Reaction force isolation system for a planar motor

Abstract

The present invention provides a structure for isolating the reaction forces generated by a planar motor. Specifically, the fixed portion of the reaction motor, which is subject to reaction forces, is structurally isolated from the rest of the system in which the planar motor is deployed. In accordance with one embodiment of the present invention, the fixed portion of the planar motor is separated from the rest of the system and coupled to ground. The rest of the system is isolated from ground by deploying vibration isolation means. Alternatively or in addition, the fixed portion of the planar motor may be structured to move (e.g., on bearings) in the presence of reaction forces, so as to absorb the reaction forces with its inertia. In a further embodiment of the present invention, the fixed portion of the planar motor and the article to be moved are supported by the same frame, with the fixed portion of the planar motor movable on bearings.

1 . A stage device, comprising: 
 a planar motor which has a fixed portion and a moving portion, wherein said moving portion supports an article for movement in a plane of the planar motor; and    a vibration isolation structure structured and configured to isolate vibration induced by a reaction force between said moving portion and said fixed portion.    
     
     
         2 . A stage device according to    claim 1   , wherein said moving portion is supported on a stationary support, and said vibration isolation structure includes a structure in which said fixed portion is structurally independent of said stationary support.  
     
     
         3 . A stage device according to    claim 2   , wherein said fixed portion is supported on a bearing.  
     
     
         4 . A stage device according to    claim 3   , wherein said bearing comprises an air bearing and/or a ball bearing.  
     
     
         5 . A stage device according to    claim 2   , wherein said vibration isolation structure further comprises a vibration isolation device that supports said stationary support.  
     
     
         6 . A stage device according to    claim 5   , wherein said vibration isolation device includes an air damper and/or an actuator.  
     
     
         7 . A stage device according to    claim 2   , wherein said stationary support comprises a top plate on which the moving portion is supported for movement and a base, and said fixed portion is located between said top plate and said base.  
     
     
         8 . A stage device according to    claim 7   , wherein said fixed portion includes a coil array.  
     
     
         9 . A stage device according to    claim 7   , wherein said top surface is made of a non-magnetic material.  
     
     
         10 . A stage device according to    claim 7   , wherein the stationary support further comprises a support structure between said top plate and said base for keeping said top plate from bending.  
     
     
         11 . A stage device according to    claim 2   , wherein said moving portion moves on a bearing surface.  
     
     
         12 . A stage device according to    claim 11   , wherein said bearing surface includes an air bearing.  
     
     
         13 . A stage device according to    claim 2   , further comprising a control device for controlling the positions of said moving portion at least in two directions.  
     
     
         14 . A stage device according to    claim 13   , wherein said fixed portion includes a coil array, and said control device includes a driver unit for supplying a current to said coil array to move the moving portion.  
     
     
         15 . A stage device according to    claim 13   , further comprising at least two interferometers, wherein said control devise controls the positions of said moving portion based in part on the outputs of said interferometers.  
     
     
         16 . A stage device according to    claim 13   , further comprising at least three interferometers, wherein said control device controls the X, Y and θ positions of said movable stage based in part on the outputs of said interferometers.  
     
     
         17 . A stage device according to    claim 1   , wherein said moving portion includes a permanent magnet.  
     
     
         18 . A stage device according to    claim 2   , wherein said stationary support includes a platform on which the moving portion is supported for movement and a frame that supports said platform, and wherein said fixed portion is located beneath said platform.  
     
     
         19 . A stage device according to    claim 18   , wherein said frame is supported on a damping device.  
     
     
         20 . A stage device according to    claim 19   , wherein said damping device comprises an actuation means for maintaining the frame level against any changes induced by a change in center of gravity.  
     
     
         21 . A stage device according to    claim 1   , wherein said fixed portion and said moving portion are supported by a same frame, and wherein the fixed portion is supported on a bearing.  
     
     
         22 . A stage device according to    claim 21   , wherein said frame is supported on a damping device.  
     
     
         23 . A stage device according to    claim 21   , wherein the moving portion comprises a leveling stage for leveling said article.  
     
     
         24 . A stage device according to    claim 21   , wherein the frame comprises a platform on which the fixed portion is supported, and means for cooling said platform.  
     
     
         25 . A stage device according to    claim 1   , wherein said fixed portion comprises a first magnetic portion and a second magnetic portion spaced apart to define a space in which said moving portion moves laterally.  
     
     
         26 . A stage device according to    claim 25   , wherein said vibration isolation structure comprises a bearing system that supports said second magnetic portion for lateral movement in reaction to movement of said moving portion.  
     
     
         27 . A stage device according to    claim 26   , wherein said first magnetic portion and second magnetic portion form a rigid structure resting on the bearing system.  
     
     
         28 . A stage device according to    claim 27   , wherein at least one of said first magnetic portion and second magnetic portion comprises a magnetic coil array for effecting movement of the moving portion in said space.  
     
     
         29 . A stage device according to    claim 25   , wherein said fixed portion is fixedly supported, and said vibration isolation structure comprises a structure in which said fixed portion is structurally independent of an external support structure.  
     
     
         30 . A stage device according to    claim 29   , wherein said vibration isolation structure comprises a damper to damp the vibration to said external support structure induced by said reaction force interaction between said moving portion and said fixed portion.  
     
     
         31 . An exposure apparatus, comprising: 
 an optical system for imaging a mask pattern onto an article;    a stage device for precise positioning of the article for imaging, said stage device comprising: 
 a planar motor which has a fixed portion and a moving portion, wherein said moving portion supports said article for movement in a plane of the planar motor; and  
 a vibration isolation structure structured and configured to isolate vibration that is induced by a reaction force between said moving portion and said fixed portion.  
   
     
     
         32 . An exposure apparatus according to    claim 31   , further comprising means for scanning said mask pattern in synchronization with movement of said article.  
     
     
         33 . An exposure apparatus according to    claim 32   , wherein said mask pattern is a circuit pattern for a semiconductor device and wherein said article to be exposed is a wafer.  
     
     
         34 . An exposure apparatus according to    claim 31   , wherein said fixed portion comprises a first magnetic portion and a second magnetic portion spaced apart to define a space in which said moving portion moves laterally.  
     
     
         35 . An exposure apparatus according to    claim 34   , wherein said vibration isolation structure comprises a bearing system that supports said fixed portion for lateral movement in reaction to movement of said moving portion.  
     
     
         36 . An exposure apparatus according to    claim 35   , wherein said bearing system is supported by a frame structure that supports said optical system in relation to said article.  
     
     
         37 . An exposure apparatus according to    claim 34   , wherein said optical system is supported on a frame structure, said fixed portion is fixedly supported, and said vibration isolation structure comprises a structure in which said frame structure is structurally independent of said fixed portion.  
     
     
         38 . A method of controlling reaction force induced vibration in a stage device, comprising the steps of: 
 providing a planar motor which has a fixed portion and a moving portion;    supporting an article on said moving portion for movement in a plane of the planar motor; and    providing a vibration isolation structure that is structured and configured to isolate vibration induced by a reaction force between said moving portion and said fixed portion.