Plasma processing detection indicator

Abstract

This invention provides a plasma treatment detection indicator that uses a fibrous base material or a synthetic resin base material comprising a coloring pigment as a base material and in which fine fiber pieces or coloring pigment is prevented from being generated in a powder form from the base material in plasma treatment. More specifically, this invention provides a plasma treatment detection indicator comprising a base material and at least a color-changing layer that changes color in a plasma treatment atmosphere, the color-changing layer being disposed above part or all of a surface of the base material, (1) the base material being a fibrous base material or a synthetic resin base material comprising a coloring pigment, and (2) a resin-based or inorganic transparent cover layer that covers all of the surface of the base material being disposed between the base material and the color-changing layer.

The invention claimed is: 
     
       1. A plasma treatment detection indicator comprising a base material and at least a color-changing layer that changes color in a plasma treatment atmosphere, the color-changing layer being disposed above part or all of a surface of the base material,
 (1) the base material being a fibrous base material or a synthetic resin base material comprising a coloring pigment, and 
 (2) a resin-based or inorganic transparent cover layer that covers all of the surface of the base material being disposed between the base material and the color-changing layer, 
 wherein the resin-based or inorganic transparent cover layer includes at least one member selected from the group consisting of polypropylenes, polyvinyl chlorides, polyesters, polystyrenes, polyethylenes, polyimides, polyamides, polycarbonates, polyacrylonitriles, and glass. 
 
     
     
       2. The indicator according to  claim 1 , wherein the transparent cover layer has a thickness of 5 μm or more. 
     
     
       3. The indicator according to  claim 1 , wherein the color-changing layer comprises a color-changing colorant that exhibits a change in chemical structure in a plasma treatment atmosphere to change color, and a non-color-changing colorant that does not exhibit a change in chemical structure in a plasma treatment atmosphere. 
     
     
       4. The indicator according to  claim 1 , wherein the indicator comprises a non-color-changing layer between the base material and the transparent cover layer, the non-color-changing layer comprising a non-color-changing colorant that does not exhibit a change in chemical structure in a plasma treatment atmosphere. 
     
     
       5. The indicator according to  claim 4 , wherein the non-color-changing layer and the color-changing layer are laminated with the transparent cover layer interposed therebetween in such a manner that the color-changing layer is placed above the non-color-changing layer so that their perimeters are aligned.