Container storage add-on for bare workpiece stocker

Abstract

The present invention relates to apparatuses and methods to store and transfer objects, and more particularly to workpiece stocker configurations such as stocker for semiconductor wafers, reticles or carrier boxes.

What is claimed is: 
     
       1. A buffer storage add-on for a workpiece stocker, comprising:
 a storage chamber, 
 wherein the storage chamber comprises a first outside sidewall exterior face having a closable opening, wherein the first outside sidewall exterior face is configured to be coupled with a second outside sidewall of the workpiece stocker so as to be sealed with a second outside sidewall exterior face of the workpiece stocker, such that the first outside sidewall exterior face faces opposite the second outside sidewall exterior face, the second outside sidewall exterior face having another closable opening different and distinct from the closable opening of the first outside sidewall exterior face, wherein a shared interior environment, between the workpiece stocker and the storage chamber via the closable opening and the another closable opening, is sealed from an outside environment with both the closable opening and the another closable opening both open; 
 wherein the second outside sidewall exterior face of the workpiece stocker is different than a front sidewall of the workpiece stocker, the front sidewall including a load lock station, wherein the load lock station is separate and distinct from the second outside sidewall of the workpiece stocker; and 
 a container handler mounted in the storage chamber, the container handler comprising an end handle for supporting a container, the container handler comprising an extension mechanism for extending the end handle; 
 wherein the end handle is configured to be extended through the closable opening of the first outside sidewall exterior face beyond the first outside sidewall exterior face, passing through the another closable opening of the second outside sidewall exterior face to an inside of the workpiece stocker towards the front sidewall. 
 
     
     
       2. The buffer storage add-on of  claim 1 , further comprising transport pathways, wherein the extension mechanism comprises a foldable arm folding and extending along a row transport pathway of the transport pathways or along a column transport pathway of the transport pathways. 
     
     
       3. The buffer storage add-on of  claim 1 , wherein the end handle comprises one or more activated grippers facing in a z-direction for gripping the container. 
     
     
       4. The buffer storage add-on of  claim 1 , wherein the end handle is coupled to the container handler at a bend section to enable the end handle to pick or place the container around a solid object. 
     
     
       5. The buffer storage add-on of  claim 1 , further comprising
 wherein the front sidewall of the workpiece stocker comprises the load lock station configured for operator access, and 
 wherein the end handle is configured to transfer the container from a plurality of storage compartments of the storage chamber to the load lock station. 
 
     
     
       6. The buffer storage add-on of  claim 1 , wherein
 the front sidewall of the workpiece stocker comprises two load lock stations configured for operator access, 
 the two load lock stations are disposed along an extended path of the extension mechanism, and 
 the end handle is coupled to the container handler at a bend section to enable the end handle to pick or place the container around a load lock station of the two load lock stations. 
 
     
     
       7. The buffer storage add-on of  claim 1 , wherein a z-direction is parallel to the front sidewall of the workpiece stocker. 
     
     
       8. The buffer storage add-on of  claim 1 , wherein
 the extension mechanism is also configured to retract the end handle, and 
 the end handle in retracted configuration, is disposed inside of the front sidewall of the workpiece stocker. 
 
     
     
       9. A container storage add-on for a workpiece stocker, the workpiece stocker adapted to accept containers having workpieces stored therein at one or more loading station, and storing the workpieces in a workpiece storage chamber, the container storage add-on comprising:
 a container storage chamber comprising a plurality of container storage compartments arranged in a two dimensional x-y array, wherein the container storage chamber comprises a first outside sidewall exterior face having a closable opening, wherein the first outside sidewall exterior face is configured to be coupled to a second outside sidewall exterior face of the workpiece stocker such that the first outside sidewall exterior face faces opposite the second outside sidewall exterior face, the second outside sidewall exterior face having another closable opening different and distinct from the closable opening of the first outside sidewall exterior face, wherein the second outside sidewall exterior face of the workpiece stocker is different than a front sidewall of the workpiece stocker, wherein the two dimensional x-y array defines an x-y plane; 
 an x-y mechanism coupled to the container storage chamber; and 
 an arm comprising an end handle for supporting the containers, the arm comprising an extension mechanism for extending the end handle in a z-direction, wherein the z-direction is a direction not in the x-y plane, wherein the end handle is configured to be extended through the closable opening of the first outside sidewall exterior face beyond the first outside sidewall exterior face, passing through the another closable opening of the second outside sidewall exterior face to an inside of the workpiece stocker. 
 
     
     
       10. The container storage add-on of  claim 9 , further comprising wherein the end handle is configured to transfer the container from the plurality of storage compartments to the loading station. 
     
     
       11. The container storage add-on of  claim 9 , wherein
 the one or more loading station being disposed on a front sidewall of the workpiece stocker and comprising two loading stations configured for operator access, 
 the two loading stations are disposed along an extended path of the extension mechanism, and 
 the end handle is coupled to the arm at a bend section to enable the end handle to pick or place the container around a loading station of the two loading stations. 
 
     
     
       12. The container storage add-on of  claim 9 , wherein the z-direction is parallel to the front sidewall of the workpiece stocker. 
     
     
       13. The container storage add-on of  claim 9 , wherein
 the extension mechanism is also configured to retract the end handle, and 
 the end handle in retracted configuration, is disposed inside of the front sidewall of the workpiece stocker. 
 
     
     
       14. The container storage add-on of  claim 9 , wherein the end handle is coupled to the arm at a bend section to enable the end handle to pick or place the container around a solid object. 
     
     
       15. The container storage add-on of  claim 9 , wherein the arm is extended for picking or for placing the container at a manual loading station or an automatic overhead transport station of the workpiece stocker. 
     
     
       16. A bare workpiece stocker, comprising:
 a bare workpiece storage for storing bare workpieces; 
 at least one loading station for accepting a workpiece container having workpieces stored therein; and 
 a container storage buffer interfacing with the loading station for supplying to or storing empty containers from the at least one loading station, wherein the container storage buffer comprises a first sidewall exterior face having a closable opening, wherein the first sidewall exterior face is coupled to a second sidewall exterior face of the bare workpiece stocker such that the first sidewall exterior face faces opposite the second sidewall exterior face, the second sidewall exterior face having another closable opening different and distinct from the closable opening of the first sidewall exterior face, wherein the second sidewall exterior face of the bare workpiece stocker is different than a front sidewall of the bare workpiece stocker, wherein the container storage buffer comprises
 a container storage chamber, and 
 a robot arm comprising an end handle for supporting the workpiece container, the robot arm comprising an extending mechanism for extending the end handle, 
 wherein the end handle is configured to extend through the closable opening of the first sidewall exterior face beyond the first sidewall exterior face, passing through the another closable opening to remove the workpiece container from the at least one loading station, through the second sidewall exterior face, to the container storage buffer. 
 
 
     
     
       17. The bare workpiece stocker of  claim 16 , wherein the end handle comprises one or more activated grippers facing in a z-direction for gripping the workpiece container or a bare workpiece. 
     
     
       18. The bare workpiece stocker of  claim 16 , wherein the end handle is configured to transfer the workpiece container from a plurality of storage compartments of the container storage chamber to the loading station. 
     
     
       19. The bare workpiece stocker of  claim 16 , wherein
 the at least one loading station, disposed on the front sidewall of the workpiece stocker, comprises two loading stations configured for operator access, wherein the two loading stations are disposed along an extended path of the extension mechanism, and 
 the end handle is coupled to the robot arm at a bend section to enable the end handle to pick or place the container around a loading station of the two loading stations. 
 
     
     
       20. The bare workpiece stocker of  claim 16 , wherein the extension mechanism is also configured to retract the end handle, wherein the end handle in retracted configuration, is disposed inside of the front sidewall of the bare workpiece stocker.