Substrate film forming machine table and usage method

Abstract

A substrate film forming machine table and a usage method. The substrate film forming machine table comprises: a first substrate bearing inlet and outlet chamber; a second substrate bearing inlet and outlet chamber; a film forming chamber; an intermediate chamber; a pump set connected to the first substrate bearing inlet and outlet chamber; a second pump connected to the intermediate chamber; a third pump connected to the film forming chamber and the second substrate bearing inlet and outlet chamber; at least one backup pump, which is provided to connect to the film forming chamber and the second substrate bearing inlet and outlet chamber so as to extract air from the film forming chamber and the second substrate bearing inlet and outlet chamber when the third pump is damaged; or, connecting to the intermediate chamber so as to extract air from the intermediate chamber when the second pump is damaged.

What is claimed is: 
     
       1. A substrate film formation machine, comprising:
 a first substrate bearer in-out cavity; 
 a second substrate bearer in-out cavity connected to the first substrate bearer in-out cavity; 
 a film formation chamber connected to the second substrate bearer in-out cavity; 
 an intermediate chamber connected to the film formation chamber; 
 a pump set comprising a plurality of first pumps that are connected to the first substrate bearer in-out cavity, so as to pump out air in the first substrate bearer in-out cavity; 
 a second pump connected to the intermediate chamber, so as to pump out air in the intermediate chamber; 
 a third pump connected to the film formation chamber and the second substrate bearer in-out cavity, so as to pump out air in the film formation chamber and the second substrate bearer in-out cavity; 
 wherein at least one of the plurality of first pumps is reused as an auxiliary pump configured to pump out air in the first substrate bearer in-out cavity when both the second pump and the third pump work normally, pump out air in the intermediate chamber when the second pump is damaged, and pump out air in the film formation chamber and the second substrate bearer in-out cavity when the third pump is damaged; the number of the auxiliary pump is smaller than the total number of the first pumps. 
 
     
     
       2. The substrate film formation machine according to  claim 1 , further comprising at least one first control switch, wherein one end of the first control switch is connected to the first pump reused as the auxiliary pump, and the other end of the first control switch is connected to the first substrate bearer in-out cavity. 
     
     
       3. The substrate film formation machine according to  claim 1 , further comprising at least one second control switch, wherein one end of the second control switch is connected to the third pump, and the other end of the second control switch is connected to the first substrate bearer in-out cavity. 
     
     
       4. The substrate film formation machine according to  claim 1 , further comprising a first monitoring device, a second monitoring device and an alarm device;
 wherein the first monitoring device is configured to monitor whether the second pump works normally, and send a first alarm signal to the alarm device when the second pump does not work normally; 
 the second monitoring device is configured to monitor whether the third pump works normally, and send a second alarm signal to the alarm device when the third pump does not work normally; and 
 when receiving the first alarm signal, the alarm device is configured to play a pre-recorded first alarm sound or display a first alarm icon by using a display screen, and when receiving the second alarm signal, the alarm device is configured to play a pre-recorded second alarm sound or display a second alarm icon by using a display screen. 
 
     
     
       5. The substrate film formation machine according to  claim 4 , further comprising a first vacuum gauge and a second vacuum gauge, wherein the first vacuum gauge is arranged in the film formation chamber or the second substrate bearer in-out cavity, and the second vacuum gauge is arranged in the intermediate chamber. 
     
     
       6. The substrate film formation machine according to  claim 4 , wherein the first monitoring device is configured to determine, by monitoring operation parameters of the second pump, whether the second pump works normally; the second monitoring device is configured to determine, by monitoring operation parameters of the third pump, whether the third pump works normally; and the operation parameters comprise a working current, a working voltage, and a pumping speed. 
     
     
       7. A substrate film formation machine, comprising:
 a first substrate bearer in-out cavity; 
 a second substrate bearer in-out cavity connected to the first substrate bearer in-out cavity; 
 a film formation chamber connected to the second substrate bearer in-out cavity; 
 an intermediate chamber connected to the film formation chamber; 
 a pump set comprising a plurality of first pumps that are connected to the first substrate bearer in-out cavity, so as to pump out air in the first substrate bearer in-out cavity; 
 a second pump connected to the intermediate chamber, so as to pump out air in the intermediate chamber; 
 a third pump connected to the film formation chamber and the second substrate bearer in-out cavity, so as to pump out air in the film formation chamber and the second substrate bearer in-out cavity; 
 wherein at least one of the plurality of first pumps is reused as an auxiliary pump configured to pump out air in the first substrate bearer in-out cavity when both the second pump and the third pump work normally, pump out air in the intermediate chamber when the second pump is damaged, and pump out air in the film formation chamber and the second substrate bearer in-out cavity when the third pump is damaged; the number of the auxiliary pump is smaller than the total number of the first pumps; 
 a first control switch, one end of the first control switch being connected to the second pump and the other end of the first control switch being connected to the intermediate chamber; 
 a second control switch, one end of the second control switch being connected to the third pump and the other end of the second control switch being connected to the film formation chamber and the second substrate bearer in-out cavity; 
 a third control switch, one end of the third control switch being connected to the auxiliary pump and the other end of the third control switch being connected to the film formation chamber and the second substrate bearer in-out cavity; and 
 a fourth control switch, one end of the fourth control switch being connected to the auxiliary pump and the other end of the fourth control switch being connected to the intermediate chamber. 
 
     
     
       8. The substrate film formation machine according to  claim 7 , further comprising at least one fifth control switch, wherein one end of the fifth control switch is connected to the first pump reused as the auxiliary pump, and the other end of the fifth control switch is connected to the first substrate bearer in-out cavity. 
     
     
       9. The substrate film formation machine according to  claim 7 , further comprising at least one sixth control switch, wherein one end of the sixth control switch is connected to the third pump and the other end of the sixth control switch is connected to the first substrate bearer in-out cavity. 
     
     
       10. The substrate film formation machine according to  claim 7 , wherein when the second pump and the third pump both work normally, the first control switch and the second control switch are turned on, and the third control switch and the fourth control switch are both turned off;
 when the second pump is damaged, the first control switch is turned off, the fourth control switch is turned on, the second control switch is turned on, and the third control switch is turned off; and 
 when the third pump is damaged, the second control switch is turned off, the third control switch is turned on, the first control switch is turned on, and the fourth control switch is turned off. 
 
     
     
       11. The substrate film formation machine according to  claim 7 , further comprising a first monitoring device, a second monitoring device and an alarm device;
 wherein the first monitoring device is configured to monitor whether the second pump works normally, and send a first alarm signal to the alarm device when the second pump does not work normally; 
 the second monitoring device is configured to monitor whether the third pump works normally, and send a second alarm signal to the alarm device when the third pump does not work normally; and 
 when receiving the first alarm signal, the alarm device is configured to play a pre-recorded first alarm sound or display a first alarm icon by using a display screen, and when receiving the second alarm signal, the alarm device is configured to play a pre-recorded second alarm sound or display a second alarm icon by using a display screen. 
 
     
     
       12. The substrate film formation machine according to  claim 11 , further comprising a first vacuum gauge and a second vacuum gauge, wherein the first vacuum gauge is arranged in the film formation chamber or the second substrate bearer in-out cavity, and the second vacuum gauge is arranged in the intermediate chamber. 
     
     
       13. The substrate film formation machine according to  claim 11 , wherein the first monitoring device is configured to determine, by monitoring operation parameters of the second pump, whether the second pump works normally; the second monitoring device is configured to determine, by monitoring operation parameters of the third pump, whether the third pump works normally; and the operation parameters comprise a working current, a working voltage and a pumping speed. 
     
     
       14. A method of using the substrate film formation machine according to  claim 7 , comprising:
 determining whether the second pump and the third pump work normally; 
 if the second pump is damaged, turning off the first control switch and the third control switch, turning on the second control switch and the fourth control switch, and starting the auxiliary pump; and 
 if the third pump is damaged, turning on the first control switch and the third control switch, turning off the second control switch and the fourth control switch, and starting the auxiliary pump. 
 
     
     
       15. The method according to  claim 14 , wherein after the determining whether the second pump and the third pump are damaged, the method further comprises:
 sending out a first alarm signal if the second pump is damaged; and 
 sending out a second alarm signal if the third pump is damaged, the first alarm signal being different from the second alarm signal. 
 
     
     
       16. The method according to  claim 14 , wherein after the determining whether the second pump and the third pump are damaged, the method further comprises: sending out a third alarm signal when the second pump and the third pump are both damaged. 
     
     
       17. The substrate film formation machine according to  claim 1 , further comprising at least one sixth control switch, wherein one end of the sixth control switch is connected to the third pump and the other end of the sixth control switch is connected to the first substrate bearer in-out cavity. 
     
     
       18. The substrate film formation machine according to  claim 17 , wherein the third pump is further configured to pump out air in the first substrate bearer in-out cavity when the sixth control switch is switched on. 
     
     
       19. The substrate film formation machine according to  claim 9 , wherein the third pump is further configured to pump out air in the first substrate bearer in-out cavity when the sixth control switch is switched on. 
     
     
       20. The method according to  claim 14 , further comprising:
 switching on at least one sixth switch connected between the third pump and the first substrate bearer in-out cavity; and 
 pumping out air in the first substrate bearer in-out cavity by the third pump.