Method of fabricating an isolation structure in an integrated circuit

Abstract

A semiconductor fabrication method is provided for the fabrication of an isolation structure including, a shallow-trench isolation (STI) structure in an integrated circuit. This method is characterized by the increase in the thickness of the adhesive layer over that of the prior art and also in the use of thermal oxidation process to form the STI structure. The thick adhesive layer can thus resist the stress from thermal expansion of the various component layers in the integrated circuit during heat treatment. Moreover, the resulting STI structure is not formed with recessed edge portions since the hydrofluoric (HF) enchant acts on the silicon dioxide plug in the STI structure with substantially the same etching irate as on the adhesive layer. Moreover, this method includes no chemical-mechanical polish (CMP) process so the problem of scratches on the surface of the silicon dioxide plug as seen in the case of the prior art is avoided.

What is claimed is:  
     
         1 . A method for fabrication an isolation structure in an integrated circuit, comprising the steps of: 
 preparing a semiconductor substrate;    forming an adhesive layer over the substrate;    forming a hard mask layer over the adhesive layer;    forming an etch-end layer over the hard mask layer;    performing a selective etching process to each away selected portions of the etch-end layer, the hard mask layer, and the adhesive layer but not exposing the substrate to thereby form a first opening and a second opening in the etch-end layer and the hard mask layer above the adhesive layer, wherein the first opening is larger in dimension than the second opening;    forming a first sidewall spacer on the sidewall of the first opening and a second sidewall spacer on the sidewall of the second opening, with the adhesive layer at the bottom of the first opening that is uncovered by the first sidewall spacer being entirely removed to expose the underlying part of the substrate, and with the adhesive layer at the bottom of the second sidewall spacer being still entirely covered by the second sidewall spacer;    performing a first thermal oxidation process to oxidize the exposed part of the substrate at the bottom of the first opening into a FOX layer;    performing an etching process through the second opening to etch successively through the second sidewall spacer and the part of the adhesive layer underlying the second sidewall spacer until reaching a predefined depth into the substrate to thereby form a trench in the substrate;    performing a second thermal oxidation process to oxidize the exposed part of the substrate in the trench into a silicon dioxide plug which fills the trench entirely; and    entirely removing the remaining etch-end layer, hard mask layer, adhesive layer, and first and second sidewall spacers;    wherein the silicon dioxide plug in the trench constitutes an STI structure and the STI structure and the FOX layer in combination constitute the intended isolation structure.    
     
     
         2 . The method of    claim 1   , wherein the adhesive layer is a pad oxide layer.  
     
     
         3 . The method of    claim 1   , wherein the adhesive layer is formed to a thickness of from about 200 Å to 400 Å.  
     
     
         4 . The method of    claim 1   , wherein the hard mask layer is formed from silicon nitride.  
     
     
         5 . The method of    claim 1   , wherein, through the selective etching process, the remaining thickness of the part of the adhesive layer that lies at the bottom of the first and second openings is about 100 Å.  
     
     
         6 . The method of    claim 1   , wherein the trench in the substrate is formed with a width of from about 0.5 μm to 0.1 μm.  
     
     
         7 . A method for fabricating an isolation structure in an integrated circuit, comprising the steps of: 
 preparing a semiconductor substrate;    forming an adhesive layer over the substrate;    forming a hard mask, layer over the adhesive layer;    performing a selective etching process to each away selected portions of the etch-end layer, the hard mask layer, and the adhesive layer but not exposing the substrate to thereby form an opening in the etch-end layer and the hard mask layer above the adhesive layer;    forming a sidewall spacer on the sidewall of the opening with the adhesive layer at the bottom of the second sidewall spacer being still entirely covered by the sidewall spacer;    performing an etching process through the opening to etch successively through the sidewall spacer and the part of the adhesive layer underlying the sidewall spacer to a predefined depth into the substrate to thereby form a trench in the substrate; and    performing a thermal oxidation process to oxidize the exposed part of the substrate in the trench into a silicon dioxide plug which fills the trench entirely, wherein the silicon dioxide plug in the trench constitutes an STI structure serving as the intended isolation structure.    
     
     
         8 . The method of    claim 7   , wherein the adhesive layer is a pad oxide layer.  
     
     
         9 . The method of    claim 7   , wherein the adhesive layer is formed to a thickness of from about 200 Å to 400 Å.  
     
     
         10 . The method of    claim 7   , wherein the etch-end layer is formed from silicon oxide.  
     
     
         11 . The method of    claim 7   , wherein, through the selective etching process, the remaining thickness of the part of the adhesive layer that is laid at the bottom of the opening is about 100 Å.  
     
     
         12 . The method of    claim 7   , wherein the trench in the substrate is formed with a width of from about 0.05 μm to 0.1 μm.  
     
     
         13 . A method for fabricating an isolation structure in an integrated circuit, comprising steps of: 
 preparing a semiconductor substrate;    forming an adhesive layer over the substrate;    forming a hard mask layer over the adhesive layer;    forming an etch-end layer over the hard mask layer;    performing a selective etching process to each away selected portions of the etch-end layer, the hard mask layer, and the adhesive layer but not exposing the substrate to thereby form an opening in the etch-end layer and the hard mask layer above the adhesive layer;    forming a sidewall spacer on the sidewall of the opening, with the adhesive layer at the bottom of the opening that is not covered by the sidewall spacer being entirely removed to expose the underlying, part of the substrate;    performing a thermal oxidation process to oxidize the exposed part of the substrate at the bottom of the opening into a FOX layer serving as the intended isolation structure.    
     
     
         14 . The method of    claim 13   , wherein the adhesive layer is a pad oxide layer.  
     
     
         15 . The method of    claim 13   , wherein the adhesive layer is formed to a thickness of from about 200 Å to 400 Å.  
     
     
         16 . The method of    claim 13   , wherein the etch-end layer is formed from silicon oxide.  
     
     
         17 . The method of    claim 13   , wherein, through the selective etching process the remaining thickness of the part of the adhesive layer at the bottom of the opening is about 100 Å.