Inventor · disambiguated record
Yuki Isaka
Also filed as: ISAKA YUKI
1 granted patent·2 pending applications·1 citations·filing 2022–2023
17Inventor score
Technology areasG03F
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0175US11841623B2Illumination apparatus, measurement apparatus, substrate processing apparatus, and method for manufacturing articleCANON KK·Filed 2022·Granted Dec 12, 2023·1 cites·13 claims
- 0262US2024061349A1Illumination apparatus, measurement apparatus, substrate processing apparatus, and method for manufacturing articleCANON KK·Filed 2023·Application pending·0 cites
- 0344US2023176489A1Detecting apparatus, substrate processing apparatus, and article manufacturing methodCANON KK·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →