Substrate processing method and apparatus

Abstract

Disclosed herein is a method for processing a substrate. The method includes supplying a liquid agent such as a developer onto the surface of a substrate, bringing an upper surface of a film formed of the liquid agent into contact with a liquid agent holding member arranged so as to face the substrate, holding the liquid agent between the substrate and the liquid agent holding member, moving the substrate or the liquid agent holding member, or both, in parallel to the main surface of the substrate, while the main surface of the substrate is being treated with the liquid agent. Since the concentrations of reaction products and starting reaction materials become uniform in the liquid agent which contacts the substrate, the entire substrate can be processed uniformly.

1 . A substrate processing method comprising: 
 a first step of supplying a liquid agent onto a main surface of a substrate;    a second step of holding the liquid agent between the substrate and a liquid agent holding member by bringing an upper surface of a film of the liquid agent in contact with the liquid agent holding member which faces the substrate; and    a third step of moving at least one element of the substrate and the liquid agent holding member in parallel to the main surface of the substrate, after the second step, in order to treat uniformly the main surface of the substrate with the liquid agent.    
     
     
         2 . The substrate processing method according to    claim 1   , wherein the second step includes a step of using a liquid agent supply nozzle as the liquid agent holding member.  
     
     
         3 . The substrate processing method according to    claim 1   , wherein the first step includes a step of applying the liquid agent, by use of a disc nozzle with plural liquid agent outlet holes or by use of a linear nozzle which has a linear developer supply section whose length is almost the same as a diameter of the wafer, while rotating the substrate or moving the linear nozzle from one end of the substrate to the other in parallel to the main surface of the substrate which is at a sandstill.  
     
     
         4 . The substrate processing method according to    claim 1   , wherein the second step includes a step of moving the liquid agent holding member so as to face the substrate and bringing the liquid agent holding member in contact with an upper surface of the film of the liquid agent.  
     
     
         5 . The substrate processing method according to    claim 1   , wherein the third step includes a step of performing reciprocating movement or rotational movement.  
     
     
         6 . The substrate processing method according to    claim 5   , wherein the rotational movement includes rotating the substrate while the liquid agent holding member is immobilized.  
     
     
         7 . The substrate processing method according to    claim 1   , wherein the velocity of the rotational movement is 10 to 50 rpm.  
     
     
         8 . The substrate processing method according to    claim 1   , wherein the first step includes a step of forming a single liquid-agent film on a surface of the liquid agent supply nozzle facing the substrate, supplying the liquid agent to the main surface of the substrate in the form of film, and using the liquid agent supply nozzle as the liquid agent holding member.  
     
     
         9 . The substrate processing method according to    claim 8   , wherein the first step includes a step of supplying the liquid agent to an entire surface of the substrate almost simultaneously.  
     
     
         10 . The substrate processing method according to    claim 8   , wherein the first step includes a step of supplying the liquid agent onto the main surface of the substrate while a substrate surface facing the liquid agent supply nozzle remains in a convex form.  
     
     
         11 . The substrate processing method according to    claim 3   , wherein the first step includes a step of supplying the liquid agent by using the liquid agent supply nozzle having the surface made in a convex form.  
     
     
         12 . The substrate processing method according to    claim 1   , wherein the first step includes a step of supplying the liquid agent while reducing pressure in a space provided between the substrate and the liquid agent supply nozzle.  
     
     
         13 . The substrate processing method according to    claim 1   , wherein the liquid agent is one selected from the group consisting of a developer, an etching solution, a washing solution, a remover agent, a film formation solution and a plating liquid.  
     
     
         14 . The substrate processing method according to    claim 1   , further comprising a step of rinsing the liquid agent holding member simultaneously with the main surface of the substrate by replacing the liquid agent with a rinse solution after the third step.  
     
     
         15 . A substrate processing apparatus comprising: 
 a table on which a substrate is to be mounted;    a liquid agent supply nozzle for supplying a liquid agent onto a main surface of the substrate;    a liquid agent holding member facing the substrate and movable up and down in order to be in contact with an upper surface of the film-form liquid agent; and    a mechanism for moving at least one element of the substrate and the liquid agent holding member in parallel to the main surface of the substrate while the liquid agent holding member is in contact with the upper surface of the film-form liquid agent.    
     
     
         16 . The substrate processing apparatus according to    claim 15   , wherein the liquid agent supply nozzle serves also as the liquid agent holding member.  
     
     
         17 . The substrate processing apparatus according to    claim 15   , wherein the mechanism includes a reciprocating drive mechanism or a rotational drive mechanism.  
     
     
         18 . The substrate processing apparatus according to    claim 15   , wherein the liquid agent supply nozzle has a plurality of liquid agent outlet holes in a surface facing the substrate, any two of the liquid agent outlet holes adjacent to each other in a moving direction of the substrate passing through different regions of the substrate when the nozzle moves relative to the substrate.  
     
     
         19 . The substrate processing apparatus according to    claim 15   , wherein the liquid agent supply nozzle has a plurality of liquid agent outlet holes in a surface facing the substrate, the liquid agent outlet holes being uniformly distributed in a plane facing the substrate.