Inventor · disambiguated record

Zong-Xian Tsai

Also filed as: TSAI ZONG-XIAN

1 granted patent·1 citations·filing 2003–2003

15Inventor score

Technology areasG03F

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0140US7037628B2Method of a floating pattern loading system in mask dry-etching critical dimension controlTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted May 2, 2006·1 cites·13 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →