US12094892B2ActiveUtilityA1

3D micro display device and structure

Assignee: MONOLITHIC 3D INCPriority: Oct 13, 2010Filed: Feb 15, 2023Granted: Sep 17, 2024
Est. expiryOct 13, 2030(~4.2 yrs left)· nominal 20-yr term from priority
H10W 90/00H10H 29/142H10H 20/857H10H 20/817H10F 39/8023H10H 20/8312H10H 29/14H10F 39/802H10K 59/751H10K 19/201H10K 39/401H10K 50/115H01L 33/62H01L 33/16H01L 27/156H01L 27/14605H01L 25/167H01L 25/0756H01L 27/14603
64
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Cited by
1,222
References
14
Claims

Abstract

A 3D micro display, the 3D micro display including: a first level including a first single crystal layer, the first single crystal layer includes a plurality of LED driving circuits; a second level including a first plurality of light emitting diodes (LEDs), where the second level is disposed on top of the first level, where the second level includes at least ten individual first LED pixels; and a bonding structure, where the second level includes a plurality of bond pads, where the bonding structure includes oxide to oxide bonding.

Claims

exact text as granted — not AI-modified
We claim: 
     
       1. A 3D micro display, the 3D micro display comprising:
 a first level comprising a first single crystal layer, said first single crystal layer comprises a plurality of LED driving circuits; 
 a second level comprising a first plurality of light emitting diodes (LEDs),
 wherein said second level is disposed on top of said first level, 
 wherein said second level comprises at least ten individual first LED pixels; 
 
 a bonding structure,
 wherein said second level comprises a plurality of bond pads, 
 wherein said bonding structure comprises oxide to oxide bonding; and 
 
 an actuator comprising a fast motor,
 wherein said actuator is connected so to move said 3D micro display, 
 wherein said fast motor has a rate faster than 20 cycles per second, and 
 wherein movement of said 3D micro display is in a forward and backward sweep. 
 
 
     
     
       2. The 3D micro display according to  claim 1 ,
 wherein a plurality of said at least ten individual first LED pixels are individually driven, and 
 wherein each of said plurality of said at least ten individual first LED pixels is driven by at least one of said plurality of LED driving circuits. 
 
     
     
       3. The 3D micro display according to  claim 1 , further comprising:
 a top surface of said first single crystal layer,
 wherein a vertical distance is a distance from said top surface of said first single crystal layer to a bottom surface of said second level, and 
 wherein said vertical distance is less than ten microns and greater than 0.1 microns. 
 
 
     
     
       4. The 3D micro display according to  claim 1 , further comprising:
 a second plurality of light emitting diodes (LEDs),
 wherein said first plurality of LEDs emits a first light with a first wavelength, 
 wherein said second plurality of LEDs emits a second light with a second wavelength, and 
 wherein said first wavelength and said second wavelength differ by greater than 10 nm. 
 
 
     
     
       5. The 3D micro display according to  claim 1 ,
 wherein said first single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers. 
 
     
     
       6. The 3D micro display according to  claim 1 ,
 wherein said second single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers. 
 
     
     
       7. The 3D micro display according to  claim 1 ,
 wherein said actuator comprises a piezo-electric motor. 
 
     
     
       8. The 3D micro display according to  claim 1 , further comprising:
 a bottom surface of said first single crystal layer; and 
 a top surface of said second level,
 wherein a vertical distance is a distance from said bottom surface of said first single crystal layer to said top surface of said second level, and 
 wherein said vertical distance is less than ten microns and greater than 0.1 microns. 
 
 
     
     
       9. A 3D micro display, the 3D micro display comprising:
 a first level comprising a first single crystal layer, said first single crystal layer comprises a plurality of LED driving circuits; 
 a second level comprising a first plurality of light emitting diodes (LEDs),
 wherein said first level is disposed on top of said second level, 
 wherein said second level comprises at least ten individual first LED pixels; and 
 
 an actuator comprising a fast motor,
 wherein said actuator is connected so to move said 3D micro display, 
 wherein said fast motor has a rate faster than 20 cycles per second, and 
 wherein movement of said 3D micro display is in a forward and backward sweep. 
 
 
     
     
       10. The 3D micro display according to  claim 9 ,
 wherein a plurality of said at least ten individual first LED pixels are individually driven, and 
 wherein each of said plurality of said at least ten individual first LED pixels is driven by a unique at least one of said plurality LED driving circuit. 
 
     
     
       11. The 3D micro display according to  claim 9 , further comprising:
 a second plurality of light emitting diodes (LEDs),
 wherein said first plurality of LEDs emits a first light with a first wavelength, 
 wherein said second plurality of LEDs emits a second light with a second wavelength, and 
 wherein said first wavelength and said second wavelength differ by greater than 10 nm. 
 
 
     
     
       12. The 3D micro display according to  claim 9 ,
 wherein a thickness of said first single crystal layer is greater than 10 nm and smaller than 50 micrometers. 
 
     
     
       13. The 3D micro display according to  claim 9 , further comprising:
 a bonding structure,
 wherein said first level comprises a plurality of bond pads, 
 wherein said first level is bonded to said second level, and 
 wherein said bonding structure comprises oxide to oxide bonding. 
 
 
     
     
       14. The 3D micro display according to  claim 9 ,
 wherein said actuator comprises a piezo-electric motor.

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