Imprint apparatus and article manufacturing method

Abstract

The imprint apparatus according to the present invention includes a mold holding unit configured to be movable with holding a mold, a moving body configured to be movable with holding a substrate, a detecting unit configured to detect a position of mold-side marks formed in a pattern region of the mold and a position of substrate-side marks formed in a shot region on the substrate, a measuring unit configured to measure a relative position between the mold holding unit and the moving body, and a controller configured to control a movement of the moving body based on a result of the detection by the detecting unit when an imprint process is performed in a normal shot region, and to control the movement of the moving body based on a result of the measurement by the measuring unit when the imprint process is performed in a deficient shot region.

What is claimed is: 
     
       1. An imprint apparatus comprising:
 a mold holding unit configured to be movable with holding a mold; 
 a moving body configured to be movable with holding a substrate; 
 a detecting unit configured to detect a position of a mold-side mark formed in a pattern region of the mold and a position of a substrate-side mark formed in a shot region on the substrate; 
 a first measuring unit configured to perform a first measurement of measuring a relative position between the mold holding unit and the moving body; and 
 a controller configured to be able to perform a control of the detection by the detecting unit, a control of the first measurement by the first measuring unit, a first control of controlling a movement of the moving body based on a result of the detection by the detecting unit, and a second control of controlling the movement of the moving body based on a result of the first measurement by the first measuring unit, 
 wherein a normal shot region in which the substrate-side mark used in the first control is formed and a deficient shot region in which the substrate-side mark used in the first control is not formed are provided on the substrate, and 
 wherein the controller is configured to perform the first control when an imprint process is performed in the normal shot region, and to perform the second control when the imprint process is performed in the deficient shot region. 
 
     
     
       2. The imprint apparatus according to  claim 1 , wherein the first measuring unit is configured to be able to perform the first measurement when a predetermined shot region among the deficient shot region and the normal shot region is moved to a position where the imprint process can be performed. 
     
     
       3. The imprint apparatus according to  claim 2 , wherein the controller is configured to:
 cause the first measuring unit to perform the first measurement when the imprint process is performed in a predetermined normal shot region, and 
 cause the first measuring unit to perform the first measurement, and then control the movement of the moving body based on a result of the first measurement for each of the predetermined normal shot region and the deficient shot region when the imprint process is performed in the deficient shot region. 
 
     
     
       4. The imprint apparatus according to  claim 1 ,
 wherein the mold holding unit includes a movable portion configured to be movable with holding the mold, and a fixed portion to which a driving unit for driving the movable portion is fixed, and 
 wherein the first measuring unit is configured to measure a relative position between the fixed portion and the moving body in the first measurement. 
 
     
     
       5. The imprint apparatus according to  claim 1 , wherein the first measuring unit is configured to perform a second measurement of measuring a relative position between the mold holding unit and the mold. 
     
     
       6. The imprint apparatus according to  claim 5 ,
 wherein the mold holding unit includes a movable portion configured to be movable with holding the mold, and a fixed portion to which a driving unit for driving the movable portion is fixed, and 
 wherein the first measuring unit is configured to measure a relative position between the movable portion and the mold in the second measurement. 
 
     
     
       7. The imprint apparatus according to  claim 5 , wherein the controller is configured to calculate a relative position between the mold and the moving body based on results of the first measurement and the second measurement, and then to control the movement of the moving body based on the calculation result in the second control. 
     
     
       8. The imprint apparatus according to  claim 1 ,
 wherein the mold holding unit includes a movable portion configured to be movable with holding the mold, and a fixed portion to which a driving unit for driving the movable portion is fixed, and 
 wherein the first measuring unit is configured to perform a third measurement of measuring a relative position between the movable portion and the fixed portion. 
 
     
     
       9. The imprint apparatus according to  claim 8 ,
 wherein the first measuring unit is configured to measure a relative position between the fixed portion and the moving body in the first measurement, and 
 wherein the controller is configured to calculate a relative position between the movable portion and the moving body based on results of the first measurement and the third measurement, and then to control the movement of the moving body based on the calculation result in the second control. 
 
     
     
       10. The imprint apparatus according to  claim 8 ,
 wherein the first measuring unit is configured to perform a second measurement of measuring a relative position between the movable portion and the mold, and 
 wherein the controller is configured to calculate a relative position between the mold and the moving body based on results of the first measurement, the second measurement and the third measurement, and then to control the movement of the moving body based on the calculation result in the second control. 
 
     
     
       11. The imprint apparatus according to  claim 1 , further comprising a second measuring unit configured to perform a fourth measurement of measuring a relative position between the moving body and a reference member. 
     
     
       12. The imprint apparatus according to  claim 11 , wherein the controller is configured to control the movement of the moving body based on a result of the detection and a result of the fourth measurement in the first control. 
     
     
       13. The imprint apparatus according to  claim 12 ,
 wherein the first measuring unit is configured to be able to perform the first measurement when a predetermined shot region among the deficient shot region and the normal shot region is moved to a position where the imprint process can be performed, and 
 wherein the controller is configured to:
 cause the first measuring unit to perform the first measurement when the imprint process is performed in a predetermined normal shot region, and 
 cause the first measuring unit to perform the first measurement, and then control the movement of the moving body based on a result of the first measurement for each of the predetermined normal shot region and the deficient shot region, and a result of the fourth measurement when the imprint process is performed in the deficient shot region. 
 
 
     
     
       14. The imprint apparatus according to  claim 12 ,
 wherein the first measuring unit is configured to be able to perform the first measurement when a predetermined shot region among the deficient shot region and the normal shot region is moved to a position where the imprint process can be performed, and 
 wherein the controller is configured to:
 cause the first measuring unit to perform the first measurement when the imprint process is performed in a predetermined normal shot region, and 
 cause the first measuring unit to perform the first measurement, and then control the movement of the moving body based on a result of the first measurement for each of the predetermined normal shot region and the deficient shot region when the imprint process is performed in the deficient shot region. 
 
 
     
     
       15. An article manufacturing method for manufacturing an article from a processed substrate, the article manufacturing method comprising:
 a step of forming a pattern of an imprint material on a substrate using a mold by using the imprint apparatus according to  claim 1 ; and 
 a step of processing the substrate on which the pattern is formed. 
 
     
     
       16. A method for controlling a movement of a moving body in an imprint apparatus including a mold holding unit configured to be movable with holding a mold, the moving body configured to be movable with holding a substrate, a detecting unit configured to detect a position of a mold-side mark formed in a pattern region of the mold and a position of a substrate-side mark formed in a shot region on the substrate, a first measuring unit configured to perform a first measurement of measuring a relative position between the mold holding unit and the moving body, and a controller configured to be able to perform a control of the detection by the detecting unit, a control of the first measurement by the first measuring unit, a first control of controlling the movement of the moving body based on a result of the detection by the detecting unit, and a second control of controlling the movement of the moving body based on a result of the first measurement by the first measuring unit, a normal shot region in which the substrate-side mark used in the first control is formed and a deficient shot region in which the substrate-side mark used in the first control is not formed being provided on the substrate, the method comprising:
 a first controlling step of performing the first control when an imprint process is performed on the normal shot region; and 
 a second controlling step of performing the second control when the imprint process is performed on the deficient shot region. 
 
     
     
       17. The method according to  claim 16 , wherein the first measuring unit is configured to be able to perform the first measurement when a predetermined shot region among the deficient shot region and the normal shot region is moved to a position where the imprint process can be performed. 
     
     
       18. The method according to  claim 17 ,
 wherein the first controlling step includes a step of controlling the first measurement when the imprint process is performed on a predetermined normal shot region, and 
 wherein the second controlling step includes a step of controlling the first measurement, and then controlling the movement of the moving body based on a result of the first measurement for each of the predetermined normal shot region and the deficient shot region when the imprint process is performed in the deficient shot region. 
 
     
     
       19. The method according to  claim 16 ,
 wherein the mold holding unit includes a movable portion configured to be movable with holding the mold, and a fixed portion to which a driving unit for driving the movable portion is fixed, and 
 wherein the first measuring unit is configured to measure a relative position between the fixed portion and the moving body in the first measurement. 
 
     
     
       20. The method according to  claim 16 , wherein the first measuring unit is configured to perform a second measurement of measuring a relative position between the mold holding unit and the mold. 
     
     
       21. The method according to  claim 20 ,
 wherein the mold holding unit includes a movable portion configured to be movable with holding the mold, and a fixed portion to which a driving unit for driving the movable portion is fixed, and 
 wherein the first measuring unit is configured to measure a relative position between the movable portion and the mold in the second measurement. 
 
     
     
       22. The method according to  claim 20 , wherein the controller is configured to calculate a relative position between the mold and the moving body based on results of the first measurement and the second measurement, and then to control the movement of the moving body based on the calculation result in the second control. 
     
     
       23. The method according to  claim 16 ,
 wherein the mold holding unit includes a movable portion configured to be movable with holding the mold, and a fixed portion to which a driving unit for driving the movable portion is fixed, and 
 wherein the first measuring unit is configured to perform a third measurement of measuring a relative position between the movable portion and the fixed portion. 
 
     
     
       24. The method according to  claim 23 ,
 wherein the first measuring unit is configured to measure a relative position between the fixed portion and the moving body in the first measurement, and 
 wherein the controller is configured to calculate a relative position between the movable portion and the moving body based on results of the first measurement and the third measurement, and then to control the movement of the moving body based on the calculation result in the second control. 
 
     
     
       25. The method according to  claim 23 ,
 wherein the first measuring unit is configured to perform a second measurement of measuring a relative position between the movable portion and the mold, and 
 wherein the controller is configured to calculate a relative position between the mold and the moving body based on results of the first measurement, the second measurement and the third measurement, and then to control the movement of the moving body based on the calculation result in the second control. 
 
     
     
       26. The method according to  claim 16 , wherein the imprint apparatus further includes a second measuring unit configured to perform a fourth measurement of measuring a relative position between the moving body and a reference member. 
     
     
       27. The method according to  claim 26 , wherein the first controlling step includes a step of controlling the movement of the moving body based on a result of the detection and a result of the fourth measurement when the imprint process is performed on the normal shot region. 
     
     
       28. The method according to  claim 27 ,
 wherein the first measuring unit is configured to be able to perform the first measurement when a predetermined shot region among the deficient shot region and the normal shot region is moved to a position where the imprint process can be performed, 
 wherein the first controlling step includes a step of controlling the first measurement when the imprint process is performed on a predetermined normal shot region, and 
 wherein the second controlling step includes a step of controlling the first measurement, and then controlling the movement of the moving body based on a result of the first measurement for each of the predetermined normal shot region and the deficient shot region, and a result of the fourth measurement when the imprint process is performed in the deficient shot region. 
 
     
     
       29. The method according to  claim 27 ,
 wherein the first measuring unit is configured to be able to perform the first measurement when a predetermined shot region among the deficient shot region and the normal shot region is moved to a position where the imprint process can be performed, 
 wherein the first controlling step includes a step of controlling the first measurement when the imprint process is performed on a predetermined normal shot region, and 
 wherein the second controlling step includes a step of controlling the first measurement, and then controlling the movement of the moving body based on a result of the first measurement for each of the predetermined normal shot region and the deficient shot region when the imprint process is performed in the deficient shot region.