Inventor · disambiguated record

Michele Stawacz

Also filed as: STAWASZ MICHELE

1 granted patent·474 citations·filing 2005–2005

60Inventor score

Technology areasY10T

Files withADVANCED TECH MATERIALS1

Top patents by PatentIndex Score

1 record

0198US7475588B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2005·Granted Jan 13, 2009·474 cites·64 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →