Inventor · disambiguated record

Yasumasa Shima

Also filed as: SHIMA YASUMASA

1 granted patent·66 citations·filing 1992–1992

50Inventor score

Technology areasH10P

Files withDANIPPON SCREEN MANUFACTURING1

Top patents by PatentIndex Score

1 record

0169US5269643AMethod and apparatus for transferring wafers from wafer carrier to wafer conveyor apparatus in carrierless wafer surface treatment apparatusDANIPPON SCREEN MANUFACTURING·Filed 1992·Granted Dec 14, 1993·66 cites·55 claims

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