Inventor · disambiguated record
Zhigiang Liu
Also filed as: LIU ZHIGIANG
6 granted patents·0 citations·filing 2010–2018
66Inventor score
Top patents by PatentIndex Score
6 records- 0159US10514277B2Measurement method and encoder device, and exposure method and deviceNIKON CORP·Filed 2018·Granted Dec 24, 2019·0 cites·12 claims
- 0255US10697805B2Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing deviceNIKON CORP·Filed 2018·Granted Jun 30, 2020·0 cites·20 claims
- 0353US10132656B2Measurement method and encoder device, and exposure method and deviceNIKON CORP·Filed 2018·Granted Nov 20, 2018·0 cites·22 claims
- 0449US9983028B2Measurement method and encoder device, and exposure method and deviceNIKON CORP·Filed 2013·Granted May 29, 2018·0 cites·13 claims
- 0547US9939293B2Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing deviceNIKON CORP·Filed 2012·Granted Apr 10, 2018·0 cites·32 claims
- 0627US8339612B2Shape-measuring interferometer having low-coherence source conjugate to the examined objectLIU ZHIGIANG·Filed 2010·Granted Dec 25, 2012·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →