Article, method, and apparatus for electrochemical fabrication

Abstract

An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ion onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. Electroplating articles and electroplating apparatus are also disclosed.

What is claimed is:  
     
         1 . An electrodepositing article comprising: 
 a) a substrate having a first major surface; and    b) a conformable mask disposed in a pattern on said first major surface of said substrate, said article being capable of electroplating a pattern of metal complementary to said pattern of said conformable mask onto an electrode when said article is placed in contact with the electrode in the presence of a metal ion source and subjected to an electric field.    
     
     
         2 . A method for manufacturing an electroplating article, said method comprising: 
 a) applying a conformable mask to an article comprising a first substrate and a patterned resist disposed on said first substrate;    b) contacting a second substrate to said conformable mask such that said conformable mask obtains a pattern complementary to said pattern of said resist;    c) separating said first substrate from said conformable mask, said conformable mask remaining adhered to said article; and    d) removing said resist, said article being capable of electroplating a pattern of metal corresponding to the complement of said pattern of said conformable mask onto an electrode when said article is placed in contact with the electrode in the presence of an electrolyte solution and subjected to an electric field.    
     
     
         3 . A method for manufacturing an electrodepositing article, said method comprising: 
 a) providing a porous medium having a first surface;    b) treating said porous medium to create one or more nonporous regions;    c) applying a film to said first surface of said porous medium;    d) patterning said film to create a patterned mask; and    e) removing at least a portion of said one or more nonporous regions, said article being capable of electroplating a pattern of metal corresponding to the complement of said pattern of said conformable mask onto an electrode when said article is placed in contact with the electrode in the presence of an electrolyte solution and subjected to an electric field.