Inventor · disambiguated record
Yasuteru Tominaga
Also filed as: TOMINAGA YASUTERU
3 granted patents·4 citations·filing 2004–2004
53Inventor score
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0147US7110088B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2004·Granted Sep 19, 2006·4 cites·12 claims
- 0240US7244346B2Concentration measuring mechanism, exposure apparatus, and device production methodCANON KK·Filed 2004·Granted Jul 17, 2007·0 cites·7 claims
- 0332US7130015B2Inert-gas purge method, exposure apparatus, device fabrication method and devicesCANON KK·Filed 2004·Granted Oct 31, 2006·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →