently from the first supporting member of the first stage.    
     
     
         17 . The exposure apparatus of    claim 16   , further comprising an apparatus frame that holds the illumination source, wherein the apparatus frame is construed integrally with the first supporting member of the first stage and is independent of the second supporting member of the second stage.  
     
     
         18 . The exposure apparatus of    claim 16   , wherein the object is a reticle having a pattern, and the first stage and the second stage position the reticle.  
     
     
         19 . A device manufactured with the exposure apparatus according to    claim 16   .  
     
     
         20 . A wafer on which an image has been formed by the exposure apparatus according to    claim 16   .  
     
     
         21 . A method for making a stage apparatus, the method comprising the steps of: 
 providing a first stage including a first frame and a first supporting member that supports the first frame, the first frame holding an object and positioning the object; and    providing a second stage including a second frame and a second supporting member that supports the second frame, the second frame being connected with the first frame in a non-contact manner and positioning the first frame, an the second supporting member is provided independently from the first supporting member.    
     
     
         22 . The method of    claim 21   , wherein the first stage is a fine stage that positions the object with a first precision; and the second stage is a coarse stage that positions the first frame of the first stage with a second precision that is lower than the first precision.  
     
     
         23 . The method of    claim 21   , wherein the first stage positions the object within a first movable region; and the second stage positions the first frame of the first stage within a second movable region that is larger than the first movable region.  
     
     
         24 . The method of    claim 21   , further comprising the step of disposing a vibration damper device between the first supporting member and the second supporting member.  
     
     
         25 . The method of    claim 24   , wherein the vibration damper device prevents a vibration, which is generated by a movement of the second stage, from propagating to the first support member.  
     
     
         26 . The method of    claim 24   , wherein the vibration damper device is a reactive assembly that reduces a reaction force generated by the movement of the second stage.  
     
     
         27 . The method of    claim 21   , further comprising the step of connecting a measurement system to the first supporting member so that the measurement system measures a position of the first frame of the first stage.  
     
     
         28 . The method of    claim 21   , further comprising the step of coupling a first mover to at least one of the first stage and the second stage so that the first mover connects the first stage and the second stage in a non-contact manner and causes a relative movement between the first frame of the first stage and the second stage.  
     
     
         29 . The method of    claim 28   , wherein the first mover generates driving force by utilizing a magnetic field.  
     
     
         30 . The method of    claim 29   , wherein the first mover has at least one electromagnet that generates the driving force.  
     
     
         31 . The method of    claim 28   , further comprising the step of coupling a second mover to the second stage so that the second mover causes a relative movement between the second frame and the second supporting member along the direction substantially parallel to the direction of driving force of the first mover, wherein: 
 (i) the step of coupling the first mover includes the steps of connecting a first portion of the first mover to the first frame, and connecting a second portion of the first mover to the second frame, and    (ii) the step of coupling the second mover includes the steps of connecting a first portion of the second mover to the second frame, and connecting a second portion of the second mover to the second supporting member.    
     
     
         32 . The method of    claim 31   , wherein the second mover connects the second frame and the second supporting member in a non-contact manner.  
     
     
         33 . The method of    claim 32   , wherein the second supporting member supports the second frame in a non-contact manner.  
     
     
         34 . The method of    claim 21   , wherein the first supporting member supports the first frame in a non-contact manner.  
     
     
         35 . The method of    claim 34   , wherein the first stage further comprises a fluid bearing disposed between the first frame and the first supporting member.  
     
     
         36 . A method for making an exposure apparatus including the steps of: 
 providing an illumination source; and    providing a stage apparatus, the step of providing the stage apparatus further comprising the steps of:    providing a first stage including a first frame and a first supporting member that supports the first frame, the first frame holding an object and positioning the object; and    providing a second stage including a second frame and a second supporting member that supports the second frame, the second frame being connected with the first frame in a non-contact manner and positioning the first frame, and the second supporting member is provided independently from the first supporting member.    
     
     
         37 . The method of    claim 36   , further comprising the step of providing an apparatus frame that supports the illumination source, the apparatus frame being construed integrally with the first supporting member of the first stage and is independent of the second supporting member of the second stage.  
     
     
         38 . The method of    claim 36   , wherein the object is a reticle having a pattern, the first stage and the second stage positioning the reticle.  
     
     
         39 . A method of making a device including at least an exposure process, wherein the exposure process utilizes the exposure apparatus made by the method of    claim 36   .  
     
     
         40 . A method of making a wafer utilizing the exposure apparatus made by the method of    claim 36   .