Method and device for ascertaining dynamic parameters of a MEMS apparatus, and MEMS apparatus

Abstract

A method for ascertaining at least one dynamic parameter of a MEMS apparatus, which has at least one movable component, and the at least one dynamic parameter describes a dynamic property of the at least one movable component. A test signal which has at least one static excitation of constant amplitude is applied to the MEMS apparatus, and a response signal of the MEMS apparatus to the test signal is detected. At least one static parameter of the MEMS apparatus is ascertained by evaluating the response signal in respect of the at least one static excitation, using a model of at least the movable component of the MEMS apparatus, the at least one static parameter describing a geometric and/or structural property of the at least one movable component. The at least one dynamic parameter of the MEMS apparatus is calculated based on the ascertained at least one static parameter.

The invention claimed is: 
     
         1 . A method for ascertaining at least one dynamic parameter of a microelectromechanical (MEMS) apparatus, the MEMS apparatus having at least one movable component, and wherein the at least one dynamic parameter describes a dynamic property of the at least one movable component, the method comprising the following steps:
 applying a test signal to the MEMS apparatus, the test signal having at least one static excitation of constant amplitude, and detecting a response signal of the MEMS apparatus to the test signal;   ascertaining at least one static parameter of the MEMS apparatus by evaluating the response signal in respect of the at least one static excitation using a model of at least the movable component of the MEMS apparatus, the at least one static parameter describing a geometric and/or structural property of the at least one movable component; and   calculating the at least one dynamic parameter of the MEMS apparatus using the ascertained at least one static parameter.   
     
     
         2 . The method according to  claim 1 , wherein the test signal includes a plurality of constant amplitude static excitations, and wherein at least one further dynamic parameter of the MEMS apparatus is ascertained by evaluating the response signal in respect of a transient behavior between two static excitations. 
     
     
         3 . The method according to  claim 2 , wherein the at least one further dynamic parameter includes a damping coefficient of the movable component of the MEMS apparatus. 
     
     
         4 . The method according to  claim 1 , wherein the calculating the at least one dynamic parameter includes ascertaining a mass of the movable component of the MEMS apparatus, ascertaining a spring constant of the movable component of the MEMS apparatus, and calculating a natural frequency of the movable component as a dynamic parameter of the MEMS apparatus based on the mass and the spring constant. 
     
     
         5 . The method according to  claim 1 , wherein the model of at least the movable component of the MEMS apparatus includes a refined structural-mechanical description. 
     
     
         6 . The method according to  claim 1 , wherein the ascertaining of the at least one static parameter is performed using at least one force balance equation. 
     
     
         7 . The method according to  claim 1 , wherein the at least one static parameter includes a geometric structural property of the movable component of the MEMS apparatus. 
     
     
         8 . A device for ascertaining at least one dynamic parameter of a microelectromechanical (MEMS) apparatus, the MEMS apparatus including at least one movable component, and wherein the at least one dynamic parameter describes a dynamic property of the at least one movable component, the device comprising:
 a testing device configured to apply a test signal to the MEMS apparatus, the test signal having at least one static excitation of constant amplitude, and wherein the testing device is further configured to receive a response signal of the MEMS apparatus to the test signal; and   an evaluation device configured to ascertain at least one static parameter of the MEMS apparatus by evaluating the response signal in respect of the at least one static excitation, using a model of at least the movable component of the MEMS apparatus, wherein the at least one static parameter describes a geometric and/or structural property of the at least one movable component, wherein the evaluation device is further configured to calculate the at least one dynamic parameter of the MEMS apparatus based on the ascertained at least one static parameter.   
     
     
         9 . The device according to  claim 8 , wherein the test signal includes a plurality of static excitations of constant amplitude, and wherein the evaluation device is further configured to ascertain at least one further dynamic parameter of the MEMS apparatus by evaluating the response signal in respect of a transient behavior between two static excitations. 
     
     
         10 . A system comprising:
 a microelectromechanical (MEMS) apparatus having at least one movable component; and   a device for ascertaining at least one dynamic parameter of the MEMS apparatus, wherein the at least one dynamic parameter describes a dynamic property of the at least one movable component, the device including:
 a testing device configured to apply a test signal to the MEMS apparatus, the test signal having at least one static excitation of constant amplitude, and wherein the testing device is further configured to receive a response signal of the MEMS apparatus to the test signal; and 
 an evaluation device configured to ascertain at least one static parameter of the MEMS apparatus by evaluating the response signal in respect of the at least one static excitation, using a model of at least the movable component of the MEMS apparatus, wherein the at least one static parameter describes a geometric and/or structural property of the at least one movable component, wherein the evaluation device is further configured to calculate the at least one dynamic parameter of the MEMS apparatus based on the ascertained at least one static parameter.