US2001042726A1PendingUtilityA1

Cassette carrier for wafer cleaning processes

Assignee: MOSEL VITELIC INCPriority: May 18, 2000Filed: Jan 25, 2001Published: Nov 22, 2001

Est. expiryMay 18, 2020(expired)· nominal 20-yr term from priority

Inventors:John Chiu Koni Lin

H10P 72/15H10P 72/7602

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References

Claims

Abstract

An improvement of a cassette carrier is provided to improve wafer cleaning processes. The carrier includes a support and two opposed suspensions positioned at both sides of the support and each provided with a fixing mechanism for suspending edges of cassettes. According to the present invention, the structure of the carrier for carrying the cassettes is simplified to reduce amount of chemicals adhered to and remained on the surface of the carrier during wafer cleaning, thereby shortening wafer cleaning time and enhancing wafer cleaning efficiency.

Claims

exact text as granted — not AI-modified

What is claimed is:  
     
         1 . A carrier for carrying cassettes loaded with wafers in wafer cleaning processes, comprising: 
 a support; and    two opposed suspensions positioned at bottom of said support and each provided with a fixing mechanism for suspending said cassettes.    
     
     
         2 . A carrier according to    claim 1   , wherein said fixing mechanism comprises a groove.

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