Inventor · disambiguated record
Yoshikatsu Kojima
Also filed as: KOJIMA YOSHIKATSU
3 granted patents·70 citations·filing 1997–1998
73Inventor score
Files withNEC CORP3
Top patents by PatentIndex Score
3 records- 0164US6132910AMethod of implementing electron beam lithography using uniquely positioned alignment marks and a wafer with such alignment marksNEC CORP·Filed 1998·Granted Oct 17, 2000·36 cites·6 claims
- 0256US6114708AElectron-beam exposure apparatus and exposure methodNEC CORP·Filed 1997·Granted Sep 5, 2000·16 cites·24 claims
- 0348US5886357AElectron-beam writing system comprising a second aperture member including at least one rectangular beam-size adjustment apertureNEC CORP·Filed 1997·Granted Mar 23, 1999·18 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →