Digital optical chemistry micromirror imager

Abstract

An apparatus and method for catalyzing a reaction on a substrate ( 24 ) comprising, a light source ( 12 ), a micromirror ( 16 ) positioned to redirect light ( 14 ) from the light source ( 12 ) toward a substrate ( 24 ) wherein the redirected light ( 14 ) catalyzes a chemical reaction proximate a substrate ( 24 ), is disclosed. A computer ( 18 ) is connected to, and controls, the positioning of mirrors within the micromirror ( 16 ) to specifically redirect light to specific portions of a substrate. The substrate ( 24 ) can be placed in a reaction chamber ( 50 ), wherein the light ( 14 ) that is redirected by the micromirror ( 16 ) catalyzes a chemical reaction proximate a substrate ( 24 ).

What is claimed is:  
     
         1 . An apparatus for catalyzing a reaction on a substrate comprising: 
 a light source;    a micromirror positioned to redirect light from said light source toward said substrate;    a computer connected to, and controlling, said micromirror; and    a reaction chamber is placed in the path of light redirected by said micromirror, wherein light that is redirected by said micromirror catalyzes a chemical reaction proximate said substrate in said reaction chamber.    
     
     
         2 . The apparatus of    claim 1    wherein said light source is a UV light.  
     
     
         3 . The apparatus of    claim 1    wherein said light source produces visible light.  
     
     
         4 . The apparatus of    claim 1    further comprising a lens between said micromirror and said substrate.  
     
     
         5 . The apparatus of    claim 4    wherein said lens id further defined as a lens system, and wherein said lens system can change the magnification of light reflected by said micromirror.  
     
     
         6 . The apparatus of    claim 1    wherein said micromirror is further defined as a micromirror array.  
     
     
         7 . The apparatus of    claim 1    further comprising a diffusion lens between said light source and said micromirror.  
     
     
         8 . The apparatus of    claim 1    wherein said light interacts with a novolak resin proximate said substrate to produce a photoresist pattern.  
     
     
         9 . The apparatus of    claim 1    wherein said light catalyzes the synthesis of a nucleotide base proximate said substrate.  
     
     
         10 . The apparatus of    claim 1    wherein said light catalyzes the synthesis of an amino acid residue proximate said substrate.  
     
     
         11 . The apparatus of    claim 1    wherein said light catalyzes a reaction involving a molecule proximate said substrate.  
     
     
         12 . The apparatus of    claim 1    wherein said light crosslinks a molecule proximate said substrate.  
     
     
         13 . The apparatus of    claim 1    further comprising: 
 a reaction chamber disposed about said substrate;  
 one or more reactant lines connected to said reaction chamber;  
 one or more reaction chemicals connected to said reactant lines; and  
 a computer connected to, and controlling, the supply of said one or more reaction chemicals to said reaction chamber via said reactant lines.  
 
     
     
         14 . The apparatus of    claim 13    wherein said one or more of said reaction chemicals is involved in a chemical reaction when exposed to light.  
     
     
         15 . An apparatus for catalyzing a reaction on a substrate comprising: 
 a light source;    a micromirror positioned to redirect light from said light source toward said substrate;    a reaction chamber disposed about said substrate;    one or more reactant lines connected to said reaction chamber;    one or more reaction chemicals connected to said reactant lines; and    a computer connected to, and controlling, said micromirror and the supply of said one or more reaction chemicals to said reaction chamber via said reactant lines, wherein a light catalyzable reaction occurs proximate to the site where light produced by said light source and redirected by said micromirror strikes said substrate.    
     
     
         16 . The apparatus of    claim 15    wherein said light source is a UV light.  
     
     
         17 . The apparatus of    claim 15    wherein said light source produces visible light.  
     
     
         18 . The apparatus of    claim 15    wherein said light source is a xenon lamp, or a mercury lamp, or a laser or a combination thereof.  
     
     
         19 . The apparatus of    claim 15    further a lens system comprising: 
 a diffusion lens between said light source and said micromirror; and  
 a lens between said micromirror and said substrate.  
 
     
     
         20 . The apparatus of    claim 15    wherein said micromirror is further defined as a micromirror array.  
     
     
         21 . The apparatus of    claim 15    wherein said light interacts with a novolak resin proximate said substrate to produce a photoresist pattern.  
     
     
         22 . The apparatus of    claim 15    wherein said light catalyzes the synthesis of a nucleotide base proximate said substrate.  
     
     
         23 . The apparatus of    claim 15    wherein said light catalyzes the synthesis of an amino acid residue proximate said substrate.  
     
     
         24 . The apparatus of    claim 15    wherein said light catalyzes a reaction involving a molecule proximate said substrate.  
     
     
         25 . The apparatus of    claim 15    wherein said light crosslinks a molecule proximate said substrate.  
     
     
         26 . The apparatus of    claim 15    further comprising a total internal reflection mirror disposed in a position to redirect light from said light source into said micromirror and from said micromirror array toward said substrate.  
     
     
         27 . The apparatus of    claim 15    wherein said substrate is mounted on a movable platform that can be controlled via a computer to allow for multiple repetitive exposures of said substrate to light reflected by said micromirror.  
     
     
         28 . A method of patterning on a substrate comprising the steps of: 
 generating a light beam;    illuminating a micromirror with said light beam;    redirecting said light beam with said micromirror onto a substrate; and    catalyzing a light sensitive reaction proximate to the surface of said substrate using said redirected light beam in a predetermined pattern.    
     
     
         29 . The method of    claim 28    further comprising the step of controlling, using a computer, said micromirror.  
     
     
         30 . The method of    claim 28    wherein said step of redirecting said light beam is accomplished using a micromirror array.  
     
     
         31 . The method of    claim 28    wherein said illuminating light beam is further defined as a UV light.  
     
     
         32 . The method of    claim 28   , further comprising the step of: 
 obtaining a substrate; and    depositing a novolak resin on said substrate prior to redirecting said a light beam to pattern said photoresist.    
     
     
         33 . The method of    claim 28   , wherein said step of catalyzing a light sensitive reaction proximate to the surface of said substrate is further defined as patterning a photoresist disposed proximate said substrate.  
     
     
         34 . The method of    claim 28   , further comprising the steps of: 
 positioning said substrate with a reaction chamber;    flooding said substrate with a light catalyzable reaction chemical; and    exposing said light catalyzable reaction chemical to light using said micromirror to catalyze a chemical reaction at the site where light strikes said substrate.    
     
     
         35 . The method of    claim 28    wherein said step of catalyzing a light sensitive reaction proximate to the surface of said substrate is further defined as the synthesis of a nucleotide base proximate said substrate.  
     
     
         36 . The method of    claim 28    wherein said step of catalyzing a light sensitive reaction proximate to the surface of said substrate is further defined as the synthesis of an amino acid residue proximate said substrate.  
     
     
         37 . The method of    claim 28    wherein said step of catalyzing a light sensitive reaction proximate to the surface of said substrate is further defined as involving a molecule proximate said substrate.  
     
     
         38 . The method of    claim 28    wherein said step of catalyzing a light sensitive reaction proximate to the surface of said substrate is further defined as crosslinking a molecule proximate said substrate.