Method and system for determining energy spectrum of X-ray device
Abstract
The present disclosure discloses a method and a system for determining an energy spectrum of an incident electron beam. The method includes obtaining a plurality of deflection currents of a beam deflection device; for each of the plurality of deflection currents, determining an energy range of an ejected electron beam, and determining a target current of a target generated by the ejected electron beam irradiating the target, wherein the ejected electron beam is emitted from an output of the beam deflection device after the incident electron beam enters the beam deflection device. The method also includes determining the energy spectrum of the incident electron beam based on the energy ranges of the plurality of ejected electron beams and the corresponding target currents.
Claims
exact text as granted — not AI-modifiedWe claim:
1. A method for determining an energy spectrum of an incident electron beam, implemented on a computing device having at least one processor and at least one storage device, comprising:
obtaining, from one or more terminals controlled by a user, a plurality of deflection currents of a beam deflection device;
for each of the plurality of deflection currents,
determining, by the at least one processor, an energy range of an ejected electron beam, wherein the ejected electron beam is emitted from an output of the beam deflection device after the incident electron beam enters the beam deflection device, and the beam deflection device is configured to filter, through a magnetic field generated by the beam deflection device based on the deflection current, one or more electrons of the incident electron beam to generate the ejected electron beam; and
obtaining, from a target current test device, a target current of a target generated by the ejected electron beam irradiating the target; and
determining, by the at least one processor, a plurality of energy sub-ranges of the incident electron beam by dividing the incident electron beam based on the energy ranges of the plurality of ejected electron beams;
determining, by the at least one processor, a plurality of sub-currents of the incident electron beam based on the plurality of target currents each of which corresponds to one of the plurality of energy ranges of the plurality of ejected electron beams, each sub-current corresponding to an energy sub-range of the plurality of the energy sub-ranges of the incident electron beam; and
determining, by the at least one processor, the energy spectrum of the incident electron beam based on the plurality of sub-currents corresponding to the plurality of energy sub-ranges of the incident electron beam.
2. The method of claim 1 , wherein the determining, by the at least one processor, an energy range of an ejected electron beam for each of the plurality of deflection currents further comprises:
determining a magnetic field strength of the magnetic field generated by the beam deflection device based on the deflection current;
determining a center energy value of the energy range of the ejected electron beam based on the magnetic field strength and a deflection radius of the beam deflection device; and
determining the energy range of the ejected electron beam based on the center energy value and a width of the energy range.
3. The method of claim 1 , further comprising:
obtaining a target deflection current of the beam deflection device;
determining an energy range of a target ejected electron beam, wherein the target ejected electron beam is emitted from the output of the beam deflection device after the incident electron beam enters the beam deflection device; and
determining an energy spectrum of the target ejected electron beam based on the energy range of the target ejected electron beam and the energy spectrum of the incident electron beam.
4. The method of claim 1 , wherein the determining, by the at least one processor, an energy range of an ejected electron beam for each of the plurality of deflection currents further comprises:
determining the energy range of the ejected electron beam based the deflection radius of the beam deflection device and the magnetic field.
5. The method of claim 1 , wherein the obtaining, from a target current test device, a target current of a target generated by the ejected electron beam irradiating the target includes:
gradually changing the deflection current of the beam deflection device; and
successively obtaining the target current flowing through the target after each of the plurality of ejected electron beams irradiates the target.
6. The method of claim 1 , wherein the energy ranges of the plurality of ejected electron beams are continuously distributed.
7. The method of claim 1 , wherein a start-point of the energy range of the ejected electron beam coincides with an end-point of the energy range of at least one ejected electron beam generated prior to the ejected electron beam, or an end-point of the energy range of the ejected electron beam coincides with a start-point of the energy range of at least one ejected electron beam generated prior to the ejected electron beam.
8. The method of claim 1 , wherein
the target current of the target generated by at least one specific ejected electron beam of the plurality of ejected electron beams irradiating the target is 0, and each of the plurality of ejected electron beams other than the at least one specific ejected electron beam meets at least one of the following conditions:
(1) the energy range of the each ejected electron beam at least partially overlaps with the energy range of the at least one specific ejected electron beam; or
(2) a start-point or an end-point of the energy range of the each ejected electron beam coincides with a start-point or an end-point of the energy range of any ejected electron beam generated prior to the each ejected electron beam.
9. A system for determining an energy spectrum of an incident electron beam, comprising a beam deflection device and a computing device, the computing device including a processor, wherein during operations, the processor causes the system to:
obtain, by the processor, a plurality of deflection currents of the beam deflection device;
for each of the plurality of deflection currents,
determine, by the processor, an energy range of an ejected electron beam, wherein the ejected electron beam is emitted from an output of the beam deflection device after the incident electron beam enters the beam deflection device, and the beam deflection device is configured to filter, through a magnetic field generated by the beam deflection device based on the deflection current, one or more electrons of the incident electron beam to generate the ejected electron beam; and
obtain, from a target current test device, a target current of a target after the ejected electron beam irradiates the target; and
determine, by the processor, a plurality of energy sub-ranges of the incident electron beam by dividing the incident electron beam based on the energy ranges of the plurality of ejected electron beams;
determine, by the processor, a plurality of sub-currents of the incident electron beam based on the plurality of target currents each of which corresponds to one of the plurality of energy ranges of the plurality of ejected electron beams, each sub-current corresponding to an energy sub-range of the plurality of the energy sub-ranges of the incident electron beam; and
determine, by the processor, the energy spectrum of the incident electron beam based on the plurality of sub-currents corresponding to the plurality of energy sub-ranges of the incident electron beam.
10. The system of claim 9 , wherein to determine an energy range of an ejected electron beam, the processor causes the system further to:
determine a magnetic field strength of the magnetic field generated by the beam deflection device based on the deflection current;
determine a center energy value of the energy range of the ejected electron beam based on the magnetic field strength and a deflection radius of the beam deflection device; and
determine the energy range of the ejected electron beam based on the center energy value and a width of the energy range.
11. The system of claim 9 , the processor causes the system further to:
obtain a target deflection current of the beam deflection device;
determine an energy range of a target ejected electron beam, wherein the target ejected electron beam is emitted from the output of the beam deflection device after the incident electron beam enters the beam deflection device; and
determine an energy spectrum of the target ejected electron beam based on the energy range of the target ejected electron beam and the energy spectrum of the incident electron beam.
12. The system of claim 9 , wherein to determine an energy range of an ejected electron beam, the processor causes the system further to:
determine the energy range of the ejected electron beam based on the deflection radius of the beam deflection device and the magnetic field.
13. The system of claim 9 , wherein to obtain a target current of a target after the ejected electron beam irradiates the target, the processor causes the system further to:
gradually change the deflection current of the beam deflection device; and
successively obtain the target current flowing through the target after each of the plurality of ejected electron beams irradiates the target.
14. The system of claim 9 , wherein the energy ranges of the plurality of ejected electron beams are continuously distributed.
15. The system of claim 9 , wherein a start-point of the energy range of the ejected electron beam coincides with an end-point of the energy range of at least one ejected electron beam generated prior to the ejected electron beam, or an end-point of the energy range of the ejected electron beam coincides with a start-point of the energy range of at least one ejected electron beam generated prior to the ejected electron beam.
16. The system of claim 9 , wherein
the target current of the target generated by at least one specific ejected electron beam of the plurality of ejected electron beams irradiating the target is 0, and each of the plurality of ejected electron beams other than the at least one specific ejected electron beam meets at least one of the following conditions:
(1) the energy range of the each ejected electron beam at least partially overlaps with the energy range of the at least one specific ejected electron beam; or
(2) a start-point or an end-point of the energy range of the each ejected electron beam coincides with a start-point or an end-point of the energy range of any ejected electron beam generated prior to the each ejected electron beam.
17. A non-transitory computer readable medium comprising executable instructions that, when executed by at least one processor, cause the at least one processor to effectuate a method comprising:
obtaining, from one or more terminals controlled by a user, a plurality of deflection currents of a beam deflection device;
for each of the plurality of deflection currents,
determining, by the at least one processor, an energy range of an ejected electron beam, wherein the ejected electron beam is emitted from an output of the beam deflection device after an incident electron beam enters the beam deflection device, and the beam deflection device is configured to filter, through a magnetic field generated by the beam deflection device based on the deflection current, one or more electrons of the incident electron beam to generate the ejected electron beam; and
obtaining, from a target current test device, a target current of a target generated by the ejected electron beam irradiating the target; and
determining, by the at least one processor, a plurality of energy sub-ranges of the incident electron beam by dividing the incident electron beam based on the energy ranges of the plurality of ejected electron beams;
determining, by the at least one processor, a plurality of sub-currents of the incident electron beam based on the plurality of target currents each of which corresponds to one of the plurality of energy ranges of the plurality of ejected electron beams, each sub-current corresponding to an energy sub-range of the plurality of the energy sub-ranges of the incident electron beam; and
determining, by the at least one processor, the energy spectrum of the incident electron beam based on the plurality of sub-currents corresponding to the plurality of energy sub-ranges of the incident electron beam.
18. The non-transitory computer readable medium of claim 17 , wherein the energy ranges of the plurality of ejected electron beams are continuously distributed.
19. The method of claim 1 , wherein the beam deflection device includes an energy slit corresponding to the magnetic field, wherein a position of the energy slit corresponds to a deflection radius of the beam deflection device, and the energy slit is configured to permit electrons in the incident electron beam whose deflection radius under the magnetic field fall within a range, the range corresponding to the deflection radius of the beam deflection device, to pass through.
20. The system of claim 9 , wherein the beam deflection device includes an energy slit corresponding to the magnetic field, wherein a position of the energy slit corresponds to a deflection radius of the beam deflection device, and the energy slit is configured to permit electrons in the incident electron beam whose deflection radius under the magnetic field fall within a range, the range corresponding to the deflection radius of the beam deflection device, to pass through.Join the waitlist — get patent alerts
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