Target and film forming apparatus

Abstract

A film forming apparatus 1 includes a target TA, a ring-shaped shield member 30 provided between the target TA and a plasma generation unit, and a ring-shaped shield member 40 provided between the target TA and a workpiece holding unit. The target TA includes a cylindrical target member 21 and a backing tube (supporting member) 20 configured to support the target member 21 . Each of the shield member 30 , the shield member 40 , and the target member 21 is stacked in a Z direction around an axis VL 1 as a central axis extending in the Z direction, each of the shield member 30 , the target member 21 , and the shield member 40 is arranged so as to be separated from each other in the Z direction, and an inner diameter D 1 of the shield member 30 is smaller than an inner diameter D 2 of the target member 21.

The invention claimed is: 
     
       1. A film forming apparatus comprising:
 a workpiece holding unit configured to hold a film formation object; 
 a plasma generation unit configured to generate plasma; 
 a target provided between the workpiece holding unit and the plasma generation unit; 
 a ring-shaped first shield member provided between the target and the plasma generation unit; and 
 a ring-shaped second shield member provided between the target and the workpiece holding unit, 
 wherein the target includes:
 a cylindrical target member; and 
 a supporting member arranged around the target member and configured to support the target member, 
 
 wherein each of the first shield member, the second shield member, and the target member is stacked in a first direction around a first axis as a central axis extending in the first direction, 
 wherein each of the first shield member, the target member, and the second shield member is arranged so as to be separated from each other in the first direction, 
 wherein an inner diameter of the first shield member is smaller than an inner diameter of the target member, 
 wherein the first shield member has a first portion overlapping the supporting member of the target in the first direction and a second portion not overlapping the target in the first direction, 
 wherein a thickness of the second portion is smaller than a thickness of the first portion, and 
 wherein, when a surface of the target member including a surface facing the first shield member is defined as a reference surface, a shortest distance from the second portion to the reference surface is larger than a shortest distance from the first portion to the reference surface. 
 
     
     
       2. The film forming apparatus according to  claim 1 ,
 wherein the inner diameter of the first shield member is smaller than an inner diameter of the second shield member. 
 
     
     
       3. The film forming apparatus according to  claim 1 ,
 wherein the first shield member has a stepped portion between the first portion and the second portion, 
 wherein a thickness of a portion outside the stepped portion is equal to the thickness of the first portion, and 
 wherein a thickness of a portion inside the stepped portion is equal to the thickness of the second portion. 
 
     
     
       4. The film forming apparatus according to  claim 3 ,
 wherein the stepped portion overlaps the target member in the first direction. 
 
     
     
       5. The film forming apparatus according to  claim 1 ,
 wherein a surface of the second portion facing the target is an inclined surface inclined with respect to a second direction orthogonal to the first direction. 
 
     
     
       6. The film forming apparatus according to  claim 1 ,
 wherein the inner diameter of the first shield member is 90% or more of the inner diameter of the target member. 
 
     
     
       7. The film forming apparatus according to  claim 1 ,
 wherein the inner diameter of the first shield member is 99% or less of the inner diameter of the target member.