CMP polishing system and associated pilot management system

Abstract

A dispatch management method for Pilot-run on a computer and applicable to chemical mechanical polishing machines includes: generating initialization work schedules; filtering the initialization work schedules according to respective adaptability parameters to generate intermediate work schedules; performing crossing operations on the intermediate work schedules to generate M sets of crossed work schedules; performing mutation calculations on contents of the intermediate work schedules and the M sets of crossed work schedules to generate mutated work schedules; performing optimization calculations on the intermediate work schedules, the crossed work schedules and the mutated work schedules to generate a target work schedule; and automatically performing dispatch on the CMP machines according to the target work schedule.

What is claimed is: 
     
       1. A dispatch management method for running a trial production process on a computer and applicable to chemical mechanical polishing (CMP) machines, comprising:
 generating K sets of initialization work schedules based on machine information of the CMP machines; 
 filtering the K sets of initialization work schedules according to respective adaptability parameters of the K set of initialization work schedules to obtain L sets of intermediate work schedules among the K sets of initialization work schedule; 
 performing crossing operations on the L sets of intermediate work schedules for M times to generate M sets of crossed work schedules, wherein each of M crossing operations blend contents of a different duo of work schedules by respectively extracting portions of each of the duo in order to generate a set of crossed work schedules; 
 performing mutation calculations on contents of the L sets of intermediate work schedules and the M sets of crossed work schedules to generate N sets of mutated work schedules; 
 performing optimization calculations on the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules to generate a target work schedule; and 
 automatically performing dispatch on the CMP machines according to the target work schedule; 
 wherein the step of performing optimization calculations on the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules to generate a target work schedule comprises:
 according to a summation of processing time, trial production process processing time and head idle seasoning time of the CMP machines, selecting a work schedule from the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules as the target work schedule. 
 
 
     
     
       2. The dispatch management method of  claim 1 , wherein the machine information of the CMP machines comprises:
 groups to which products belong, machine idle time, and machine operation time. 
 
     
     
       3. The dispatch management method of  claim 1 , wherein respective adaptability parameters of the K set of initialization work schedules comprise cycle time. 
     
     
       4. The dispatch management method of  claim 3 , wherein the L sets of intermediate work schedules comprise shorter cycle time than remaining initialization work schedules in the K sets of initialization work schedules other than the L sets of intermediate work schedules. 
     
     
       5. The dispatch management method of  claim 1 , wherein the step of performing crossing operations on the L sets of intermediate work schedules for M times to generate the M sets of crossed work schedules comprises:
 setting the value of M by a maximum number of times the L sets of intermediate work schedules is capable of performing crossing operations, or by a predetermined number. 
 
     
     
       6. The dispatch management method of  claim 1 , wherein the step of performing mutation calculations on contents of the L sets of intermediate work schedules and the M sets of crossed work schedules to generate the N sets of mutated work schedules comprises:
 randomly disturbing on each work schedule among N sets of work schedules of the L sets of intermediate work schedules and the M sets of crossed work schedules, to generate the N sets of mutated work schedules. 
 
     
     
       7. The dispatch management method of  claim 1 , further comprising:
 according to the target work schedule, determining an amount of the CMP machines to be used. 
 
     
     
       8. The dispatch management method of  claim 1 , further comprising:
 determining a loaded wafer amount of load ports of the CMP machines according to the target work schedule. 
 
     
     
       9. The dispatch management method of  claim 1 , wherein the step of automatically performing dispatch on the CMP machines according to the target work schedule comprises:
 sending the target work schedule to a Real time dispatch (RTD) system to perform CMP dispatching. 
 
     
     
       10. A chemical mechanical polishing (CMP) system, arranged to perform CMP dispatching management by running a trial production process on a computer, the CMP system comprising:
 a plurality of CMP machines; 
 a processor, arranged to execute the following steps:
 generating K set of initialization work schedules according to machine information of a plurality of CMP machines; 
 filtering the K sets of initialization work schedules according to respective adaptability parameters of the K set of initialization work schedules to obtain L sets of intermediate work schedules among the K sets of initialization work schedules; 
 performing crossing operations on the L sets of intermediate work schedules for M times to generate M sets of crossed work schedules, wherein each of the M times of crossing operations is to blend contents of a different duo of work schedules by respectively extracting portions of each of the duo in order to generate a set of crossed work schedules; 
 performing mutation calculations on contents of the L sets of intermediate work schedules and the M sets of crossed work schedules to generate N sets of mutated work schedules; 
 performing optimization calculations on the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules to generate a target work schedule; and 
 automatically performing dispatch on the CMP machines according to the target work schedule; 
 wherein the step of performing optimization calculations on the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules to generate a target work schedule comprises:
 according to a summation of processing time, trial production process processing time and head idle seasoning time of the CMP machines, selecting a work schedule from the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules as the target work schedule. 
 
 
 
     
     
       11. The CMP system of  claim 10 , wherein the machine information of the CMP machines comprises:
 groups to which products belong, machine idle time, and machine operation time. 
 
     
     
       12. The CMP system of  claim 10 , wherein respective adaptability parameters of the K set of initialization work schedules comprise cycle time. 
     
     
       13. The CMP system of  claim 12 , wherein the L sets of intermediate work schedules comprise shorter cycle time than remaining initialization work schedules in the K sets of initialization work schedules other than the L sets of intermediate work schedules. 
     
     
       14. The CMP system of  claim 10 , wherein the step of performing crossing operations on the L sets of intermediate work schedules for M times to generate the M sets of crossed work schedules comprises:
 setting the value of M by a maximum number of times the L sets of intermediate work schedules is capable of performing crossing operations, or by a predetermined number. 
 
     
     
       15. The CMP system of  claim 10 , wherein the step of performing mutation calculations on contents of the L sets of intermediate work schedules and the M sets of crossed work schedules to generate the N sets of mutated work schedules comprises:
 randomly disturbing on each work schedule among N sets of work schedules of the L sets of intermediate work schedules and the M sets of crossed work schedules, to generate the N sets of mutated work schedules. 
 
     
     
       16. The CMP system of  claim 10 , wherein the processor is further arranged to execute the following step:
 according to the target work schedule, determining an amount of the CMP machines to be used. 
 
     
     
       17. The CMP system of  claim 10 , wherein the processor is further arranged to execute the following step:
 determining a loaded wafer amount of load ports of the CMP machines according to the target work schedule. 
 
     
     
       18. The CMP system of  claim 10 , wherein the step of automatically performing dispatch on the CMP machines according to the target work schedule comprises:
 sending the target work schedule to a Real time dispatch (RTD) system to perform CMP dispatching.