Positioning method

Abstract

A positioning method includes detecting coordinates (X 11 , Y 11 ) of a rotation center on a surface of a holding table with a first image capturing unit and stores the detected coordinates as a new first reference position, detecting coordinates (X 21 , Y 21 ) of a rotation center on another surface of the holding table with a second image capturing unit and stores the detected coordinates as a new second reference position, calculating a first deviation between a previous rotation center on the surface of the holding table and the coordinates (X 11 , Y 11 ), calculating a second deviation between a previous rotation center on the other surface of the holding table and the coordinates (X 21 , Y 21 ), correcting a coordinate system of images captured by the first image capturing unit to eliminate the first deviation, and correcting a coordinate system of images captured by the second image capturing unit to eliminate the second deviation.

What is claimed is: 
     
       1. A positioning method of positioning a reference position of a first image capturing unit and a reference position of a second image capturing unit with respect to each other in a processing apparatus,
 the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, the first image capturing unit disposed on the side of a surface of the holding table, and the second image capturing unit disposed on the side of another surface of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane, 
 the positioning method comprising: 
 a first storing step of detecting coordinates (X 10 , Y 10 ) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a first reference position; 
 a second storing step of detecting coordinates (X 20 , Y 20 ) of a rotation center on the side of the other surface of the holding table, the coordinates (X 20 , Y 20 ) corresponding to the coordinates (X 10 , Y 10 ) on the XY plane, with the second image capturing unit and storing the detected coordinates as a second reference position; 
 after the first storing step and the second storing step, a third storing step of detecting coordinates (X 11 , Y 11 ) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a new first reference position; 
 after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X 21 , Y 21 ) of a rotation center on the side of the other surface of the holding table with the second image capturing unit and storing the detected coordinates as a new second reference position; 
 after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between the coordinates (X 10 , Y 10 ) and the coordinates (X 11 , Y 11 ); 
 after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between the coordinates (X 20 , Y 20 ) and the coordinates (X 21 , Y 21 ); 
 a first correcting step of correcting a coordinate system of images captured by the first image capturing unit, in order to eliminate the first deviation; and 
 a second correcting step of correcting a coordinate system of images captured by the second image capturing unit, in order to eliminate the second deviation. 
 
     
     
       2. A positioning method of positioning a reference position of a first image capturing unit and a reference position of a second image capturing unit with respect to each other in a processing apparatus,
 the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, the first image capturing unit disposed on the side of a surface of the holding table, and the second image capturing unit disposed on the side of another surface of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane, 
 the positioning method comprising: 
 a third storing step of detecting coordinates (X 11 , Y 11 ) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a new first reference position; 
 a fourth storing step of detecting coordinates (X 21 , Y 21 ) of a rotation center on the side of the other surface of the holding table with the second image capturing unit and storing the detected coordinates as a new second reference position; 
 after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between coordinates (X 10 , Y 10 ) of a rotation center on the side of the surface of the holding table that have been detected with the first image capturing unit and stored in advance as a first reference position in the processing apparatus and the coordinates (X 11 , Y 11 ); 
 after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between coordinates (X 20 , Y 20 ) of a rotation center on the side of the other surface of the holding table that have been detected with the second image capturing unit and stored in advance as a second reference position in the processing apparatus, the coordinates (X 20 , Y 20 ) corresponding to the coordinates (X 10 , Y 10 ) on the XY plane, and the coordinates (X 21 , Y 21 ); 
 a first correcting step of correcting a coordinate system of images captured by the first image capturing unit, in order to eliminate the first deviation; and 
 a second correcting step of correcting a coordinate system of images captured by the second image capturing unit, in order to eliminate the second deviation. 
 
     
     
       3. A positioning method of positioning a reference position of a third image capturing unit and a reference position of a fourth image capturing unit with respect to each other in a processing apparatus,
 the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, and the third and fourth image capturing units disposed on the side of a surface of the holding table in thicknesswise directions of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane, 
 the positioning method comprising: 
 a first storing step of detecting coordinates (X 30 , Y 30 ) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a third reference position; 
 a second storing step of detecting coordinates (X 40 , Y 40 ) of a rotation center on the side of the surface of the holding table, the coordinates (X 40 , Y 40 ) corresponding to the coordinates (X 30 , Y 30 ) on the XY plane, with the fourth image capturing unit and storing the detected coordinates as a fourth reference position; 
 after the first storing step and the second storing step, a third storing step of detecting coordinates (X 31 , Y 31 ) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a new third reference position; 
 after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X 41 , Y 41 ) of a rotation center on the side of the surface of the holding table with the fourth image capturing unit and storing the detected coordinates as a new fourth reference position; 
 after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between the coordinates (X 30 , Y 30 ) and the coordinates (X 31 , Y 31 ); 
 after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between the coordinates (X 40 , Y 40 ) and the coordinates (X 41 , Y 41 ); 
 a first correcting step of correcting a coordinate system of images captured by the third image capturing unit, in order to eliminate the first deviation; and 
 a second correcting step of correcting a coordinate system of images captured by the fourth image capturing unit, in order to eliminate the second deviation. 
 
     
     
       4. A positioning method of positioning a reference position of a third image capturing unit and a reference position of a fourth image capturing unit with respect to each other in a processing apparatus,
 the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, and the third and fourth image capturing units disposed on the side of a surface of the holding table in thicknesswise directions of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane, 
 the positioning method comprising: 
 a third storing step of detecting coordinates (X 31 , Y 31 ) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a new third reference position; 
 a fourth storing step of detecting coordinates (X 41 , Y 41 ) of a rotation center on the side of the surface of the holding table with the fourth image capturing unit and storing the detected coordinates as a new fourth reference position; 
 after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between coordinates (X 30 , Y 30 ) of a rotation center on the side of the surface of the holding table that have been detected with the third image capturing unit and stored in advance as a third reference position in the processing apparatus and the coordinates (X 31 , Y 31 ); 
 after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between coordinates (X 40 , Y 40 ) of a rotation center on the side of the surface of the holding table that have been detected with the fourth image capturing unit and stored in advance as a fourth reference position in the processing apparatus, the coordinates (X 40 , Y 40 ) corresponding to the coordinates (X 30 , Y 30 ) on the XY plane, and the coordinates (X 41 , Y 41 ); 
 a first correcting step of correcting a coordinate system of images captured by the third image capturing unit, in order to eliminate the first deviation; and 
 a second correcting step of correcting a coordinate system of images captured by the fourth image capturing unit, in order to eliminate the second deviation. 
 
     
     
       5. An updating method of updating a reference position of a first image capturing unit and a reference position of a second image capturing unit in a processing apparatus,
 the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, the first image capturing unit disposed on the side of a surface of the holding table, and the second image capturing unit disposed on the side of another surface of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane, 
 the updating method comprising: 
 a first storing step of detecting coordinates (X 10 , Y 10 ) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a first reference position; 
 a second storing step of detecting coordinates (X 20 , Y 20 ) of a rotation center on the side of the other surface of the holding table, the coordinates (X 20 , Y 20 ) corresponding to the coordinates (X 10 , Y 10 ) on the XY plane, with the second image capturing unit and storing the detected coordinates as a second reference position; 
 after the first storing step and the second storing step, a third storing step of detecting coordinates (X 11 , Y 11 ) of a rotation center on the side of the surface of the holding table with the first image capturing unit, updating the coordinates (X 10 , Y 10 ) into the coordinates (X 11 , Y 11 ), and storing the coordinates (X 11 , Y 11 ) as the first reference position; and 
 after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X 21 , Y 21 ) of a rotation center on the side of the other surface of the holding table with the second image capturing unit, updating the coordinates (X 20 , Y 20 ) into the coordinates (X 21 , Y 21 ), and storing the coordinates (X 21 , Y 21 ) as the second reference position. 
 
     
     
       6. An updating method of updating a reference position of a third image capturing unit and a reference position of a fourth image capturing unit in a processing apparatus,
 the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, and the third and fourth image capturing units disposed on the side of a surface of the holding table in thicknesswise directions of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane, 
 the updating method comprising: 
 a first storing step of detecting coordinates (X 30 , Y 30 ) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a third reference position; 
 a second storing step of detecting coordinates (X 40 , Y 40 ) of a rotation center on the side of the surface of the holding table, the coordinates (X 40 , Y 40 ) corresponding to the coordinates (X 30 , Y 30 ) on the XY plane, with the fourth image capturing unit and storing the detected coordinates as a fourth reference position; 
 after the first storing step and the second storing step, a third storing step of detecting coordinates (X 31 , Y 31 ) of a rotation center on the side of the surface of the holding table with the third image capturing unit, updating the coordinates (X 30 , Y 30 ) into the coordinates (X 31 , Y 31 ), and storing the coordinates (X 31 , Y 31 ) as the third reference position; and 
 after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X 41 , Y 41 ) of a rotation center on the side of the surface of the holding table with the fourth image capturing unit, updating the coordinates (X 40 , Y 40 ) into the coordinates (X 41 , Y 41 ), and storing the coordinates (X 41 , Y 41 ) as the fourth reference position.