US11008259B2ActiveUtilityA1

Method for manufacturing ceramic plate-shaped body and ceramic plate-shaped body

Assignee: MURATA MANUFACTURING COPriority: May 26, 2017Filed: May 18, 2018Granted: May 18, 2021
Est. expiryMay 26, 2037(~10.8 yrs left)· nominal 20-yr term from priority
Inventors:Akira Baba
C04B 2237/348C04B 2235/963C04B 2235/6025C04B 37/008C04B 35/6264B32B 1/00C04B 35/638C04B 2235/3224C04B 35/63424C04B 2235/94C04B 2235/3246C04B 2235/604C04B 35/64C04B 35/62218C04B 35/48
49
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References
11
Claims

Abstract

A method for manufacturing a ceramic plate-shaped body that efficiently manufactures a ceramic plate-shaped body having high smoothness without requiring polishing after firing. The method includes preparing an unsintered plate-shaped body, preparing a plurality of resin sheets by a resin slurry containing a spherical resin powder that is composed of a resin material being poorly-soluble in an organic solvent and burning out during firing, producing an unsintered laminate by laminating and press-bonding the unsintered plate-shaped body and the resin sheet, firing the unsintered laminate so that the unsintered plate-shaped body is sintered to form a ceramic plate-shaped body, and the ceramic plate-shaped bodies are bonded to each other with scattered fine bonding portions interposed therebetween to form a ceramic laminate, and breaking the bonding portions in the ceramic laminate so that the ceramic laminate is divided into a plurality of ceramic plate-shaped bodies.

Claims

exact text as granted — not AI-modified
What is claimed: 
     
       1. A method for manufacturing a ceramic plate-shaped body, the method comprising:
 preparing a plurality of resin sheets using a resin slurry containing an organic solvent and a spherical resin powder composed of a resin material that is poorly-soluble in the organic solvent; 
 alternately laminating a plurality of unsintered plate-shaped bodies containing a ceramic material powder and the plurality of resin sheets, respectively; 
 
       press-bonding the alternately laminated unsintered plate-shaped bodies and resin sheets to produce an unsintered laminate;
 firing the unsintered laminate to burn out the plurality of resin sheets, such that the plurality of unsintered plate-shaped bodies are sintered to form a plurality of ceramic plate-shaped bodies that are bonded to each other with scattered fine bonding portions interposed therebetween to form a ceramic laminate, such that each of the ceramic plate-shaped bodies are formed by the firing to have a SAD value that is between at least 0.009 and at most 0.128; and 
 breaking the scattered fine bonding portions in the ceramic laminate to divide the ceramic laminate into the plurality of ceramic plate-shaped bodies, 
 wherein the SAD value is defined as (Sb/Sa) −1, with Sa being a planar area of a region of the respective ceramic plate-shaped body and Sb being a surface area obtained by measuring the region with a scanning probe microscope. 
 
     
     
       2. The method for manufacturing a ceramic plate-shaped body according to  claim 1 , wherein the spherical resin powder has a median diameter of 0.5 μm or more and 10 μm or less, and wherein the spherical resin powder after compression comprises a diameter in a laminating direction of the ceramic plate-shaped bodies that is shorter than that in a direction perpendicular to the laminating direction. 
     
     
       3. The method for manufacturing a ceramic plate-shaped body according to  claim 2 , wherein each of the plurality of resin sheets has a thickness of 3 μm or more and 30 μm or less. 
     
     
       4. The method for manufacturing a ceramic plate-shaped body according to  claim 2 , wherein a thickness of each of the plurality of resin sheets is twice or more the median diameter of the spherical resin powder. 
     
     
       5. The method for manufacturing a ceramic plate-shaped body according to  claim 1 , further comprising producing each of the plurality of ceramic plate-shaped bodies with at least one principal surface having an arithmetic average roughness between 0.023 μm or more and 0.30 μm or less in a region set at an arbitrary position of the at least one principal surface. 
     
     
       6. The method for manufacturing a ceramic plate-shaped body according to  claim 5 , further comprising producing each of the plurality of ceramic plate-shaped bodies to have respective concave portions having an arithmetic average depth between 0.022 μm or more and 0.30 μm or less, wherein recesses defined by the concave portions have a diameter in a horizontal direction that is larger than a depth of the recesses. 
     
     
       7. The method for manufacturing a ceramic plate-shaped body according to  claim 6 , wherein the plurality of ceramic plate-shaped bodies are produced without a polishing step after the firing of the unsintered laminate to burn out the plurality of resin sheets. 
     
     
       8. The method for manufacturing a ceramic plate-shaped body according to  claim 1 , wherein the preparing of the plurality of resin sheets comprises providing respective resin layers on one principal surface of each of the plurality of unsintered plate-shaped bodies by using the resin slurry containing the organic solvent and the spherical resin powder. 
     
     
       9. The method for manufacturing a ceramic plate-shaped body according to  claim 8 , wherein each of the resin layers has a thickness of 3 μm or more and 30 μm or less. 
     
     
       10. The method for manufacturing a ceramic plate-shaped body according to  claim 8 , wherein the thickness of each of the plurality of resin layers is twice or more the median diameter of the spherical resin powder. 
     
     
       11. The method for manufacturing a ceramic plate-shaped body according to  claim 1 , further comprising preparing each of the plurality of unsintered plate-shaped bodies with at least one ceramic green sheet.

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