Resin container coating device

Abstract

A resin container coating device of the present invention includes a plurality of chambers storing a plurality of resin containers respectively in independent states, a plurality of internal electrodes in which gas conductive parts for conducting a source gas are formed to inner peripheral parts thereof and which are respectively inserted inside the plurality of resin containers stored in the chambers, a gas supply unit for supplying the source gas to the plurality of chambers, a high frequency power source for supplying a high frequency electric power to the plurality of chambers, and an electric power switching part capable of switching a supply designation of the high frequency electric power, which is supplied from the high frequency power source, from first and second chambers forming a first unit to third and fourth chambers forming a second unit.

The invention claimed is: 
     
       1. A resin container coating device comprising:
 a plurality of chambers serving as a plurality of outer electrodes which are mutually electrically independent and storing a plurality of resin containers respectively in independent states, each of the plurality of chambers having a storage room; 
 a plurality of internal electrodes which are electrically grounded and formed in a tubular shape, in which gas conductive parts for conducting a source gas are formed to inner peripheral parts thereof, and which are respectively inserted inside the plurality of resin containers stored in the chambers; 
 a gas supply source for supplying the source gas to the plurality of chambers; 
 a high frequency power source for supplying a high frequency electric power to the plurality of chambers; 
 a base part having one inner space which communicates with each storage room of the plurality of chambers, the plurality of chambers being arranged at an upper side of the base part; 
 an exhaust passage which communicates with each storage room of the plurality of chambers via the one inner space; 
 an electric power switch adapted to switch a supply designation of the high frequency electric power, which is supplied from the high frequency power source, from a part of the plurality of chambers to another chamber, and 
 a gas switch adapted to switch a supply destination of the source gas, which is supplied from the gas supply source, from a part of the plurality of chambers to another chamber, 
 wherein the gas switch is configured to carry out an operation of switching a supply destination of the source gas correspondingly to an operation of switching the supply destination of the high frequency electric power by the electric power switch, 
 wherein there is a container holding plate that is arranged at lower parts of the plurality of chambers and is configured to support the plurality of resin containers from below, 
 wherein the container holding plate is formed with a plurality of opening parts in which each of the plurality of internal electrodes is inserted, 
 wherein the container holding plate is formed with a plurality of exhaust openings, the storage room being communicated with the one inner space of the base part through the plurality of exhaust openings, and 
 wherein the resin coating device further comprises an insulating member arranged on the base part, wherein the container holding plate is arranged on the insulating member. 
 
     
     
       2. The resin container coating device according to  claim 1 ,
 wherein the plurality of chambers includes at least a first chamber, a second chamber, a third chamber, and a fourth chamber, 
 wherein a first unit includes at least the first chamber and the second chamber, 
 wherein a second unit includes at least the third chamber and the fourth chamber, 
 wherein the electric power switch is capable of switching the supply designation of the high frequency electric power, which is supplied from the high frequency power source, from the first unit to the second unit. 
 
     
     
       3. The resin container coating device according to  claim 1 ,
 wherein a lower part of each of the plurality of internal electrodes is threaded into and connected to a screw hole of the base part that is electrically grounded, and 
 wherein a gas passage path connected to the gas supply source is connected to the screw hole. 
 
     
     
       4. The resin container coating device according to  claim 1 ,
 wherein the plurality of chambers includes at least a first chamber, a second chamber, a third chamber, and a fourth chamber, 
 wherein a first unit includes at least the first chamber and the second chamber, 
 wherein a second unit includes at least the third chamber and the fourth chamber, 
 wherein the electric power switch is adapted to switch the supply designation of the high frequency electric power, which is supplied from the high frequency power source, selectively between the first unit to the second unit, and the gas switch is adapted to switch selectively between the first unit to the second unit, and 
 wherein the gas switch is configured to carry out an operation of switching a supply destination of the source gas correspondingly to an operation of switching the supply destination of the high frequency electric power by the electric power switch so as to supply electric power and the source gas to a selected one of the first unit and the second unit at a time. 
 
     
     
       5. The resin container coating device according to  claim 1 ,
 wherein each of the chambers is configured to store one resin container of the plurality of resin containers.