Plasma treatment apparatus

Abstract

In order to ensure quality even when a sheet-like base material is thin while improving efficiency of production, a plasma treatment apparatus disclosed herein includes a plasma treatment chamber X for treating a sheet-like base material Z with plasma, a high-frequency antenna 3 for generating plasma in the plasma treatment chamber X, and a feeding mechanism 10 for feeding the sheet-like base material Z into the plasma treatment chamber X in a vertical direction.

What is claimed is: 
     
       1. A plasma treatment apparatus comprising:
 a plasma treatment chamber which treats a sheet-like base material with plasma; 
 a high-frequency antenna which generates plasma in the plasma treatment chamber; 
 a feeding mechanism which feeds the sheet-like base material into the plasma treatment chamber in a vertical direction; and 
 a winding mechanism which winds the sheet-like base material that has passed through the plasma treatment chamber in the vertical direction, wherein 
 the feeding mechanism and the winding mechanism are provided below the plasma treatment chamber. 
 
     
     
       2. The plasma treatment apparatus according to  claim 1 , further comprising:
 a winding roller which winds the sheet-like base material; and 
 a cooling roller which cools the sheet-like base material that has been treated with plasma while guiding the sheet-like base material to the winding roller. 
 
     
     
       3. The plasma treatment apparatus according to  claim 2 , further comprising:
 a guide roller which guides the sheet-like base material that has been treated with plasma to the cooling roller, wherein 
 the guide roller is configured to receive an outer end portion in a width direction of the sheet-like base material being lowered first before a center portion in the width direction of the sheet-like base material. 
 
     
     
       4. A plasma treatment apparatus comprising:
 a plasma treatment chamber which treats a sheet-like base material with plasma; 
 a high-frequency antenna which generates plasma in the plasma treatment chamber; 
 a feeding mechanism which feeds the sheet-like base material into the plasma treatment chamber in a vertical direction; 
 a winding roller which winds the sheet-like base material; 
 a cooling roller which cools the sheet-like base material that has been treated with plasma while guiding the sheet-like base material to the winding roller; 
 a tension detection mechanism which detects a tension applied to the sheet-like base material by the winding roller; and 
 a control device which controls at least one of the feeding mechanism and the winding roller on the basis of the tension detected by the tension detection mechanism. 
 
     
     
       5. The plasma treatment apparatus according to  claim 1 , wherein a heater which heats the sheet-like base material is provided in the plasma treatment chamber. 
     
     
       6. A plasma treatment apparatus comprising:
 a plasma treatment chamber which treats a sheet-like base material with plasma; 
 a high-frequency antenna which generates plasma in the plasma treatment chamber; 
 a feeding mechanism which feeds the sheet-like base material into the plasma treatment chamber in a vertical direction; 
 a slit through which the sheet-like base material is able to pass is formed in facing walls of the plasma treatment chamber facing each other, and 
 a pair of guide plates which guide transfer of the sheet-like base material is further provided in the slit. 
 
     
     
       7. A plasma treatment apparatus comprising:
 a plasma treatment chamber which treats a sheet-like base material with plasma; 
 a high-frequency antenna which generates plasma in the plasma treatment chamber; 
 a feeding mechanism which feeds the sheet-like base material into the plasma treatment chamber in a vertical direction; 
 a chamber to which a gas different from a raw material gas supplied to the plasma treatment chamber is supplied; and 
 a decompression chamber interposed between the chamber and the plasma treatment chamber and configured to have a reduced pressure with respect to that of the chamber and the plasma treatment chamber.